Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance

• US 10,309,997 B2
• Filed: 03/15/2013
• Issued: 06/04/2019
• Est. Priority Date: 03/15/2013
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Wurzinger, Christoph Bernhard, Wiesbauer, Andreas, Draxelmayr, Dieter, Straeussnigg, Dietmar
• Primary Examiner(s): Rodak, Lee E
• Application Number:
  US13/835,274
• Publication Number:
  US 20140266260A1
• Time in Patent Office: 2,272 Days
• Field of Search: 324519, 324548, 324720, 32475017, 32475428, 324658-690, 7351418, 7351425, 7351432
• CPC Class Codes: G01D 5/241 by relative movement of capacitor electrodes
• CPC Class Codes: G01R 27/2605 Measuring capacitance capacitive sensors G01D5/24
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence

Abstract

An apparatus for generating a sensor signal indicating information on a capacitance of a variable capacitor including a variable capacitance includes a sensor unit and a compensation unit. The sensor unit is configured to generate a sensor signal indicating information on a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor while the variable capacitor is biased by a predefined bias voltage. Further, the compensation unit is configured to influence the sensor signal or to provide a compensation signal capable of influencing the sensor signal so that the sensor signal includes less nonlinear signal portions than a sensor signal without the influence of the compensation unit or the compensation signal.

Claims

1. An apparatus for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance, the apparatus comprising:

a sensor unit configured to generate a sensor signal indicating information on a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor while the variable capacitor is biased by at least one predefined bias voltage, wherein the at least one predefined bias voltage is a constant voltage, wherein the sensor unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the inverting operational amplifier; and

a compensation unit configured to provide a compensation signal to the sensor signal such that the compensation signal is processed along with the sensor signal such that nonlinear signal portions of the sensor signal are reduced;

wherein the compensation unit is configured to calculate a compensated sensor signal based on a digital sensor signal generated by the sensor unit and provide the compensation signal to the variable capacitor;

wherein the variable capacitor with the variable capacitance comprises a membrane between two back plates, wherein the membrane is biased with the at least one predefined bias voltage, wherein the sensor unit is connected to a first back plate of the variable capacitor and is configured to generate the sensor signal indicating a varying current from or to the first back plate of the variable capacitor caused by a movement of the membrane of the variable capacitor, wherein the compensation unit is connected to a second back plate of the variable capacitor and is configured to generate the compensation signal indicating a varying current from or to the second back plate of the variable capacitor caused by the movement of the membrane of the variable capacitor, wherein the second back plate of the variable capacitor is connected to an inverting input of another operational amplifier and the another operational amplifier is configured to provide the compensation signal at an output of the another operational amplifier.

2. The apparatus according to claim 1, wherein the variable capacitor comprises a membrane and at least one back plate, wherein the compensation unit is configured to provide the compensation signal to the sensor signal to reduce the nonlinear signal portions of the sensor signal that are related to a nonlinear correlation of the varying current and a distance between the membrane and the at least one back plate.

3. The apparatus according to claim 1, wherein the compensation unit is configured to generate the compensation signal indicating an approximation of an inverse of the nonlinear signal portions of the sensor signal.

4. The apparatus according to claim 3, wherein the compensation unit is configured to generate the compensation signal based on an approximation by a polynomial of the second order or the third order of the sensor signal.

5. The apparatus according to claim 1, wherein the sensor unit comprises an analog-to-digital-converter configured to generate the sensor signal and the digital sensor signal based on one or more analog to digital conversions of an analog sensor signal indicating the varying current flowing through the connection between the sensor unit and the variable capacitor caused by the variation of the capacitance of the variable capacitor biased by the at least one predefined bias voltage.

6. The apparatus according to claim 1, comprising a bias voltage unit, wherein the at least one predefined bias voltage comprises a first, second, and third predefined bias voltage, wherein the sensor unit is configured to bias the first back plate by the first predefined bias voltage, wherein the compensation unit is configured to bias the second back plate by the second predefined bias voltage, wherein the bias voltage unit is configured to bias the membrane by the third predefined bias voltage, wherein the first predefined bias voltage, the second predefined bias voltage and the third predefined bias voltage are selected so that the nonlinear signal portions of the sensor signal are lower than the nonlinear signal portions of a sensor signal generated with the first predefined bias voltage being equal to the second predefined bias voltage.

7. The apparatus according to claim 1, wherein the compensation unit is configured to generate the compensated sensor signal by combining the sensor signal generated by the sensor unit with the compensation signal so that the compensated sensor signal comprises less of the nonlinear signal portions than the sensor signal generated by the sensor unit.

8. The apparatus according to claim 7, wherein the compensation unit is configured to combine the sensor signal generated by the sensor unit with the compensation signal by subtracting the compensation signal from the sensor signal generated by the sensor unit.

9. The apparatus according to claim 1, wherein the variable capacitor is connected to the inverting input of the operational amplifier and the operational amplifier is configured to provide the sensor signal at an output of the operational amplifier.

10. The apparatus according to claim 1, comprising a silicon microphone with the variable capacitor configured to change the capacitance depending on a sound pressure applied to the silicon microphone.

