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Thermally balanced differential accelerometer

  • US 10,345,323 B2
  • Filed: 01/21/2016
  • Issued: 07/09/2019
  • Est. Priority Date: 12/17/2013
  • Status: Active Grant
First Claim
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1. A method of determining acceleration, comprising:

  • configuring a housing to have a sensitivity axis;

    positioning an inertial mass having a first center of mass within the housing wherein the first center of mass is translatable along the sensitivity axis;

    connecting a sensor to the housing wherein the sensor is apart from the inertial mass and includes a second center of mass, and wherein the second center of mass coincides with the sensitivity axis; and

    connecting the inertial mass to the housing using a deformable support structure and wherein responsive to the housing moving along the sensitivity axis, detecting by the sensor a change in position of the inertial mass along the sensitivity axis.

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