High precision capacitors
First Claim
Patent Images
1. A capacitor, comprising:
- a. a metal substrate comprising a foil or sheet of stainless steel, molybdenum, copper or aluminum, said metal substrate further comprising a barrier layer thereon;
b. a first insulating layer on said metal substrate, said first insulating layer having a substantially uniform thickness of from 3 Å
to 200 Å and
a predetermined breakdown voltage;
c. a first capacitor electrode on said first insulating layer, wherein said first capacitor electrode (i) has an uppermost surface that is smooth and/or curved, and (ii) is capacitively coupled to said metal substrate;
d. a second insulating layer on said first capacitor electrode and said first insulating layer; and
e. an antenna on said second insulating layer, electrically connected to said first capacitor electrode and to said metal substrate.
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Abstract
High precision capacitors and methods for forming the same utilizing a precise and highly conformal deposition process for depositing an insulating layer on substrates of various roughness and composition. The method generally comprises the steps of depositing a first insulating layer on a metal substrate by atomic layer deposition (ALD); (b) forming a first capacitor electrode on the first insulating layer; and (c) forming a second insulating layer on the first insulating layer and on or adjacent to the first capacitor electrode. Embodiments provide an improved deposition process that produces a highly conformal insulating layer on a wide range of substrates, and thereby, an improved capacitor.
13 Citations
20 Claims
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1. A capacitor, comprising:
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a. a metal substrate comprising a foil or sheet of stainless steel, molybdenum, copper or aluminum, said metal substrate further comprising a barrier layer thereon; b. a first insulating layer on said metal substrate, said first insulating layer having a substantially uniform thickness of from 3 Å
to 200 Å and
a predetermined breakdown voltage;c. a first capacitor electrode on said first insulating layer, wherein said first capacitor electrode (i) has an uppermost surface that is smooth and/or curved, and (ii) is capacitively coupled to said metal substrate; d. a second insulating layer on said first capacitor electrode and said first insulating layer; and e. an antenna on said second insulating layer, electrically connected to said first capacitor electrode and to said metal substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification