Optically effective surface relief microstructures and method of making them
First Claim
1. Method for making an element having at least one surface area with a surface relief micro-structure, which method comprises:
- creating a mask with a microstructure of first and second zones of different transparency, by including the steps;
depositing on a layer of a mask material a film with a topologically structured corrugated surface structure;
reducing the thickness of the film until the material of the film in lower zones of the corrugated surface is cleared away and parts of the underlying mask material are set free; and
removing the parts of the mask that are set free,wherein at least in a first lateral direction of the mask there is, in average, at least one transition from a first to a second zone or vice versa within every 20 micro-meters, and wherein in the first lateral direction the lateral arrangement of the transitions is non-periodic;
generating with the help of the mask a relief microstructure in the surface of a resin or resist to produce top regions corresponding to the first zones of the mask and bottom regions corresponding to the second zones of the mask, wherein the top regions substantially lie in a top relief plateau and the bottom regions substantially lie in a bottom relief plateau, such that the relief modulation depth is substantially equal over the whole surface area.
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Abstract
The present invention relates to an element comprising a surface area with a specific, optically effective surface relief microstructure (12). The surface relief microstructure has a surface modulation of top regions (13) and bottom regions (14), wherein in a first lateral direction of the surface area there is in average at least one transition from a top to a bottom region or vice versa within every 20 micrometer, and in a second lateral direction of the mask, which is perpendicular to the first direction, there is in average at least one transition from a first to a second zone or vice versa within every 200 micrometer. In the microstructure, (i) in the first direction the lateral arrangement of the transitions is non-periodic, and (ii) the top regions substantially lie in the same top relief plateau (15) and the bottom regions substantially lie in the same bottom relief plateau (16).
17 Citations
7 Claims
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1. Method for making an element having at least one surface area with a surface relief micro-structure, which method comprises:
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creating a mask with a microstructure of first and second zones of different transparency, by including the steps; depositing on a layer of a mask material a film with a topologically structured corrugated surface structure; reducing the thickness of the film until the material of the film in lower zones of the corrugated surface is cleared away and parts of the underlying mask material are set free; and removing the parts of the mask that are set free, wherein at least in a first lateral direction of the mask there is, in average, at least one transition from a first to a second zone or vice versa within every 20 micro-meters, and wherein in the first lateral direction the lateral arrangement of the transitions is non-periodic; generating with the help of the mask a relief microstructure in the surface of a resin or resist to produce top regions corresponding to the first zones of the mask and bottom regions corresponding to the second zones of the mask, wherein the top regions substantially lie in a top relief plateau and the bottom regions substantially lie in a bottom relief plateau, such that the relief modulation depth is substantially equal over the whole surface area. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification