Feedback control of dimensions in nanopore and nanofluidic devices

• US 10,323,333 B2
• Filed: 08/20/2016
• Issued: 06/18/2019
• Est. Priority Date: 11/02/2010
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Harrer, Stefan, Rossnagel, Stephen M., Waggoner, Philip S.
• Primary Examiner(s): Ripa, Bryan D.
• Assistant Examiner(s): Chung, Ho-Sung
• Application Number:
  US15/242,516
• Publication Number:
  US 20160355943A1
• Time in Patent Office: 1,032 Days
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B81C 2201/0114 Electrochemical etching, anodic oxidation
• CPC Class Codes: C25D 9/06 by anodic processes

Abstract

Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.

Claims

1. A method of fabricating a nanofluidic device, comprising:

providing a substrate comprising a nanofluidic channel running parallel to a top surface of the substrate, the nanofluidic channel being bounded by an electrical conductor;

reducing the dimensions of the nanofluidic channel by electrochemically oxidizing the electrical conductor;

monitoring the size of the nanofluidic channel by measuring ionic current through the nanofluidic channel, and

discontinuing reducing the dimensions of the nanofluidic channel once the ionic current through the nanofluidic channel reaches a level representative of a target channel dimension.

2. The method of claim 1, wherein oxidizing the electrical conductor includes filling the nanofluidic channel with an electrolyte and applying a voltage to the electrical conductor.

3. The method of claim 2, wherein discontinuing reducing the dimensions of the nanofluidic channel is conducted automatically when the ionic current reaches a level corresponding to the target channel dimension.

4. The method of claim 1, wherein the nanofluidic channel includes a bottom wall and side walls, the bottom and side walls being bounded by the electrical conductor.

5. A method of fabricating a nanofluidic device, comprising:

obtaining a structure including a base, a non-metallic layer on the base and a top layer on the non-metallic layer;

forming a nanochannel within the non-metallic layer of the structure;

forming a channel opening within the top layer of the structure;

forming an electrically conductive layer within the nanochannel, the electrically conductive layer forming a surface of the nanochannel having a bottom portion extending over the base and sidewall portions adjoining the non-metallic layer;

closing the channel opening while forming the electrically conductive layer; and

electrochemically oxidizing the electrically conductive layer to reduce the dimensions of the nanochannel.

6. The method of claim 5, wherein electrochemically oxidizing the electrically conductive layer includes:

filling the nanochannel with an electrolyte; and

applying a voltage to the electrically conductive layer, thereby forming an oxide layer on the electrically conductive layer, the oxide layer adjoining the bottom portion and the sidewall portions of the electrically conductive layer.

7. The method of claim 6, further including:

creating an ionic current through the nanochannel;

measuring the ionic current, and

discontinuing electrochemically oxidizing the electrically conductive layer when the ionic current reaches a level corresponding to targeted dimensions of the nanochannel.

8. The method of claim 6, further including reversing the voltage applied to the electrically conductive layer, thereby enlarging the dimensions of the nanochannel.

9. The method of claim 6, wherein the nanochannel extends down to the base, the bottom portion of the electrically conductive layer being formed within the nanochannel and on the base.