Crystal of nitride of group-13 metal on periodic table, and method for producing the same

• US 10,309,038 B2
• Filed: 12/14/2017
• Issued: 06/04/2019
• Est. Priority Date: 02/22/2013
• Status: Active Grant

• Current Assignee: Mitsubishi Chemical Corporation (Mitsubishi Chemical Group Corp.)
• Original Assignee: Mitsubishi Chemical Corporation (Mitsubishi Chemical Group Corp.)
• Inventors: Mikawa, Yutaka, Namita, Hideo, Ikeda, Hirotaka, Kamada, Kazunori, Fujisawa, Hideo, Kojima, Atsuhiko
• Primary Examiner(s): Gregorio, Guinever S
• Application Number:
  US15/841,985
• Publication Number:
  US 20180105953A1
• Time in Patent Office: 537 Days
• Field of Search: None
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: C30B 7/105 using ammonia as solvent, i.e. ammonothermal processes

Abstract

An object of the present invention is to provide a crystal of a nitride of a Group-13 metal on the Periodic Table which has good crystallinity and has no crystal strain, and to provide a production method for the crystal. The crystal of a nitride of a Group-13 metal on the Periodic Table of the present invention, comprises oxygen atom and hydrogen atom in the crystal and has a ratio of a hydrogen concentration to an oxygen concentration therein of from 0.5 to 4.5.

Claims

1. A method for producing a GaN crystal, the method comprising:

growing the GaN crystal on a seed crystal,

wherein;

the seed crystal is a GaN substrate having a (000-1) plane as a main plane;

the (000-1) plane surface is partially covered with a growth-inhibiting material to provide a linear opening where the (000-1) plane surface is not covered with the growth-inhibiting material; and

in said growing, a tabular GaN crystal is grown from the linear opening in the <

000-1>

direction by an ammonothermal method in the presence of a mineralizer containing fluorine and iodine in such a manner that the main plane orientation of the tabular GaN crystal is different from that of the seed crystal.

2. The method according to claim 1, wherein a width W₁ of the linear opening and a minimum width W₂ of the tabular GaN crystal in a direction parallel to the (000-1) plane surface of the seed crystal satisfy a relationship of W₂>

W₁.

3. The method according to claim 1, wherein a ratio of a minimum length L₂ of the tabular GaN crystal in a direction parallel to the (000-1) plane surface of the seed crystal to a length L₁ of the linear opening L₂/L₁ is 0.5 or more.

4. The method according to claim 1, wherein a ratio of a maximum height H of the tabular GaN crystal in a direction vertical to the (000-1) plane surface of the seed crystal to the length L₁ of the linear opening H/L_L is 0.1 or more.

5. The method according to claim 1, wherein, in said growing, the tabular GaN crystal is grown until a dimension of the tabular GaN crystal in the <

000-1>

direction is 3 mm or more.

6. The method according to claim 1, wherein the linear opening has a lengthwise direction parallel to an M-plane of the seed crystal.

7. The method according to claim 1, wherein the linear opening has a lengthwise direction parallel to an A-plane of the seed crystal.

8. The method according to claim 1, wherein the linear opening has a lengthwise direction tilted with a tilt angle from an M-plane of the seed crystal.

9. The method according to claim 8, wherein the tilt angle is 3°

to 23°

.

10. The method according to claim 1, wherein the seed crystal has on the (000-1) plane surface a plurality of the linear openings of which lengthwise directions are parallel to each other, and the tabular GaN crystal is grown from each of the plurality of the linear openings in said growing.

11. The method according to claim 10, wherein, in said growing, the tabular GaN crystals are grown from the plurality of the linear openings and bond to each other via a GaN crystal grown from a side face of the seed crystal.

12. A method for producing a GaN crystal, the method comprising:

(i) growing a tabular GaN crystal on a seed crystal from a linear opening in a <

000-1>

direction by an ammonothermal method in the presence of a mineralizer containing fluorine and iodine in such a manner that a main plane orientation of the tabular GaN crystal is different from a main plane orientation of the seed crystal, and

(ii) growing the GaN crystal on the tabular GaN crystal,

wherein

the seed crystal is a GaN substrate having a (000-1) plane as the main plane; and

the (000-1) plane surface is partially covered with a growth-inhibiting material to provide the linear opening where the (000-1) plane surface is not covered with the growth-inhibiting material.

13. The method according to claim 12, wherein, in said growing (i), the tabular GaN crystal is grown until a dimension of the tabular GaN crystal in the <

000-1>

direction is 3 mm or more.