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Switching circuit

  • US 10,340,879 B2
  • Filed: 10/18/2017
  • Issued: 07/02/2019
  • Est. Priority Date: 02/18/2015
  • Status: Active Grant
First Claim
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1. An impedance matching network comprising:

  • an RF input configured to couple to an RF source;

    an RF output configured to couple to a load;

    a first circuit comprising a first variable component providing a first variable capacitance or inductance; and

    a second circuit comprising a second variable component providing a second variable capacitance or inductance;

    wherein each of the first circuit and the second circuit comprises a plurality of switching circuits configured to provide the first variable capacitance or inductance and the second variable capacitance or inductance, respectively, each of the plurality of switching circuits comprising;

    a diode having an anode that is operably coupled to a ground; and

    a driver circuit operably coupled to a cathode of the diode and configured to switch the diode, the driver circuit comprising;

    a first switch;

    a second switch coupled in series with the first switch;

    a filter circuit that is coupled at a first end between the first switch and the second switch, and is operably coupled at a second end to the diode;

    a first driver operably coupled to the first switch;

    a second driver operably coupled to the second switch; and

    a third driver operably coupled to the first and second drivers, the third driver configured to;

    provide a first signal to the first driver; and

    provide a second driving signal to the second driver;

    wherein, in providing the first and second signals, the third driver is configured to increase and decrease a duration of a dead time between (a) the third driver driving the first driver on and the second driver off, or (b) the third driver driving the second driver on and the first driver off.

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