Method for manufacturing an electroactive actuator

• US 10,305,023 B2
• Filed: 03/31/2015
• Issued: 05/28/2019
• Est. Priority Date: 03/31/2014
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Inventors: Aliane, Abdelkader, Benwadih, Mohammed
• Primary Examiner(s): Kim, Paul D
• Application Number:
  US15/300,561
• Publication Number:
  US 20170186941A1
• Time in Patent Office: 1,519 Days
• CPC Class Codes: H10N 30/05 Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
• CPC Class Codes: H10N 30/067 Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
• CPC Class Codes: H10N 30/098 Forming organic materials
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/857 Macromolecular compositions
• CPC Class Codes: H10N 30/87 Electrodes or interconnections, e.g. leads or terminals
• CPC Class Codes: H10N 30/871 Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Abstract

A method for manufacturing an electroactive actuator is provided. The method includes applying a layer of an electroactive polymer to an electrode surface, crystallizing the electroactive polymer by application of U.V. flash and applying a second electrode onto the crystallized electroactive polymer layer. According to the method a stack of multiple superimposed first electrode layers, electroactive polymer layers and second electrode layers may be obtained.

Claims

1. A method for manufacturing an electroactive actuator from a stack comprising at least one first electrode and at least one layer comprising an electroactive polymer superposed on the at least one first electrode, with the at least one electroactive polymer having the capacity to respond by a displacement when the electroactive polymer is in a crystalline state and when an electric field is applied thereto, the method comprising:

obtaining an electroactive layer by crystallizing the at least one electroactive polymer of a layer of the at least one electroactive polymer superposed on the stack; and

forming at least one second electrode such that the electroactive layer is disposed between the at least one first electrode and the at least one second electrodes;

wherein;

the electroactive polymer is formed of a material able to crystallise at least partially under the effect of an exposure to the ultra-violet (UV) radiation; and

the crystallizing comprises exposing the electroactive layer to ultra-violet radiation during which a portion at least of the ultra-violet radiation is delivered in the form of one or several pulses, with the duration of each pulse being less than 100 milliseconds (ms) (10<sup>−

3</sup> seconds).

2. The method according to claim 1, wherein using the stack comprising the at least one layer comprising the electroactive polymer arranged between two electrodes, the following sequence of steps is carried out:

formation of an additional layer of electroactive polymer superposed on said stack;

obtaining of an additional electroactive layer by crystallisation of said additional layer of electroactive polymer, with the crystallisation comprising a step of exposure of the additional layer of electroactive polymer to UV radiation, with the step of exposure comprising the pulse or pulses;

formation of an electrode superposed on said additional electroactive layer.

3. The method according to claim 2, wherein said sequence of steps is reiterated to obtain a stack of a plurality of electroactive layers with each one having been subjected to an independent step of exposure of the electroactive layer to ultra-violet radiation and each one located between two electrodes.

4. The method according to claim 3, wherein the plurality of electroactive layers comprises at least three electroactive layers.

5. The method according to claim 1, wherein the duration of each pulse is less than 10 ms, and wherein the duration of exposure is between 0.5 ms and 3 ms, and wherein during the step of exposure the ultra-violet radiation is delivered in the form of one or several pulses, with the fluence of each one of the pulses being less than 50 j/cm².

6. The method according to claim 1, wherein the step of crystallisation comprises only said step of exposure, and wherein the electroactive layer is constituted solely of the electroactive polymer.

7. The method according to claim 1, wherein the stack rests on a substrate that is sufficiently flexible to follow the displacement of the stack.

8. The method according to claim 3, wherein at least some of the electrodes of the plurality of electroactive layers of the actuator are metal electrodes.

9. The method according to claim 3, wherein at least some of the electrodes of the plurality of electroactive layers of the actuator are made of graphene or are formed from a silver ink on nanowires.

10. The method according to claim 3, wherein the stack comprises several electroactive layers and wherein after crystallisation of a lower electroactive layer and before the formation of a second upper electroactive layer superposed on the lower electroactive layer, a UV blocking layer is formed between the lower and upper electroactive layers, said blocking layer comprising at least one non-metal compound that absorbs or blocks the UV, such that the UV blocking layer blocks at least a portion of the UV passing through the upper electroactive layer from the lower electroactive layer.

11. The method according to claim 10, wherein the non-metal compound that absorbs or blocks the UV comprises a thiol bond (—

SH).

12. The method according to claim 10, wherein the UV blocking layer is formed by the second electrode of the lower electroactive layer, wherein the non-metal compound that absorbs or blocks the UV forms a thiol bond (—

SH) and wherein the concentration in thiol bonds in the second electrode is between 0.5% to 10% by weight.

13. The method according to claim 10, wherein the blocking layer and the second electrode separating the upper electroactive layer from the lower electroactive layer are combined as one layer, said electrode comprising the non-metal compound that absorbs or blocks the UV.

14. The method according to claim 1, wherein the formation of the at least one second electrode comprises deposition of a metal solution by inkjet, screen printing or by ultrasonic spraying.

15. The method according to claim 10, wherein the blocking layer is a separate layer from the second electrode of the lower electroactive layer separating the upper electroactive layer from the lower electroactive layer, with the blocking layer being located between said second electrode and the upper electroactive layer or between the lower electroactive layer and the second electrode.

16. The method according to claim 1, wherein the electroactive polymer comprises a Poly vinylidenefluoride-Trifluoroethylene-chloro-fluoroethylene) (P(VDF-TrFe-CFE)) or a Poly(vinylidenefluoride-Trifluoroethylene-chloro trifluoroethylene) (P(VDF-TrFe-CTFE)).

17. The method according to claim 1, wherein the stack comprises more than two electrodes and wherein only two electrical contacts are formed, configured to apply a potential difference over the entire stack.