Segmented electrode structure for quadrature reduction in an integrated device
First Claim
1. An integrated device comprising:
- a gyroscope that includes a movable mass and a substrate, said movable mass being spaced apart from said substrate, said movable mass being configured to oscillate in a drive direction relative to said substrate;
an integrated circuit (IC) die having a surface coupled with said substrate of said gyroscope such that said movable mass is interposed between said substrate and said surface of said IC die; and
an electrode structure formed on said surface of said IC die, said electrode structure including a plurality of electrode segments vertically spaced apart from said movable mass, wherein a quadrature compensation voltage applied to at least a portion of said electrode segments is configured to modulate a magnitude of an electrostatic force applied to said movable mass to reduce quadrature motion of said movable mass.
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Accused Products
Abstract
An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.
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Citations
19 Claims
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1. An integrated device comprising:
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a gyroscope that includes a movable mass and a substrate, said movable mass being spaced apart from said substrate, said movable mass being configured to oscillate in a drive direction relative to said substrate; an integrated circuit (IC) die having a surface coupled with said substrate of said gyroscope such that said movable mass is interposed between said substrate and said surface of said IC die; and an electrode structure formed on said surface of said IC die, said electrode structure including a plurality of electrode segments vertically spaced apart from said movable mass, wherein a quadrature compensation voltage applied to at least a portion of said electrode segments is configured to modulate a magnitude of an electrostatic force applied to said movable mass to reduce quadrature motion of said movable mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 15)
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11. A method for making an integrated device comprising:
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providing a gyroscope that includes a movable mass and a substrate, said movable mass being spaced apart from said substrate, said movable mass being configured to oscillate in a drive direction relative to said substrate; providing an integrated circuit (IC) die having a surface; providing an electrode structure on said surface of said IC die, said electrode structure including a plurality of electrode segments; and coupling said surface of said IC die with said substrate of said gyroscope such that said movable mass and said electrode structure are enclosed within a cavity formed by the coupling of said IC die with said substrate of said gyroscope, and said plurality of electrode segments is vertically spaced apart from said movable mass, wherein a quadrature compensation voltage applied to at least a portion of said electrode segments is configured to modulate a magnitude of an electrostatic force applied to said movable mass to reduce quadrature motion of said movable mass. - View Dependent Claims (12, 13)
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14. A system comprising:
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an integrated device comprising; a gyroscope that includes a movable mass and a substrate, said movable mass being spaced apart from said substrate, said movable mass being configured to oscillate in a drive direction relative to said substrate; an integrated circuit (IC) die having a surface coupled with said substrate of said gyroscope such that said movable mass is interposed between said substrate and said surface of said IC die; and an electrode structure formed on said surface of said IC die, said electrode structure including a plurality of electrode segments vertically spaced apart from said movable mass; and control circuitry for providing a quadrature compensation voltage, wherein each of said plurality of electrode segments is selectively connected to said control circuitry in order to apply said quadrature compensation voltage to selected ones of said electrode segments, said quadrature compensation voltage being configured to modulate a magnitude of an electrostatic force applied to said movable element to reduce quadrature motion of said movable mass. - View Dependent Claims (16, 17, 18, 19)
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Specification