Wafer-level liquid-crystal-on-silicon projection assembly, systems and methods
First Claim
1. A method for fabricating a wafer-level liquid crystal on silicon (LCOS) projection systems, comprising:
- disposing a polarizing beam-separating (PBS) wafer above an active-matrix wafer that includes an arrayed plurality of active matrices for addressing liquid crystal display pixels, the PBS wafer including a plurality of PBS film bands each (i) oriented at 45 degrees to a plane of the active-matrix wafer and (ii) configured to reflect an input illumination toward the active-matrix wafer, a distance between adjacent PBS film bands, of the plurality of PBS film bands, equaling a spacing between rows of the arrayed plurality of active matrices; and
disposing a lens wafer, including a plurality of lenses, above the PBS wafer.
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Abstract
A wafer-level liquid-crystal-on-silicon (LCOS) projection assembly includes a LCOS display for spatially modulating light incident on the LCOS display and a polarizing beam-separating (PBS) layer for directing light to and from the LCOS display. A method for fabricating a LCOS projection system includes disposing a PBS wafer above an active-matrix wafer. The active-matrix wafer includes a plurality of active matrices for addressing liquid crystal display pixels. The method, further includes disposing a lens wafer above the PBS wafer. The lens wafer includes a plurality of lenses. Additionally, a method for fabricating a wafer-level polarizing beam includes bonding a PBS wafer and at least one other wafer to form a stacked wafer. The PBS wafer includes a PBS layer that contains a plurality of PBS film bands.
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Citations
8 Claims
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1. A method for fabricating a wafer-level liquid crystal on silicon (LCOS) projection systems, comprising:
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disposing a polarizing beam-separating (PBS) wafer above an active-matrix wafer that includes an arrayed plurality of active matrices for addressing liquid crystal display pixels, the PBS wafer including a plurality of PBS film bands each (i) oriented at 45 degrees to a plane of the active-matrix wafer and (ii) configured to reflect an input illumination toward the active-matrix wafer, a distance between adjacent PBS film bands, of the plurality of PBS film bands, equaling a spacing between rows of the arrayed plurality of active matrices; and disposing a lens wafer, including a plurality of lenses, above the PBS wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification