Accelerometer sensor system

• US 10,330,696 B2
• Filed: 03/24/2016
• Issued: 06/25/2019
• Est. Priority Date: 03/24/2016
• Status: Active Grant

• Current Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Original Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Inventors: Bulatowicz, Michael D., Griffith, Robert C., Abbink, Henry C., Sakaida, Daryl K., Clark, Philip R.
• Primary Examiner(s): Kwok, Helen C
• Application Number:
  US15/079,207
• Publication Number:
  US 20170276698A1
• Time in Patent Office: 1,188 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0837 the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor

Abstract

Embodiments of the invention include an accelerometer system. The system includes an accelerometer sensor comprising first and second electrode configurations and an inertial mass between the first and second electrode configurations. In one example, the accelerometer sensor being fabricated as symmetrically arranged about each of three orthogonal mid-planes. The system also includes an accelerometer controller configured to apply control signals to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations. The accelerometer controller can measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations. The first and second pickoff signals can be indicative of a displacement of the inertial mass relative to the null position. The accelerometer controller can calculate an acceleration based on the first and second pickoff signals.

Claims

1. An accelerometer system comprising:

an accelerometer sensor comprising a first electrode configuration, a second electrode configuration, and an inertial mass between the first and second electrode configurations, the accelerometer sensor being fabricated as symmetrically arranged about each of three orthogonal mid-planes associated with the accelerometer sensor; and

an accelerometer controller configured to apply control signals that correspond to a first and second voltage that have equal and opposite amplitudes to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations, the accelerometer controller being further configured to measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations, the first and second pickoff signals being indicative of a displacement of the inertial mass relative to the null position, and to calculate an acceleration based on the first and second pickoff signals.

2. The system of claim 1, wherein the first electrode configuration is fabricated from a first silicon-on-insulator (SOI) wafer layer, the second electrode configuration is fabricated from a second SOI wafer layer, and the inertial mass is fabricated from a semiconductor wafer layer.

3. The system of claim 1, wherein each of the first electrode configuration and the second electrode configuration comprises electrical connections that are arranged to provide a substantially uniform electrical charge distribution with respect to the first electrode configuration and the second electrode configuration.

4. The system of claim 1, wherein each of the first electrode configuration and the second electrode configuration comprises a pattern of grooves etched therein to provide airflow to a periphery of the respective first and second electrode configurations in response to displacement of the inertial mass.

5. An accelerometer system comprising:

an integrated circuit (IC) chip configured as an accelerometer sensor comprising a first electrode configuration, a second electrode configuration, and an inertial mass between the first and second electrode configurations;

an accelerometer controller configured to apply control signals that correspond to a first and second voltage that have equal and opposite amplitudes to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations, the accelerometer controller being further configured to measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations, the first and second pickoff signals being indicative of a displacement of the inertial mass relative to the null position, and to calculate an acceleration based on the first and second pickoff signals;

a mounting interposer on which the IC chip is mounted via a mechanically compliant adhesive along a first plane that separates the IC chip and the mounting interposer, the adhesive being arranged in a pattern that is symmetric about two orthogonal planes that are orthogonal to the first plane, the mounting interposer is fabricated from a non-electrically conductive material having a thermal expansion characteristic that is approximately equal to the IC chip; and

an accelerometer case that at least partially encloses the IC chip, the accelerometer controller, and the mounting interposer, the mounting interposer being mounted on a surface of the accelerometer case via the mechanically compliant adhesive, such that the mounting interposer interconnects the IC chip and the accelerometer case.

6. The system of claim 5, wherein the IC chip is mounted to the mounting interposer along a first plane that separates the IC chip and the mounting interposer in a manner that is substantially symmetric with respect to the mounting interposer about two orthogonal planes that are orthogonal to the first plane.

7. The system of claim 5, wherein the mounting interposer is mounted to the accelerometer case via an adhesive along a first plane that separates the mounting interposer and the accelerometer case, the adhesive being arranged in a pattern that is symmetric about two orthogonal planes that are orthogonal to the first plane.

8. The system of claim 5, wherein the mounting interposer is mounted to the accelerometer case along a first plane that separates the mounting interposer and the accelerometer case in a manner that is substantially symmetric with respect to the accelerometer case about two orthogonal planes that are orthogonal to the first plane.

9. The system of claim 5, wherein the accelerometer case is mounted to an instrument block, and wherein the accelerometer case is formed of a same material as the instrument block.

