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Strain sensor element and blood pressure sensor

  • US 10,342,439 B2
  • Filed: 05/08/2018
  • Issued: 07/09/2019
  • Est. Priority Date: 09/30/2010
  • Status: Active Grant
First Claim
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1. A strain sensor element comprising:

  • a laminated film provided above a substrate,the laminated film comprising;

    a free layer which has a perpendicular magnetic anisotropy, wherein the free layer has a first magnetization;

    a reference layer comprising a second magnetization; and

    a spacer layer provided between the free layer and the reference layer; and

    a pair of electrodes configured to cause a current to flow through the laminated film,wherein an electric resistance between the free layer and the reference layer changes in response to distortion of the substrate.

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