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System, method and apparatus for using optical data to monitor RF generator operations

  • US 10,325,760 B2
  • Filed: 03/28/2017
  • Issued: 06/18/2019
  • Est. Priority Date: 08/29/2014
  • Status: Active Grant
First Claim
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1. A method comprising:

  • receiving an optical sensor signal from an optical sensor of a plasma chamber when a radio frequency (RF) signal is supplied from an RF generator, wherein the RF signal transitions between a low state and a high state to create a plurality of pulses during a plasma process;

    dividing each of the plurality of pulses of the RF signal into a plurality of subdivisions;

    dividing the optical sensor signal into a plurality of subdivisions;

    examining a characteristic of the optical sensor signal during each of the plurality of subdivisions of the optical sensor signal; and

    adjusting the RF signal for one or more of the plurality of subdivisions of the RF signal based on the characteristic for a corresponding one or more of the plurality of subdivisions of the optical sensor signal to change the characteristic to be within a threshold.

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