Fusion bonding process for glass

• US 10,322,469 B2
• Filed: 06/03/2009
• Issued: 06/18/2019
• Est. Priority Date: 06/11/2008
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Matsumoto, Satoshi, Wakuda, Toshimitsu
• Primary Examiner(s): Wilson, Michael H.
• Assistant Examiner(s): Krinker, Yana B
• Application Number:
  US12/994,354
• Publication Number:
  US 20110067448A1
• Time in Patent Office: 3,667 Days
• Field of Search: 65 36, 65 43, 65 45
• CPC Class Codes: B23K 26/324 involving non-metallic parts
• CPC Class Codes: C03B 23/245 Hollow glass sheets
• CPC Class Codes: C03C 27/06 Joining glass to glass by processes other than fusing fusing C03B23/20; units for use as elements for closing wall or like openings and comprising two or more parallel glass panes in spaced relationship, the panes being permanently secured together E06B3/66
• CPC Class Codes: Y02P 40/57 Improving the yield, e-g- reduction of reject rates

Abstract

A part of a glass layer 103 disposed along a region to be fused R is irradiated with a laser beam L1, so as to form the glass layer 103 with a laser-absorbing part 108a having a high laser absorptance. Then, while using the laser-absorbing part 108a as an irradiation initiation position, the region to be fused R is irradiated therealong with a laser beam L2, so as to melt the glass layer 103 and fix the glass layer 103 onto a glass member 104. Since the irradiation initiation position for the laser beam L2 has already become the laser-absorbing part 108a, a stable region where the melting of the glass layer 103 is stable can be formed immediately from the start point for initiating the irradiation with the second laser beam or nearby. The glass member 104 is fused to a glass member 105 through the glass layer 103 having such a stable region formed throughout the region to be fused R, so as to yield a glass fusing structure 101.

Claims

1. A glass fusing method for manufacturing a glass fusing structure by fusing first and second glass members together, the method comprising the steps of:

disposing a glass layer on the first glass member along a region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

irradiating a part of the glass layer with a first laser beam, so as to melt the part of the glass layer and form a laser-absorbing part in the glass layer;

irradiating the region to be fused therealong with a second laser beam while using the laser-absorbing part, formed in advance by irradiation with the first laser beam, as an irradiation initiation position, so as to melt the glass layer and fix the glass layer to the first glass member;

overlaying the second glass member on the first glass member having the glass layer fixed thereto such that the glass layer is interposed therebetween, and irradiating the region to be fused therealong with a third laser beam, so as to fuse the first and second glass members together; and

the first laser beam is different from the second laser beam and both of the aforementioned laser beams are different from the third laser beam.

2. A glass fusing method according to claim 1, wherein the laser-absorbing part is formed in the part of the glass layer throughout the width of the glass layer in a direction intersecting a moving direction of the second laser beam with respect to the region to be fused.

3. A glass fusing method according to claim 1, wherein the laser-absorbing part is formed such that a center part thereof in a direction intersecting a moving direction of the second laser beam with respect to the region to be fused projects in the moving direction of the second laser beam.

4. A glass fusing method according to claim 1, wherein a plurality of laser-absorbing parts are formed intermittently along the region to be fused;

and

wherein one of the plurality of laser-absorbing parts is used as the irradiation initiation position.

5. A glass fusing method for manufacturing a glass fusing structure by fusing first and second glass members together, the method comprising the steps of:

disposing a glass layer on the first glass member along a region to be fused that is set on a surface of the first glass member and a predetermined region connected to the region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

irradiating the predetermined region therealong from an irradiation initiation position in the predetermined region with a first laser beam and then continuously irradiating the region to be fused therealong with the first laser beam, so as to melt the glass layer and fix the glass layer to the first glass member;

overlaying the second glass member on the first glass member having the glass layer fixed thereto such that the glass layer is interposed, and irradiating the region to be fused therealong with a second laser beam, so as to fuse the first and second glass members together;

the first laser beam is different from the second laser beam;

the region to be fused is a ring-shaped region; and

the predetermined region is a region projecting from the ring-shaped region to be fused so as to follow horizontally along the surface of the first glass member, the predetermined region being a region that is different from the ring-shaped region to be fused, the predetermined region projecting as viewed from a direction perpendicular to the surface of the first glass member on which the ring-shaped region to be fused is set.

6. A glass fusing method according to claim 5, wherein the predetermined region includes a whole unstable region where the melting of the glass layer becomes unstable when irradiated once from the irradiation initiation position with the first laser beam.

7. A glass fusing method according to claim 5, wherein the predetermined region is disposed on the outside of a ring-shaped region to be fused.

