Magnetic detection apparatus with a tunnel magnetoresistive element

• US 10,337,891 B2
• Filed: 10/18/2013
• Issued: 07/02/2019
• Est. Priority Date: 10/18/2013
• Status: Active Grant

• Current Assignee: Mitsubishi Electric Corporation
• Original Assignee: Mitsubishi Electric Corporation
• Inventors: Yokotani, Masahiro, Shimauchi, Hideki
• Primary Examiner(s): Nguyen, Vinh P
• Application Number:
  US14/917,423
• Publication Number:
  US 20160223360A1
• Time in Patent Office: 2,083 Days
• CPC Class Codes: G01D 5/244 influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
• CPC Class Codes: G01D 5/2448 Correction of gain, threshold, offset or phase control
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

Abstract

Included are an element having a magnetic tunnel junction structure configured such that an insulating layer is sandwiched between a pinned layer having a fixed magnetization direction and a free layer having a magnetization direction that varies freely, a magnet, and a rotating magnetic moving body having an irregular shape that induces change in the magnetic field. When, using the element as a reference, the magnetization direction of the pinned layer is set as an X axis direction, a direction perpendicular to the X axis direction and perpendicular to a plane of the pinned layer is set as a Z axis direction, and a direction perpendicular to an XZ plane constituted by the X axis direction and the Z axis direction is set as a Y axis direction, the magnetic moving body is disposed opposite the element in the Y axis direction via a gap relative to the element.

Claims

1. A magnetic detection apparatus comprising:

an element having a magnetic tunnel junction structure configured such that an insulating layer is sandwiched between a pinned layer having a fixed magnetization direction and a free layer having a magnetization direction that varies freely;

a magnet disposed in order to apply a magnetic field to said element; and

a rotating magnetic moving body having an irregular shape that induces change in said magnetic field,

said magnetic detection apparatus being configured such that when, using said element as a reference, said magnetization direction of said pinned layer is set as an X axis direction, a direction perpendicular to said X axis direction and perpendicular to a plane of said pinned layer is set as a Z axis direction, and a direction perpendicular to an XZ plane constituted by said X axis direction and said Z axis direction is set as a Y axis direction, said magnetic moving body, which is disposed opposite said element in said Y axis direction via a gap relative to said element, rotates about a rotary shaft such that a part thereof disposed opposite said element moves in a parallel direction to said X axis direction, whereby said magnetic detection apparatus detects said irregular shape of said part disposed opposite said element from a magnetic resistance that varies as said magnetic moving body rotates, wherein

said magnet is polarized in said Z axis direction, and disposed in said Z axis direction via a gap relative to said element.

2. The magnetic detection apparatus according to claim 1, wherein

said element is constituted by first two elements,

said first two elements are disposed side by side in said Y axis direction on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension of said magnet, and

said irregular shape is detected by forming a bridge circuit by said first two elements.

3. The magnetic detection apparatus according to claim 2, wherein

said first two elements are disposed side by side in said Y axis direction symmetrically on either side of said plane.

4. A magnetic detection apparatus, wherein a first magnetic detection circuit is formed from said first two elements according to claim 3,

wherein a second magnetic detection circuit is formed from second two elements included in said element, said second two elements being disposed side by side in said X axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said Y axis direction and bisects an X axis direction dimension of said magnet,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein a rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

5. A magnetic detection apparatus, wherein a first magnetic detection circuit is formed from said first two elements according to claim 3,

wherein a second magnetic detection circuit is formed from first four elements included in said element forming two pairs, two elements among said first four elements forming a first pair and two elements among said first four elements forming a second pair being respectively disposed side by side in said X axis direction symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension of said magnet, said two pairs being disposed symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein a rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

6. A magnetic detection apparatus, wherein

a first magnetic detection circuit is formed from said first two elements according to claim 3,

wherein a second magnetic detection circuit formed from second four elements included in said element forming two pairs, two elements among said second four elements forming a first pair and two elements among said second four elements forming a second pair being respectively disposed side by side in said Y axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension of said magnet, said two pairs being disposed symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein a rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

7. The magnetic detection apparatus according to claim 3, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.

8. A magnetic detection apparatus, wherein a first magnetic detection circuit is formed from said first two elements according to claim 2;

wherein a second magnetic detection circuit is formed from second two elements included in said element, said second two elements being disposed side by side in said X axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said Y axis direction and bisects an X axis direction dimension of said magnet,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

9. A magnetic detection apparatus, wherein a first magnetic detection circuit is formed from said first two element according to claim 2,

wherein a second magnetic detection circuit is formed from first four elements included in said element forming two pairs, two elements among said first four elements forming a first pair and two elements among said first four elements forming a second pair being respectively disposed side by side in said X axis direction symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension of said magnet, said two pairs being disposed symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein a rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

10. A magnetic detection apparatus, wherein a first magnetic detection circuit is formed from said first two elements according to claim 2,

wherein a second magnetic detection circuit formed from second four elements included in said element forming two pairs, two elements among said second four elements forming a first pair and two elements among said second four elements forming a second pair being respectively disposed side by side in said Y axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension of said magnet, said two pairs being disposed symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension,

wherein the first magnetic detection circuit and the second magnetic detection circuit are formed on a single substrate, and

wherein a rotation direction of said magnetic moving body is detected from an irregular shape detected by said first magnetic detection circuit and an irregular shape detected by said second magnetic detection circuit.

11. The magnetic detection apparatus according to claim 2, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.

12. The magnetic detection apparatus according to claim 1, wherein

said element is constituted by second two elements,

said second two elements are disposed side by side in said X axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said Y axis direction and bisects an X axis direction dimension of said magnet, and

said irregular shape is detected by forming a bridge circuit by said second two elements.

13. The magnetic detection apparatus according to claim 12, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.

14. The magnetic detection apparatus according to claim 1, wherein

said element is constituted by first four elements forming two pairs,

two elements among said first four elements forming a first pair and two elements among said first four elements forming a second pair are respectively disposed side by side in said X axis direction symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension of said magnet,

said two pairs are disposed symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension, and

said irregular shape is detected by obtaining a differential signal from a bridge circuit formed by said two elements forming said first pair and a bridge circuit formed by said two elements forming said second pair.

15. The magnetic detection apparatus according to claim 14, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.

16. The magnetic detection apparatus according to claim 1, wherein

said element is constituted by second four elements forming two pairs,

two elements among said second four elements forming a first pair and two elements among said second four elements forming a second pair are respectively disposed side by side in said Y axis direction symmetrically on either side of a plane defined by said Z axis direction and a line that is parallel to said X axis direction and bisects a Y axis direction dimension of said magnet,

said two pairs are disposed symmetrically on either side of said plane defined by said Z axis direction and said line that is parallel to said Y axis direction and bisects said X axis direction dimension, and

said irregular shape is detected by obtaining a differential signal from a bridge circuit formed by said two elements forming said first pair and a bridge circuit formed by said two elements forming said second pair.

17. The magnetic detection apparatus according to claim 16, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.

18. The magnetic detection apparatus according to claim 1, further comprising a magnetic body guide that includes a pair of projecting portions projecting toward a side of said element, and is disposed between said element and said magnet in said Z axis direction as means for adjusting a magnetic field applied to said element.