Support structure and method of forming a support structure
First Claim
1. A structure, comprising:
- a carrier;
a suspended structure;
a holding structure holding the suspended structure to the carrier;
the holding structure comprising a sidewall having a curved section that extends from a top surface of the carrier to a tapered end of the holding structure, the tapered end being attached to a bottom surface of the suspended structure, wherein the holding structure is compositionally graded and further comprises a first material, and a second material different from the first material that is diffused into the first material, wherein a concentration of the second material in the first material is continuously varied as a function of location within the first material relative to the carrier;
wherein the top surface of the carrier faces toward the suspended structure,the curved section of the holding structure has a concave shape, andthe tapered end of the holding structure physically connects to the suspended structure, andwherein at least a portion of the bottom surface of the suspended structure is free of the holding structure.
1 Assignment
0 Petitions
Accused Products
Abstract
A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
34 Citations
20 Claims
-
1. A structure, comprising:
-
a carrier; a suspended structure; a holding structure holding the suspended structure to the carrier;
the holding structure comprising a sidewall having a curved section that extends from a top surface of the carrier to a tapered end of the holding structure, the tapered end being attached to a bottom surface of the suspended structure, wherein the holding structure is compositionally graded and further comprises a first material, and a second material different from the first material that is diffused into the first material, wherein a concentration of the second material in the first material is continuously varied as a function of location within the first material relative to the carrier;wherein the top surface of the carrier faces toward the suspended structure, the curved section of the holding structure has a concave shape, and the tapered end of the holding structure physically connects to the suspended structure, and wherein at least a portion of the bottom surface of the suspended structure is free of the holding structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A structure, comprising:
-
a carrier comprising a cavity; a suspended structure; a holding structure holding the suspended structure to the carrier;
the holding structure comprising a sidewall having a curved section that extends from a top surface of the carrier to a tapered end of the holding structure;wherein the top surface of the carrier faces toward the suspended structure; wherein the holding structure is compositionally graded; and wherein the sidewall having a curved section is laterally disposed at least partially outside the cavity. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification