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Recipe selection based on inter-recipe consistency

  • US 10,338,484 B2
  • Filed: 06/13/2016
  • Issued: 07/02/2019
  • Est. Priority Date: 06/17/2015
  • Status: Active Grant
First Claim
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1. A method for a measurement procedure, the method comprising:

  • determining recipe consistency within each of a plurality of subsets of substrate measurement recipes selected from a plurality of substrate measurement recipes based on values of a characteristic at a plurality of areas on a substrate obtained using the plurality of substrate measurement recipes;

    selecting a substrate measurement recipe from the plurality of substrate measurement recipes based on the recipe consistency; and

    setting or modifying a physical configuration of a physical measurement process according to at least the selected substrate measurement recipe and/or communicating data to a physical system in order to set or modify a physical configuration of a measurement or inspection apparatus according to at least the selected substrate measurement recipe.

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