Quality factor estimation for resonators

• US 10,309,782 B2
• Filed: 04/07/2016
• Issued: 06/04/2019
• Est. Priority Date: 04/07/2015
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Kapusta, Ronald A., Yan, Jiefeng, Lin, James
• Primary Examiner(s): Kwok, Helen C
• Application Number:
  US15/092,943
• Publication Number:
  US 20160298963A1
• Time in Patent Office: 1,153 Days
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

Various embodiments provide methods of determining the quality factor of a resonating body in ways that are advantageous over previously known methods. For example, embodiments allow the determination of the quality factors of a resonating body without preventing the simultaneous use of the resonating body. For micromachined (“MEMS”) devices, embodiments allow the determination of the quality factors of a resonating body in a manner that is not dependent on transduction parameters of the MEMS device.

Claims

1. A method of estimating a quality factor of a resonator, the method comprising:

driving the resonator between alternating ramp-up and ring-down phases, the ramp-up phases driven using a first drive signal for a first duration, the ring-down phases driven using a second drive signal for a second duration, wherein the first drive signal has a first amplitude and wherein the second drive signal has a second amplitude less than the first amplitude;

making first and second measurements of a parameter associated with a resonance of the resonator; and

producing an estimation of the quality factor of the resonator based on the first and second measurements.

2. The method of claim 1, wherein both the first and second measurements are made during the same ramp-up or ring-down phases.

3. The method of claim 1, wherein the first and second measurements are made during different ramp-up or ring-down phases.

4. The method of claim 1, wherein the parameter includes at least one of (a) current flow or (b) charge on at least one sense electrode that is electrostatically coupled with the resonator for monitoring the resonance of the resonator.

5. The method of claim 1, wherein the resonator is part of a sensor having a sensor bandwidth, and wherein driving the resonator between alternating ramp-up and ring-down phases comprises:

alternatingly switching between the first drive signal and the second drive signal at a frequency above the sensor bandwidth.

6. The method of claim 1, further comprising:

adjusting at least one of the first drive signal, the first duration, the second drive signal, or the second duration based on the estimation of the quality factor of the resonator.

7. Apparatus for estimating a quality factor of a resonator, the apparatus comprising:

a driver circuit configured to drive the resonator between alternating ramp-up and ring-down phases, the ramp-up phases driven using the first drive signal for a first duration, the ring-down phases driven using a second drive signal for a second duration, wherein the first drive signal has a first amplitude and wherein the second drive signal has a second amplitude less than the first amplitude; and

a quality factor measurement circuit configured to make first and second measurements of a parameter associated with a resonance of the resonator, the quality factor measurement circuit further configured to produce an estimation of the quality factor of the resonator based on the first and second measurements.

8. The apparatus of claim 7, wherein both the first and second measurements are made during the same ramp-up or ring-down phases.

9. The apparatus of claim 7, wherein the first and second measurements are made during different ramp-up or ring-down phases.

10. The apparatus of claim 7, wherein the parameter includes at least one of (a) current flow or (b) charge on at least one sense electrode that is electrostatically coupled with the resonator for monitoring the resonance of the resonator.

11. The apparatus of claim 7, wherein the resonator is part of a sensor having a sensor bandwidth, and wherein driving the resonator between alternating ramp-up and ring-down phases comprises:

alternatingly switching between the first signal and the second drive signal at a frequency above the sensor bandwidth.

12. The apparatus of claim 7, wherein the driver circuit is further configured to adjust at least one of the first drive signal, the first duration, the second drive signal, or the second duration based on the estimation of the quality factor of the resonator produced by the quality factor measurement circuit.

13. The apparatus of claim 7, wherein the sensor output circuit includes a low-pass filter or a band-pass filter.

14. A MEMS gyroscope comprising:

a resonator;

a driver circuit configured to drive the resonator between alternating ramp-up and ring-down phases, the ramp-up phases driven using a first drive signal for a first duration, the ring-down phases driven using a second drive signal for a second duration, wherein the first drive signal has a first amplitude and wherein the second drive signal has a second amplitude less than the first amplitude;

a quality factor measurement circuit configured to make first and second measurements of a parameter associated with a resonance of the resonator, the quality factor measurement circuit further configured to produce an estimation of a quality factor of the resonator based on the first and second measurements; and

a gyroscope output circuit configured to sense rotation of the MEMS gyroscope based on Coriolis-induced signals.

15. The MEMS gyroscope of claim 14, wherein both the first and second measurements are made during the same ramp-up or ring-down phases.

16. The MEMS gyroscope of claim 14, wherein the first and second measurements are made during different ramp-up or ring-down phases.

17. The MEMS gyroscope of claim 14, wherein the parameter includes at least one of (a) current flow or (b) charge on at least one sense electrode that is electrostatically coupled with the resonator for monitoring the resonance of the resonator.

18. The MEMS gyroscope of claim 14, wherein the MEMS gyroscope has a sensor bandwidth, and wherein the driver circuit is configured to alternatingly switch between the first drive signal and the second drive signal at a frequency above the sensor bandwidth.

19. The MEMS gyroscope of claim 14, wherein the driver circuit is further configured to adjust at least one of the first drive signal, the first duration, the second drive signal, or the second duration based on the estimation of the quality factor of the resonator produced by the quality factor measurement circuit.

20. The MEMS gyroscope of claim 14, wherein the gyroscope output circuit includes a low-pass filter or a band-pass filter.