10. A method for calculating an acceleration, the method comprising:

providing a charge to each of a first electrode assembly and a second electrode assembly associated with an accelerometer sensor based on a first voltage having a positive amplitude, the first and second electrode assemblies being arranged opposite an inertial mass;

measuring first pickoff voltages associated with the respective first and second electrode assemblies in a first measurement cycle;

providing a charge to the first and second electrode assemblies based on a second voltage having an amplitude that is equal and opposite the first voltage;

measuring second pickoff voltages associated with the respective first and second electrode assemblies in a second measurement cycle;

calculating an average of differences between the respective first and second pickoff voltages associated with each of the first and second measurement cycles; and

calculating a displacement of the inertial mass resulting from the acceleration.

11. The method of claim 10, wherein providing the charge to each of the first and second electrode assemblies comprises sequentially providing the charge to each of the first and second electrode assemblies via a first charge amplifier assembly and a second charge amplifier assembly, respectively.

12. The method of claim 11, wherein sequentially providing the charge comprises sequentially providing the charge to each of the first and second electrode assemblies via a switching system at an input of each of the first and second charge amplifier assemblies in response to a switching signal.

13. The method of claim 11, wherein sequentially providing the charge comprises

providing one of the first and second voltage to a first input of a first amplifier of the first charge amplifier system, the first amplifier having a second input configured to receive an amplifier feedback voltage associated with a respective one of the first and second voltages and an output that is coupled to a first input of a second amplifier of the first charge amplifier system, the second amplifier having an output configured to provide the charge to the first electrode assembly in response to the one of the first and second voltage;

and

providing one of the first and second voltage to a first input of a first amplifier of the second charge amplifier system that is configured substantially similar to the first charge amplifier system, a second amplifier of the second charge amplifier system having an output configured to provide the charge to the second electrode assembly in response to the one of the first and second voltage.

14. The method of claim 11, wherein measuring the first pickoff voltages comprises measuring the first pickoff voltages at an output of the first charge amplifier system, and wherein measuring the second pickoff voltages comprises measuring the second pickoff voltages at an output of the second charge amplifier system.

15. An accelerometer system comprising:

an accelerometer sensor comprising a first electrode configuration, a second electrode configuration, and an inertial mass between the first and second electrode configurations; and

an accelerometer controller comprising;

a signal generator comprising a first charge amplifier system configured to generate a first voltage to provide a first charge on the first electrode configuration in response to an input voltage and a second charge amplifier system configured to generate a second voltage having an amplitude that is equal and opposite to the an amplitude of the first voltage to provide a second charge on the second electrode configuration in response to the input voltage to maintain the inertial mass at a null position between the first and second electrode configurations, each of the first and second charge amplifier systems comprising a first amplifier and a second amplifier in a cascaded arrangement; and

an acceleration processor configured to calculate an acceleration based on a first pickoff signal associated with the first charge and a second pickoff signal associated with the second charge, the first and second pickoff signals being indicative of a displacement of the inertial mass relative to the null position.

16. The system of claim 15, wherein the accelerometer controller further comprises a switching system configured to sequentially provide the input voltage to each of the first and second charge amplifier systems.

17. The system of claim 16, wherein the switching system comprises a switch configured to sequentially provide the input voltage to each of the first and second charge amplifier systems in response to a switching signal to provide the respective first and second pickoff signals.

18. The system of claim 17, wherein the switch is a first switch that is responsive to a first switching signal, wherein the switching system further comprises a second switch configured to sequentially provide the input voltage as a positive voltage and a negative voltage that are equal and opposite a zero voltage in a first measurement cycle and a second measurement cycle, respectively, in response to a second switching signal, wherein a measurement system is configured to measure the first and second pickoff signals associated with the respective first and second electrode configurations at each of the first and second measurement cycles, wherein the accelerometer controller further comprises an acceleration processor configured to calculate an average of a first difference between the first and second pickoff signals in the first measurement cycle and a second difference between the first and second pickoff signals in the second measurement cycle, the acceleration processor being further configured to calculate the acceleration based on the average.

19. The system of claim 16, wherein the first amplifier of each of the first and second charge amplifier systems is configured to receive a feedback signal associated with a respective one of the first and second voltages at a first input and the input voltage at a second input, and wherein the second amplifier is configured to receive the feedback signal at a first input and an output signal associated with the first amplifier at a second input, the second amplifier being configured to generate the respective one of the first and second voltages at an associated output.