Lateral/vertical transistor structures and process of making and using same

• US 10,350,594 B2
• Filed: 03/05/2018
• Issued: 07/16/2019
• Est. Priority Date: 12/08/2014
• Status: Active Grant

• Current Assignee: Bruker Cellular Analysis, Inc. (Bruker Corporation)
• Original Assignee: Berkeley Lights, Inc. (Bruker Corporation)
• Inventors: Hobbs, Eric D., Valley, Justin K.
• Primary Examiner(s): Sines, Brian J.
• Application Number:
  US15/912,164
• Publication Number:
  US 20180193835A1
• Time in Patent Office: 498 Days
• Field of Search: 422502, 422503, 422504, 422 681, 436 43, 436 63, 436174, 436180
• CPC Class Codes: B01L 2200/0647 Handling flowable solids, e.g. microscopic beads, cells, particles
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0819 Microarrays; Biochips
• CPC Class Codes: B01L 2400/0415 electrical forces, e.g. electrokinetic
• CPC Class Codes: B01L 2400/0424 Dielectrophoretic forces
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502761 specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules investigating characteristics of particles G01N15/00
• CPC Class Codes: B03C 5/005 Dielectrophoresis, i.e. dielectric particles migrating towards the region of highest field strength
• CPC Class Codes: B03C 5/026 using open-gradient differential dielectric separation, i.e. using electrodes of special shapes for non-uniform field creation, e.g. Fluid Integrated Circuit [FIC]
• CPC Class Codes: H01L 27/0823 including vertical bipolar transistors only
• CPC Class Codes: H01L 27/14681 Bipolar transistor imagers
• CPC Class Codes: H01L 29/732 Vertical transistors

Abstract

A microfluidic device can include a base an outer surface of which forms one or more enclosures for containing a fluidic medium. The base can include an array of individually controllable transistor structures each of which can comprise both a lateral transistor and a vertical transistor. The transistor structures can be light activated, and the lateral and vertical transistors can thus be photo transistors. Each transistor structure can be activated to create a temporary electrical connection from a region of the outer surface of the base (and thus fluidic medium in the enclosure) to a common electrical conductor. The temporary electrical connection can induce a localized electrokinetic force generally at the region, which can be sufficiently strong to move a nearby micro-object in the enclosure.

Claims

1. A method of moving a micro-object in a fluidic medium within a microfluidic device, the microfluidic device comprising an enclosure having a microfluidic structure and a base, wherein the base comprises a common electrical conductor and the microfluidic structure comprises a cover with a biasing electrode, wherein the microfluidic structure and an outer surface of the base together define a flow path disposed between the biasing electrode of the cover and the common electrical conductor of the base within the enclosure, wherein the base comprises an array of transistor structures, each said transistor structure in the array comprising a lateral bipolar transistor connecting a corresponding region of the outer surface of the base to the common conductor and a vertical bipolar transistor connecting the corresponding region of the outer surface of the base to the common conductor, and wherein the corresponding regions of the outer surface of the base are disposed to contact directly fluidic medium in the flow path,

the method comprising:

providing biasing power to the biasing electrode and the common electrical conductor of the base; and

activating a first of the transistor structures at a first of the corresponding regions of the outer surface of the base,

wherein said activating induces a first current flow in at least a lateral bipolar transistor of the first transistor structure and creates an eletrokinetic force in the vicinity of the activated first transistor structure sufficient to move a nearby micro-object in the flow path.

2. The method of claim 1, wherein the first current flow induces a non-uniform electric field in the flow path between the activated first transistor structure and the biasing electrode, the non-uniform electric field producing the electrokinetic force, and wherein the electrokinetic force repels the nearby micro-object away from the non-uniform electric field.

3. The method of claim 1, wherein the activating also induces a second current flow in a vertical transistor of the activated first transistor structure.

4. The method of claim 3, wherein the second current flow enhances the electrokinetic force.

5. The method of claim 3, wherein the second current flow increases a magnitude of the electrokinetic force by at least 25%.

6. The method of claim 3, wherein a current density of the first current flow in the lateral transistor is at least 1.5 times greater than a current density of the second current flow in the vertical transistor of the activated first transistor structure.

7. The method of claim 1, wherein activating the first transistor structure comprises directing a beam of light onto the base region of the first transistor structure.

8. The method of claim 7, wherein the beam of light has an intensity of about 0.1 W/cm² to about 1000 W/cm².

9. The method of claim 1, wherein the micro-object comprises one of a polystyrene bead about 1 μ

m to about 50 μ

m in diameter and a glass bead about 1 μ

m to about 50 μ

m in diameter.

