Method for calibrating a measuring device

• US 10,323,938 B2
• Filed: 05/13/2015
• Issued: 06/18/2019
• Est. Priority Date: 05/13/2014
• Status: Active Grant

• Current Assignee: CARL MAHR Holding GmbH (CARL MAHR GmbH & Company KG)
• Original Assignee: CARL MAHR Holding GmbH (CARL MAHR GmbH & Company KG)
• Inventors: Baer, Goran, Pruss, Christof, Osten, Wolfgang
• Primary Examiner(s): Chowdhury, Tarifur R
• Assistant Examiner(s): Cook, Jonathon
• Application Number:
  US15/310,697
• Publication Number:
  US 20170074648A1
• Time in Patent Office: 1,497 Days
• Field of Search: 356498
• CPC Class Codes: G01B 21/042 Calibration or calibration artifacts G01B3/30, G01B9/02072 take precedence
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer

Abstract

The invention relates to a method for calibrating a measuring device, comprising the following steps: moving, with finite accuracy and thus with positioning error, to various points that lie in a testing volume of the measuring device and that can be characterized by spatial and/or angular coordinates, generating measurement signals at the respective points, and determining parameters of a computing model of the measuring device from the measurement signals and the spatial and/or angular coordinates. The method is characterized in that a coordinate system to which the coordinates of the points of the testing volume relate is defined from points moved to with error, by associating predetermined coordinate values with exactly six coordinates of three points.

Claims

1. Method for calibrating a measuring device (10), the method comprising:

moving, with finite accuracy and thus with positioning error, a reference object to at least three measuring positions located in a testing volume (24) of the measuring device and distinguishable by spatial and/or angular coordinates,

generating measurement signals at the respective measuring positions, and

determining parameters of a mathematical model of the measuring device from the measurement signals and the spatial and/or angular coordinates, including deriving a coordinate system, to which coordinates of points of the testing volume relate, from the measuring positions moved to with error by associating predetermined coordinate values with exactly six coordinates of at least three of the measuring positions,

wherein the associating predetermined coordinate values comprises;

assigning a first set of three predetermined coordinate values (0/0/0) to a first measuring position of the at least three measuring positions and defining error caused by moving with error into the first measuring position to zero by a first set of three secondary conditions (N1, N2, N3) within an equation system characterizing the measuring device,

assigning a second set of three predetermined coordinate values (0/0/1) to a second measuring position of the at least three measuring positions and defining error caused by moving with error into the second measuring position to zero by a second set of two additional secondary conditions (N4, N5) in the equation system, and

assigning a third set of three predetermined coordinate values (1/0/0) to a third measuring position of the at least three measuring positions and defining error caused by moving with error into the third measuring position to zero by a third set of one secondary condition (N6) in the equation system.

2. Method according to claim 1 further comprising:

wherein the reference object is one of at least some reference objects, and the method further comprising predetermining and using the at least some reference objects together with at least some of the at least three measuring positions for calibration to create the measurement signal using light from at least two light sources interacting with the reference object associated with a detector,

wherein the measuring positions in the testing volume represent nodal points of an imagined, coherent graph that consists of nodes and edges, wherein two nodal points are connected by one imagined edge precisely whenever the measurement signals generated in the two nodes contain contributions from at least one common light source, and

wherein the method further comprises;

providing from each light source of the light sources at least one contribution to at least one of the measurement signals, and

composing at least one of the measurement signals of the detector, comprising several individual detectors, using signal contributions from several individual detectors, and wherein the measuring positions in the testing volume represent nodal points of an imagined, coherent graph that consists of nodes and edges, wherein two nodal points are connected by an imagined edge precisely whenever the measuring signals generated in the two nodes contain signal contributions of at least one common individual detector, and

each individual detector of the several individual detectors providing at least one contribution to at least one of the measurement signals.

3. Method according to claim 1 further comprising:

using one or more reference objects that allow measuring positions at different positions in the testing volume.

4. Method according to claim 1, wherein the measuring device is an interferometer.

5. Method according to claim 4, wherein the interferometer is an interferometer that works with only one test wave that is generated by a single light source.

6. Method according to claim 4, wherein the interferometer is a Tilted Wave Interferometer.

7. Method according to claim 1, wherein the measuring device is a deflectometric measuring device.

8. Measuring device adapted to perform a method according to claim 1, the measuring device comprising at least two light sources (13) and a detector (34).

9. Measuring device according to claim 8 that is configured as an interferometer comprising a point light source array (12) of light sources (13) including the at least two light sources (13), a beam splitter (14), a collimator (16), an objective lens (18), a positioning unit (20) configured to move a measuring object (22) in a testing volume (24) of the interferometer, a diaphragm (26), a reference light source (28), a second beam splitter (30), imaging optics (32), and the detector (34) including a camera comprising light-sensitive pixels.

10. Method according to claim 2, wherein the measuring device is one of a group comprising:

an interferometer, an interferometer that works with only one test wave that is generated by a single light source, a Tilted Wave Interferometer, a deflectometric measuring device, and a tactile measuring device.

11. Measuring device adapted to perform a method according to claim 2, the measuring device comprising at least two light sources (13) and a detector (34).

12. Measuring device according to claim 11 that is configured as an interferometer comprising a point light source array (12) of light sources (13) including the at least two light sources (13), a beam splitter (14), a collimator (16), an objective lens (18), a positioning unit (20) configured to move a measuring object (22) in a testing volume (24) of the interferometer, a diaphragm (26), a reference light source (28), a second beam splitter (30), imaging optics (32), and the detector (34) including a camera comprising light-sensitive pixels.

13. Method according to claim 3, wherein the measuring device is one of a group comprising:

an interferometer, an interferometer that works with only one test wave that is generated by a single light source, a Tilted Wave Interferometer, and a deflectometric measuring device.

14. Method according to claim 3, wherein the using the one or more reference objects allow measuring positions at different positions in the testing volume including curved surfaces with different-size radii of curvature or diffractive optics that reconstruct different wavefronts.

15. Measuring device adapted to perform a method according to claim 3, the measuring device comprising at least two light sources (13) and a detector (34).

16. Measuring device according to claim 15 that is configured as an interferometer comprising a point light source array (12) of light sources (13) including the at least two light sources (13), a beam splitter (14), a collimator (16), an objective lens (18), a positioning unit (20) configured to move a measuring object (22) in a testing volume (24) of the interferometer, a diaphragm (26), a reference light source (28), a second beam splitter (30), imaging optics (32), and the detector (34) including a camera comprising light-sensitive pixels.

17. Method according to claim 1, wherein the first measuring position and the second measuring position are arranged on the optical axis (40).

18. Method according to claim 1, wherein in the first measuring position the first secondary condition (N1) defines a positioning error in x-direction to zero, wherein the second secondary condition (N2) defines a positioning error in y-direction to zero and wherein the third secondary condition (N3) defines a positioning error in z-direction to zero.

19. Method according to claim 1, wherein in the second measuring position the fourth secondary condition (N4) defines a positioning error in y-direction to zero, and wherein the fifth secondary condition (N5) defines a positioning error in x-direction to zero.

20. Method according to claim 19, wherein in the second measuring position the positioning error in z-direction is not defined to zero.

21. Method according to claim 1, wherein in the third measuring position the sixth secondary condition (N6) defines a positioning error in y-direction to zero.

22. Method according to claim 21, wherein in the third measuring position a positioning error in the x-direction and in the z-direction is not defined to zero.