11. An apparatus for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance, the apparatus comprising:

the variable capacitor comprising the variable capacitance;

a bias voltage unit configured to bias the variable capacitor by a predefined bias voltage;

a sensor unit configured to generate a digital sensor signal and the sensor signal indicating information on a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor while the variable capacitor is biased by the predefined bias voltage,

wherein the sensor unit comprises an analog-to-digital-converter connected to an operational amplifier and configured to generate the digital sensor signal based on an analog to digital conversion of an analog sensor signal, wherein the operational amplifier of the sensor unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier; and

a compensation unit configured to provide a compensation signal to the sensor signal such that the compensation signal is processed along with the sensor signal such that nonlinear signal portions of the sensor signal are reduced,

wherein the compensation unit is configured to calculate a compensated sensor signal based on the digital sensor signal generated by the sensor unit and provide the compensation signal to a node at an output of the sensor unit,

wherein the variable capacitor with a variable capacitance comprises a membrane between two back plates, wherein the membrane is biased with the predefined bias voltage, wherein the sensor unit is connected to a first back plate of the variable capacitor and is configured to generate the sensor signal indicating a varying current from or to the first back plate of the variable capacitor caused by a movement of the membrane of the variable capacitor, wherein the compensation unit is connected to a second back plate of the variable capacitor and is configured to generate the compensation signal indicating a varying current from or to the second back plate of the variable capacitor caused by the movement of the membrane of the variable capacitor, wherein the second back plate of the variable capacitor is connected to an inverting input of another operational amplifier and the another operational amplifier is configured to provide the compensation signal at an output of the another operational amplifier.

12. An apparatus for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance, the apparatus comprising:

the variable capacitor comprising the variable capacitance, wherein the variable capacitor with the variable capacitance comprises a membrane between two back plates, wherein one back plate is formed by a bottom of a cavity below the membrane;

a bias voltage unit configured to bias the membrane of the variable capacitor by a predefined bias voltage;

a sensor unit configured to generate a sensor signal indicating information on a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor while the variable capacitor is biased by the predefined bias voltage, wherein the sensor unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier of the sensor unit; and

a compensation unit configured to provide a compensation signal to the sensor signal such that the compensation signal is processed along with the sensor signal such that nonlinear signal portions of the sensor signal are reduced, wherein the compensation unit is configured to calculate a compensated sensor signal based on a digital sensor signal generated by the sensor unit, and provide the compensation signal to the variable capacitor;

wherein a first back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the sensor unit and the operational amplifier of the sensor unit is configured to provide the sensor signal at the output of the operational amplifier of the sensor unit, wherein the compensation unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier of the compensation unit, wherein a second back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the compensation unit and the operational amplifier of the compensation unit is configured to provide the compensation signal at an output of the operational amplifier of the compensation unit.

13. An apparatus for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance, the apparatus comprising:

the variable capacitor comprising the variable capacitance, wherein the variable capacitor with the variable capacitance comprises a membrane between two back plates, wherein one back plate is formed by a bottom of a cavity below the membrane;

a sensor unit configured to generate a sensor signal indicating information on a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor while the variable capacitor is biased by a predefined bias voltage, wherein the sensor unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier, wherein the capacitive feedback is configured to programmably adjust a gain of the inverting operational amplifier; and

a compensation unit configured to influence the sensor signal by providing a compensation signal reducing nonlinear signal portions of the sensor signal with a compensation signal, calculate a compensated sensor signal based on a digital sensor signal generated by the sensor unit and provide the compensation signal to the variable capacitor, wherein a first back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the sensor unit and the operational amplifier of the sensor unit is configured to provide the sensor signal at the output of the operational amplifier of the sensor unit, wherein the compensation unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier of the compensation unit, wherein a second back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the compensation unit and the operational amplifier of the compensation unit is configured to provide the compensation signal at an output of the operational amplifier of the compensation unit.

14. The apparatus according to claim 13, wherein the compensation unit comprises a bias voltage unit configured to bias the first back plate by a first predefined bias voltage and the second back plate by a second predefined bias voltage, wherein the sensor unit is configured to bias the membrane with a third predefined bias voltage and to generate the sensor signal indicating a varying current flowing through a connection between the sensor unit and the variable capacitor caused by a movement of the membrane of the variable capacitor.

15. The apparatus according to claim 13, comprising a silicon microphone with the variable capacitor configured to change the capacitance depending on a sound pressure applied to the silicon microphone.

16. A method for generating a sensor signal indicating information on a capacitance of a variable capacitor with a variable capacitance, the method comprising:

generating a sensor signal indicating a varying current flowing through a connection between a sensor unit and the variable capacitor caused by a variation of the capacitance of the variable capacitor biased by a predefined bias voltage, wherein the predefined bias voltage is a constant voltage, and wherein the sensor unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier; and

influencing the sensor signal by a compensation unit by providing a compensation signal to the sensor signal directly at an output of the sensor unit such that the compensation signal is processed along with the sensor signal to reduce nonlinear signal portions of the sensor signal, wherein a first back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the sensor unit and the operational amplifier of the sensor unit is configured to provide the sensor signal at the output of the operational amplifier of the sensor unit, wherein the compensation unit comprises an inverting operational amplifier with a capacitive feedback connected to an inverting input of the operational amplifier of the compensation unit, wherein a second back plate of the variable capacitor is connected to the inverting input of the operational amplifier of the compensation unit and the operational amplifier of the compensation unit is configured to provide the compensation signal at an output of the operational amplifier of the compensation unit.

17. The method according to claim 16, wherein the variation of the capacitance is caused by a variation of a sound pressure level.

18. The method according to claim 17, wherein the variation of the sound pressure level comprises an inverse relationship to a variation of the capacitance.