Flexible strain sensors

• US 10,352,791 B2
• Filed: 06/30/2017
• Issued: 07/16/2019
• Est. Priority Date: 08/11/2016
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Original Assignee: Tsinghua University
• Inventors: Yu, Yang, Wang, Jia-Ping, Jiang, Kai-Li, Fan, Shou-Shan
• Primary Examiner(s): Williams, Jamel E
• Application Number:
  US15/638,507
• Publication Number:
  US 20180045589A1
• Time in Patent Office: 746 Days
• CPC Class Codes: G01B 7/18 using change in resistance
• CPC Class Codes: G01L 1/18 using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
• CPC Class Codes: G01L 1/2287 constructional details of the strain gauges adjustable resistors H01C10/00

Abstract

The present disclosure relates to a flexible strain sensor. The flexible strain sensor includes a composite structure, a first electrode, a second electrode and a detector. The composite structure includes a carbon nanotube film and a substrate combined with each other. The carbon nanotube film defines a desired deformation direction and includes a plurality of first carbon nanotubes oriented substantially perpendicular with the desired deformation direction. The plurality of first carbon nanotubes are joined end to end with each other along their orientation direction. The first electrode and the second electrode are separately located at two opposite ends of the carbon nanotube film and electrically coupled with the carbon nanotube film. The detector is electrically connected with the first electrode and the second electrode.

Claims

1. A flexible strain sensor comprising:

a composite structure comprising a carbon nanotube film and a substrate combined with each other, the carbon nanotube film defining a desired deformation direction and comprising a plurality of first carbon nanotubes oriented along an orientation direction substantially perpendicular with the desired deformation direction, wherein the plurality of first carbon nanotubes are joined end to end with each other along their orientation direction, the plurality of first carbon nanotubes are joined end to end to form a plurality of carbon nanotube strings, the plurality of carbon nanotube strings are located side by side and oriented along a first direction, the first direction is perpendicular with the desired deformation direction;

a first electrode and a second electrode, the first electrode and the second electrode separately located, one at each of the two opposite ends of the carbon nanotube film and electrically coupled with the carbon nanotube film; and

a detector electrically connected with the first electrode and the second electrode.

2. The flexible strain sensor of claim 1, wherein the carbon nanotube film is joined to a surface of the substrate.

3. The flexible strain sensor of claim 2, wherein the carbon nanotube film is joined to the substrate by Van der Waals attractive forces.

4. The flexible strain sensor of claim 1, wherein the carbon nanotube film is embedded in the substrate.

5. The flexible strain sensor of claim 4, wherein the first electrode and the second electrode are embedded in the substrate.

6. The flexible strain sensor of claim 5, wherein a part of the first electrode is embedded in the substrate, and the other part of the first electrode is exposed;

a part of the second electrode is embedded in the substrate, and the other part of the second electrode is exposed.

7. The flexible strain sensor of claim 1, wherein the carbon nanotube film comprises a plurality of second carbon nanotubes located between adjacent carbon nanotube strings, the plurality of second carbon nanotubes contact with at least two adjacent carbon nanotube strings by van der Waals attractive forces therebetween.

8. The flexible strain sensor of claim 7, wherein the plurality of carbon nanotube strings and the plurality of second carbon nanotubes form a grid like structure.

9. The flexible strain sensor of claim 1, wherein each of the plurality of carbon nanotube strings comprises the plurality of first carbon nanotubes joined end to end and oriented along an axial direction of the carbon nanotube string.

10. The flexible strain sensor of claim 1, wherein a cross section of the carbon nanotube string comprises more than one first carbon nanotube.

11. The flexible strain sensor of claim 1, wherein a distance between adjacent carbon nanotube strings changes along with a deformation of the carbon nanotube film.

12. The flexible strain sensor of claim 1, wherein a distance between the adjacent carbon nanotube strings ranges from about 0 micrometers to about 50 micrometers.

13. The flexible strain sensor of claim 1, wherein a thickness of the carbon nanotube film ranges from about 0.5 nanometers to about 1 millimeter.

14. The flexible strain sensor of claim 1, wherein a resistance change of the composite structure is reversible when a deformation of the composite structure changes from 0 to 400%.

15. The flexible strain sensor of claim 14, wherein when the deformation of the composite structure happens, the resistance change of the composite structure is finished in 98 ms.

16. A flexible strain sensor comprising:

a composite structure comprising a carbon nanotube film and a substrate combined with each other, the carbon nanotube film comprising a plurality of first carbon nanotubes oriented along an orientation direction, wherein the plurality of first carbon nanotubes are joined end to end with each other along their orientation direction, the carbon nanotube film is configured to be stretched along a direction perpendicular with the orientation direction, the plurality of first carbon nanotubes are joined end to end to form a plurality of carbon nanotube strings, the plurality of carbon nanotube strings are located side by side and oriented along a first direction, the first direction is perpendicular with the desired deformation direction;

a first electrode and a second electrode, the first electrode and the second electrode separately located, one at each of the two opposite ends of the carbon nanotube film and electrically coupled with the carbon nanotube film, wherein the first electrode and the second electrode is configured to detect a resistance of the composite structure.