Method of using a multi-pass vacuum coating system
First Claim
1. A method for coating substrates with multiple coating layers, the method comprising:
- establishing a sub-atmospheric pressure within a coating system;
transferring each substrate from outside the coating system to inside the coating system though a transfer lock;
moving each substrate through a heating zone prior to entering a coating zone;
traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition;
traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition; and
transferring each substrate from inside the coating system to outside the system through the transfer lock; and
purging the heating zone with inert gas when the coating zone is vacant; and
pumping the inert gas out of the coating zone through ports located in the coating zone.
1 Assignment
0 Petitions
Accused Products
Abstract
A method for coating substrates with multiple coating layers can comprise: establishing a sub-atmospheric pressure within a coating system; transferring each substrate from outside the coating system to inside the coating system though a transfer lock; heating each substrate in a heating zone before entering a coating zone; traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; determining if the coating zone is occupied or vacant; if the coating zone is vacant, purging a heater zone module with inert gas; and pumping the inert gas out of the coating zone through ports located in the coating zone.
24 Citations
13 Claims
-
1. A method for coating substrates with multiple coating layers, the method comprising:
-
establishing a sub-atmospheric pressure within a coating system; transferring each substrate from outside the coating system to inside the coating system though a transfer lock; moving each substrate through a heating zone prior to entering a coating zone; traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition; traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition; and transferring each substrate from inside the coating system to outside the system through the transfer lock; and purging the heating zone with inert gas when the coating zone is vacant; and pumping the inert gas out of the coating zone through ports located in the coating zone. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A method for coating substrates with multiple coating layers, comprising:
-
establishing a sub-atmospheric pressure within a coating system; transferring each substrate from outside the coating system to inside the coating system though a transfer lock; heating each substrate in a heating zone before entering a coating zone; traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition; traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma enhanced chemical vapor deposition; determining if the coating zone is occupied or vacant; if the coating zone is vacant, purging a heating zone with inert gas; and pumping the inert gas out of the coating zone through ports located in the coating zone. - View Dependent Claims (13)
-
Specification