Methods and apparatus for interactively and dynamically updating a schematic overlay

• US 10,325,792 B2
• Filed: 02/19/2016
• Issued: 06/18/2019
• Est. Priority Date: 12/17/2015
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Gowdamachandran, Balaji, Dooley, Brent Allen
• Primary Examiner(s): Yoha, Connie C
• Application Number:
  US15/048,183
• Publication Number:
  US 20170178932A1
• Time in Patent Office: 1,215 Days
• Field of Search: 700109, 700110, 700121
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31478 Display all processes together or select only one
• CPC Class Codes: G05B 2219/35269 Checking data, parity, diagnostic
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A computer implemented method of dynamically updating an interactive diagnostic schematic overlay comprises displaying a first drawing comprising a plurality of static graphical objects, each static graphical object corresponding to a design element of a complex system and identifying a diagnostic schematic overlay comprising a plurality of dynamic graphical objects, wherein each dynamic graphical object is aligned with a static graphical object of the plurality of static graphical objects. In an embodiment, the diagnostic schematic overlay further includes a plurality of fields, wherein each field may be populated with one or more dynamic graphical objects, and the method further includes determining a design element operating state and/or a design element operating parameter for at least some of the static graphical objects at a first instance in time and displaying, together with the first drawing, determined operating states and determined operating parameters as an updated diagnostic schematic overlay.

Claims

1. A computer implemented method of dynamically updating an interactive diagnostic schematic overlay, comprising:

displaying a first drawing comprising a plurality of static graphical objects, each static graphical object corresponding to a design element of a complex system;

identifying a diagnostic schematic overlay comprising;

a plurality of fields, wherein each field of the plurality of fields is aligned with a static graphical object of the plurality of static graphical objects, and

a plurality of dynamic graphical objects, wherein each dynamic graphical object of the plurality of dynamic graphical objects is associated with a field of the plurality of fields and corresponds to one of a design element operating state or a design element operating parameter;

determining at least one of a design element operating state using a respective sensor for detecting such design element operating state or a design element operating parameter using a system controller for at least some of the static graphical objects at a first instance in time; and

displaying, together with the first drawing, determined operating states and determined operating parameters in respective fields of the diagnostic schematic overlay as an updated diagnostic schematic overlay.

2. The computer implemented method of claim 1, wherein the complex system includes a chamber.

3. The computer implemented method of claim 2, wherein the complex system further comprises a plurality of design elements including one or more temperature sensing transducers, one or more pressure sensing transducers, one or more position sensors, electrical conductors, or switches.

4. The computer implemented method of claim 3, wherein a plurality of design element operating parameters correspond to a single field of the plurality of fields.

5. The computer implemented method of claim 1, wherein the determining comprises retrieving a plurality of design element operating parameters for at least one design element.

6. The computer implemented method of claim 5, wherein the plurality of design element operating parameters are retrieved from software for at least one of operating or testing the complex system.

7. The computer implemented method of claim 5, wherein the plurality of design element operating parameters retrieved for the design element include an instantaneous voltage value and one of an instantaneous temperature measurement or an instantaneous pressure measurement.

8. The computer implemented method of claim 1, wherein at least some design element operating parameters or design element operating states are retrieved, during the determining, from software being executed by a processor to operate or test the complex system.

9. The computer implemented method of claim 8, wherein at least one design element of the complex system comprises a switch and wherein the determining comprises retrieving a closed or open status of the switch.

10. The computer implemented method of claim 9, wherein the design element comprises a relay and wherein the determining comprises retrieving an energized or de-energized status of the relay.

11. The computer implemented method of claim 1, further comprising:

identifying, responsive to a user selection of a graphical object depicted in one of the first drawing or the diagnostic schematic overlay, a second drawing comprising a second set of static graphical objects, each static graphical object of the second set corresponding to the design element of the complex system; and

displaying the second drawing.

12. The computer implemented method of claim 11, further comprising identifying a second diagnostic schematic overlay responsive to the user selection, and displaying the second diagnostic schematic overlay in alignment with the second drawing.

13. A system for determining an operating state or operating condition of one or more design elements of a complex system having a plurality of design elements, comprising:

a processor;

a display device; and

a memory containing instructions executable by the processor to;

initiate display, on the display device, a first drawing comprising a plurality of static graphical objects, each static graphical object corresponding to a design element of a complex system;

identify a diagnostic schematic overlay, comprising;

a plurality of fields, wherein each field of the plurality of fields is aligned with a static graphical object of the plurality of static graphical objects, and

a plurality of dynamic graphical objects, wherein each dynamic graphical object of the plurality of dynamic graphical objects is associated with a field of the plurality of fields and corresponds to one of a design element operating state or a design element operating parameter;

determine at least one of a design element operating state using a respective sensor for detecting such design element operating state or a design element operating parameter using a system controller for at least some of the static graphical objects at an instant in time, and

initiate display, on the display device together with the first drawing, determined operating states and determined operating parameters in respective fields of the diagnostic schematic overlay as an updated diagnostic schematic overlay.

14. The system of claim 13, further comprising the complex system, wherein the complex system includes at least one processing chamber.

15. The system of claim 13, wherein the instructions executable by the processor to determine at least one of the design element operating state or the design element operating parameter include instructions for retrieving a plurality of design element operating parameters for at least one design element.

16. The system of claim 15, wherein the instructions executable by the processor to determine at least one of the design element operating state or the design element operating parameter include instructions for retrieving at least one of the design element operating parameter or the design element operating state from software instructions executable by a processor to operate or test the complex system.

17. The system of claim 15, wherein the complex system includes at least one of a temperature sensor or pressure sensor, and wherein instructions are executable by the processor to retrieve an instantaneous voltage value and one of an instantaneous temperature measurement or an instantaneous pressure measurement.

18. A method of dynamically updating an interactive diagnostic schematic overlay, comprising:

displaying a plurality of static graphical objects, each static graphical object corresponding to a design element of a complex system;

determining at least one of a design element operating state using a respective sensor for detecting such design element operating state or a design element operating parameter using a system controller; and

displaying, together with the static graphical objects, determined operating states and determined operating parameters in respective fields of the diagnostic schematic overlay as an updated diagnostic schematic overlay.

19. The method of claim 18, wherein the determining comprises retrieving a plurality of design element operating parameters for at least one design element.

20. The method of claim 19, wherein the plurality of design element operating parameters retrieved for the at least one design element include an instantaneous voltage value and one of an instantaneous temperature measurement or an instantaneous pressure measurement.