8. A glass fusing method according to claim 5, further comprising the step of arranging a first portion of the region to be fused and the predetermined region connected to one end part of the first portion of the region to be fused along a first line extending in a predetermined direction between one side and an other side in the first glass member and arranging a second portion of the region to be fused and the predetermined region connected to the other end part of the second portion of the region to be fused along a second line extending in the predetermined direction in the first glass member;

wherein, during irradiation with the first laser beam, the first laser beam is relatively moved from the one side to the other side along the first line and then continuously relatively moved from the other side to the one side along the second line.

9. A glass fusing method according to claim 5, further comprising the step of arranging at least two sets each constituted by a first portion of the region to be fused and the predetermined region connected to one end part of the first portion of the region to be fused along a line extending in a predetermined direction between one side and an other side in the first glass member;

wherein, during irradiation with the first laser beam, the first laser beam is relatively moved from the one side to the other side along the first line.

10. A glass layer fixing method for fixing a glass layer to a first glass member along a region to be fused in which the first glass member and a second glass member are adapted to be fused together, the method comprising the steps of:

disposing the glass layer on the first glass member along the region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

irradiating a part of the glass layer with a first laser beam, so as to melt the part of the glass layer and form a laser-absorbing part in the glass layer; and

irradiating the region to be fused therealong with a second laser beam while using the laser-absorbing part, formed in advance by irradiation with the first laser beam, as an irradiation initiation position, so as to melt the glass layer and fix the glass layer to the first glass member;

the first laser beam is different from the second laser beam; and

the glass layer disposed on the first glass member is irradiated with the first laser beam and the second laser beam before the second glass member is overlaid on the first glass member such that the glass layer is interposed between the first and second glass members when the second glass member is later overlaid on the first glass member.

11. A glass layer fixing method according to claim 10, wherein the laser-absorbing part is formed in the part of the glass layer throughout the width of the glass layer in a direction intersecting a moving direction of the second laser beam with respect to the region to be fused.

12. A glass layer fixing method according to claim 10, wherein the laser-absorbing part is formed such that a center part thereof in a direction intersecting a moving direction of the second laser beam with respect to the region to be fused projects in the moving direction of the second laser beam.

13. A glass layer fixing method according to claim 10, wherein a plurality of laser-absorbing parts are formed intermittently along the region to be fused;

and

wherein one of the plurality of laser-absorbing parts is used as the irradiation initiation position.

14. A glass layer fixing method for fixing a glass layer to a first glass member along a region to be fused that is set on a surface of the first glass member in which the first glass member and a second glass member are adapted to be fused together, the method comprising the steps of:

disposing the glass layer on the first glass member along the region to be fused and a predetermined region connected to the region to be fused, the glass layer being formed by removing an organic solvent and a binder from a paste layer containing a glass powder, a laser-absorbing material, the organic solvent and the binder;

irradiating the predetermined region therealong from an irradiation initiation position in the predetermined region with a first laser beam and then continuously irradiating the region to be fused therealong with the first laser beam, so as to melt the glass layer and fix the glass layer to the first glass member;

the region to be fused is a ring-shaped region; and

the predetermined region is a region projecting from the ring-shaped region to be fused so as to follow horizontally along the surface of the first glass member, the predetermined region being a region that is different from the ring-shaped region to be fused, the predetermined region projecting as viewed from a direction perpendicular to the surface of the first glass member on which the ring-shaped region to be fused is set.

15. A glass layer fixing method according to claim 14, wherein the predetermined region includes a whole unstable region where the melting of the glass layer becomes unstable when irradiated once from the irradiation initiation position with the first laser beam.

16. A glass layer fixing method according to claim 14, wherein the predetermined region is disposed on the outside of a ring-shaped region to be fused.

17. A glass layer fixing method according to claim 14, further comprising the step of arranging a first portion of the region to be fused and the predetermined region connected to one end part of the first portion of the region to be fused along a first line extending in a predetermined direction between one side and an other side in the first glass member and arranging a second portion of the region to be fused and the predetermined region connected to the other end part of the second portion of the region to be fused along a second line extending in the predetermined direction in the first glass member;

wherein, during irradiation with the first laser beam, the first laser beam is relatively moved from the one side to the other side along the first line and then continuously relatively moved from the other side to the one side along the second line.

18. A glass layer fixing method according to claim 14, further comprising the step of arranging at least two sets each constituted by a first portion of the region to be fused and the predetermined region connected to one end part of the first portion of the region to be fused along a line extending in a predetermined direction between one side and an other side in the first glass member;

wherein, during irradiation with the first laser beam, the first laser beam is relatively moved from the one side to the other side along the first line.