10. The method of claim 1, wherein the micro-object is a biological cell.

11. The method of claim 1, wherein the fluidic medium in the flow path of the microfluidic device has an electrical conductivity of about 10 mS/m to about 2 S/m.

12. The method of claim 1, further comprising maintaining a temperature of the fluidic medium in the flow path at about 5°

C. to about 55°

C.

13. The method of claim 1, wherein providing the biasing power comprises providing biasing power with a peak-to-peak voltage of about 1 Vppk to about 50 Vppk.

14. The method of claim 1, wherein providing the biasing power comprises providing biasing power at a frequency of about 100 kHz to about 10 MHz.

15. The method of claim 1, wherein providing the biasing power comprises providing biasing power that has a square waveform, a sine waveform, or a triangular waveform.

16. The method of claim 1, wherein the common conductor comprises an N+ semiconductor substrate upon which the array of transistor structures rests.

17. The method of claim 16, wherein the N+ semiconductor substrate has a resistivity of about 0.025 ohm-cm to about 0.050 ohm-cm.

18. The method of claim 1, wherein a pitch of the transistor structures of the array is about 1000 nm to about 20,000 nm.

19. The method of claim 1, wherein the microfluidic structure and the base together further define a holding pen connected to the flow path.

20. The method of claim 19, wherein the flow path comprises a fluidic channel, and wherein the holding pen opens to the fluidic channel.

21. The method of claim 1, wherein each said transistor structure in the array comprises an emitter region, a base region surrounding the emitter region, and a collector region surrounding the base region, wherein the base region and the collector region each comprise a respective lateral portion and a respective vertical portion, wherein the lateral portion of the base region has a width between about 10 nm and about 400 nm, and wherein each said transistor structure in the array is physically separated from adjacent transistor structures by an array of trenches having electrically insulative material disposed therein.

22. The method of claim 21, wherein the lateral portion of the base region has a width that is between about 200 nm and about 300 nm.

23. The method of claim 21, wherein the vertical portion of the base region has a thickness equal to or greater than the width of the lateral portion of the base region.

24. The method of claim 23, wherein the vertical portion of the base region has a thickness two to four times greater than the width of the lateral portion of the base region.

25. The method of claim 24, wherein the vertical portion of the base region has a thickness about 3.5 times greater than the width of the lateral portion of the collector region.

26. The method of claim 21, wherein the lateral portion of the collector region has a width that is between about 100 nm and about 1000 nm.

27. The method of claim 26, wherein the lateral portion of the collector region has a width that is between about 600 nm and about 750 nm.

28. The method of claim 21, wherein the vertical portion of the collector region has a thickness equal to or greater than the width of the lateral portion of the collector region.

29. The method of claim 28, wherein the vertical portion of the collector region has a thickness two to ten times greater than the width of the lateral portion of the collector region.

30. The method of claim 29, wherein the vertical portion of the collector region has a thickness-four to eight times greater than the width of the lateral portion of the collector region.

31. The method of claim 30, wherein the vertical portion of the collector region has a thickness about six times greater than the width of the lateral portion of the collector region.

32. The method of claim 21, wherein the emitter region has a vertical thickness of about 10 nm to about 500 nm, wherein the vertical portion of the base region has a thickness 6 to 12 times greater than the vertical thickness of the emitter region, and wherein the vertical portion of the collector region has a thickness 3 to 6 times greater than the thickness of the vertical portion of the base region.

33. The method of claim 32, wherein the vertical thickness of the emitter region is about 50 nm to about 150 nm.

34. The method of claim 21, wherein the base region comprises a p-type dopant and the collector and emitter regions each comprise an n-type dopant.

35. The method of claim 21, wherein the collector region has a resistivity of about 5 ohm-cm to about 10 ohm-cm.

36. The method of claim 21, wherein the trench has a vertical depth that is at least 10% greater than a combined vertical depth of the collector, base, and emitter regions.

37. The method of claim 21, wherein the vertical depth of the trench is about 2,000 nm to about 11,000 nm, and wherein the trench has a lateral width that is about 100 nm to about 1000 nm.

38. The method of claim 21, wherein the microfluidic device further comprises a dielectric border disposed on the outer surface of the base between adjacent pairs of the transistor structures of the array, wherein the border overlays a perimeter portion of the emitter region of each said transistor structure of the array but comprises windows exposing an interior portion of each emitter region.

39. The method of claim 38, wherein the dielectric border has a vertical thickness that is about 750 nm to about 2,000 nm.

40. The method of claim 38, wherein the dielectric border overlays the perimeter portion of the emitter region by about 10 nm to about 200 nm.