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Support structure and method of forming a support structure

  • US 10,322,481 B2
  • Filed: 03/06/2014
  • Issued: 06/18/2019
  • Est. Priority Date: 03/06/2014
  • Status: Active Grant
First Claim
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1. A structure, comprising:

  • a carrier;

    a suspended structure;

    a holding structure holding the suspended structure to the carrier;

    the holding structure comprising a sidewall having a curved section that extends from a top surface of the carrier to a tapered end of the holding structure, the tapered end being attached to a bottom surface of the suspended structure, wherein the holding structure is compositionally graded and further comprises a first material, and a second material different from the first material that is diffused into the first material, wherein a concentration of the second material in the first material is continuously varied as a function of location within the first material relative to the carrier;

    wherein the top surface of the carrier faces toward the suspended structure,the curved section of the holding structure has a concave shape, andthe tapered end of the holding structure physically connects to the suspended structure, andwherein at least a portion of the bottom surface of the suspended structure is free of the holding structure.

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