Pulsed remote plasma method and system
First Claim
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1. A method for providing excited species to a reaction chamber of a reactor, the method comprising the steps of:
- providing a first gas to a remote plasma unit;
using a pressure control device located between the remote plasma unit and a vacuum source and a control valve between the remote plasma unit and the reaction chamber, controlling a pressure of the remote plasma unit located upstream of the pressure control device;
forming a plasma in a remote plasma unit; and
pulsing first excited species to the reaction chamber, while maintaining steady-state conditions for the remote plasma unit, by switching a flow of the first excited species between the reaction chamber and a vacuum source using the control valve.
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Abstract
A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as reactive species from the remote plasma unit are pulsed to the reaction chamber.
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Citations
14 Claims
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1. A method for providing excited species to a reaction chamber of a reactor, the method comprising the steps of:
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providing a first gas to a remote plasma unit; using a pressure control device located between the remote plasma unit and a vacuum source and a control valve between the remote plasma unit and the reaction chamber, controlling a pressure of the remote plasma unit located upstream of the pressure control device; forming a plasma in a remote plasma unit; and pulsing first excited species to the reaction chamber, while maintaining steady-state conditions for the remote plasma unit, by switching a flow of the first excited species between the reaction chamber and a vacuum source using the control valve. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification