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Triaxial micro-electromechanical gyroscope

  • US 10,330,471 B2
  • Filed: 07/23/2015
  • Issued: 06/25/2019
  • Est. Priority Date: 11/27/2014
  • Status: Active Grant
First Claim
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1. A triaxial micro-electromechanical gyroscope, comprising:

  • a substrate;

    a ring-shaped detection capacitor located at a central position of the substrate, wherein the center of the ring-shaped detection capacitor is an origin, the ring-shaped detection capacitor includes four lower polar plates fixed onto the substrate and a ring-shaped upper polar plate that directly faces and is hung above the four lower polar plates, the four lower polar plates are divided into two groups, the first group of lower polar plates is symmetrically distributed at two sides of the origin along an x-axis, and cooperates with the corresponding ring-shaped upper polar plate to form a set of first detection capacitors, the second group of lower polar plates is symmetrically distributed at the two sides of the origin along a y-axis, and cooperates with the corresponding ring-shaped upper polar plate to form another set of first detection capacitors, and the ring-shaped upper polar plate is fixed onto the substrate at the origin via a first anchor point;

    two sets of driving capacitors which are located at the outer sides of the ring-shaped detection capacitor respectively and are symmetrically distributed at the two sides of the origin along the y-axis, wherein each set of the driving capacitors comprises a movable driving electrode and a fixed driving electrode which cooperate with each other;

    two sets of second detection capacitors which are located at the outer sides of the ring-shaped detection capacitor respectively and are symmetrically distributed at the two sides of the origin along the x-axis, wherein each set of the second detection capacitors comprises a movable detection electrode and a fixed detection electrode which cooperate with each other; and

    a linkage part connected with the movable driving electrodes, the movable detection electrodes, and outer edges of the ring-shaped upper polar plate, respectively, wherein the driving capacitors are configured for providing driving forces in the y-axis direction, and driving the movable detection electrodes to linearly move in the y-axis direction as well as the ring-shaped upper polar plate to rotate around the first anchor point via the linkage part,the linkage part comprises a rectangular outer frame and a first linkage part located inside the rectangular outer frame, wherein the rectangular outer frame encircles the ring-shaped detection capacitor, and the rectangular outer frame is connected with the outer edges of the ring-shaped upper polar plate via the first linkage part;

    the two sets of driving capacitors are symmetrically distributed at two sides, parallel to the x-axis, of the rectangular outer frame, and the movable driving electrodes are connected with sides, parallel to the x-axis, of the rectangular outer frame;

    the two sets of second detection capacitors are symmetrically distributed at two sides, parallel to the y-axis, of the rectangular outer frame, and the movable detection electrodes are connected with sides, parallel to the y-axis, of the rectangular outer frame; and

    the driving capacitors drive the rectangular outer frame to linearly move in the y-axis direction, and the rectangular outer frame that linearly moves in the y-axis direction drives the ring-shaped upper polar plate to rotate around the first anchor point via the first linkage part, wherein;

    the first linkage part includes a first linkage beam, two lever beams, two second linkage beams and a third linkage beam;

    the first linkage beam and the second linkage beams are parallel to the y-axis, and the lever beams and the third linkage beam are parallel to the x-axis;

    the two lever beams are respectively connected with the first linkage beam to form a box structure with an open end.

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