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Apparatus and method for detecting position, exposure apparatus, and method for the same

  • US 10,314,142 B2
  • Filed: 08/19/2016
  • Issued: 06/04/2019
  • Est. Priority Date: 08/25/2015
  • Status: Active Grant
First Claim
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1. A position detecting apparatus that detects a position of a mark on an object, the apparatus comprising:

  • a light receiving element configured to receive light from the mark and accumulate first signals and second signals from the mark;

    a control unit configured to detect a position of the mark based on the light from the mark received by the light receiving element;

    a light source configured to illuminate the mark; and

    an adjusting unit configured to adjust an amount of light applied to the mark,wherein the control unit obtains the amount of the light from the mark based on the accumulated first signals in a term overlapping with another term during which the accumulated second signals are transferred to the control unit,wherein the control unit, in a case where the amount of the light from the mark is appropriate, detects the position of the mark based on the light from the mark received by the light receiving element and in a case where the amount of the light from the mark is inappropriate, adjusts the amount of light applied to the mark by controlling the adjusting unit.

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