System and method of multiplexing laser triggers and optically selecting multiplexed laser pulses for laser assisted device alteration testing of semiconductor device

• US 10,352,995 B1
• Filed: 02/28/2018
• Issued: 07/16/2019
• Est. Priority Date: 02/28/2018
• Status: Expired due to Fees

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Erington, Kent B., Bodoh, Daniel J., Dickson, Kristofor J.
• Primary Examiner(s): Astacio-Oquendo, Giovanni
• Application Number:
  US15/908,374
• Time in Patent Office: 503 Days
• Field of Search: 32476209, 32476201, 324537
• CPC Class Codes: G01B 11/272 using photoelectric detection means
• CPC Class Codes: G01R 31/00 Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere measuring superconductive properties G01R33/1238; testing or measuring semiconductors or solid state devices during manufacture H01L22/00; testing line transmission systems H04B3/46
• CPC Class Codes: G01R 31/30 Marginal testing, e.g. by varying supply voltage testing computers during standby operation or idle time G06F11/22
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence
• CPC Class Codes: G01R 31/31917 Stimuli generation or application of test patterns to the device under test [DUT]

Abstract

A pulse laser test system including a conditioning pulse circuit, a probe pulse circuit, a pulse laser, a trigger mode controller, and a laser pulse modulator. The conditioning pulse circuit provides asynchronous conditioning trigger pulses at a selected rate. The probe pulse circuit provides a synchronized probe trigger pulse. The trigger mode controller selects the probe pulse circuit while the synchronized probe trigger pulse is provided causing the pulse laser to provide a synchronized probe laser pulse, and otherwise selects the output of the conditioning pulse circuit causing the pulse laser to provide asynchronous conditioning laser pulses. The laser pulse modulator has an optical input coupled to the laser output of the pulse laser, has a gating input receiving a gate signal from the trigger mode controller, and has an optical output that provides laser pulses passed from the pulse laser while the gate signal is asserted.

Claims

1. A pulse laser test system, comprising:

a conditioning pulse circuit having an output that provides a plurality of asynchronous conditioning trigger pulses at a selected rate;

a probe pulse circuit having an output that provides a synchronized probe trigger pulse;

a pulse laser having a pulse trigger input and a laser output providing a laser pulse for each trigger pulse provided to said pulse trigger input;

a trigger mode controller that provides selected trigger pulses to said pulse trigger input of said pulse laser, wherein said trigger mode controller selects said output of said probe pulse circuit while said synchronized probe trigger pulse is provided causing said pulse laser to provide a synchronized probe laser pulse, and wherein said trigger mode controller otherwise selects said output of said conditioning pulse circuit causing said pulse laser to provide a plurality of asynchronous conditioning laser pulses; and

a laser pulse modulator having an optical input coupled to said laser output of said pulse laser, having a gating input receiving a gate signal from said trigger mode controller, and having an optical output that provides laser pulses passed from said pulse laser while said gate signal is asserted.

2. The pulse laser test system of claim 1, wherein said trigger mode controller asserts said gate signal to pass only said synchronized probe laser pulse.

3. The pulse laser test system of claim 1, wherein said trigger mode controller asserts said gate signal to pass said synchronized probe laser pulse and at least one of said plurality of asynchronous conditioning laser pulses provided before said synchronized probe laser pulse.

4. The pulse laser test system of claim 3, wherein said trigger mode controller asserts said gate signal and keeps said gate signal asserted to pass said at least one of said plurality of asynchronous conditioning laser pulses provided before said synchronized probe laser pulse and to pass said synchronized probe laser pulse, and then negates said gate signal to block each of said plurality of asynchronous conditioning laser pulses provided after said synchronized probe laser pulse.

5. The pulse laser test system of claim 1, wherein said trigger mode controller asserts said gate signal to pass said synchronized probe laser pulse and at least one of said plurality of asynchronous conditioning laser pulses provided after said synchronized probe laser pulse.

6. The pulse laser test system of claim 1, wherein said trigger mode controller negates said gate signal to block any of said plurality of asynchronous conditioning laser pulses provided before said synchronized probe laser pulse, then asserts said gate signal to pass said synchronized probe laser pulse, then negates said gate signal to block at least one of said plurality of asynchronous conditioning laser pulse provided after said synchronized probe laser pulse, then re-asserts said gate signal to pass a consecutive series of said plurality of said asynchronous conditioning laser pulses, and then negates said gate signal after said consecutive series of said plurality of said asynchronous conditioning laser pulses is completed.

7. The pulse laser test system of claim 6, wherein said trigger mode controller re-asserts said gate signal to pass a sufficient number of said consecutive series of said plurality of said asynchronous conditioning laser pulses to generate single event upset information.

8. The pulse laser test system of claim 1, wherein said trigger mode controller further provides an attenuation signal that causes said laser pulse modulator to attenuate any of said laser pulses that are passed by an amount indicated by said attenuation signal.

9. The pulse laser test system of claim 1, further comprising automated test equipment that provides a test loop start signal to said probe pulse module to determine timing of providing said synchronized probe trigger pulse.

10. The pulse laser test system of claim 1, wherein said trigger mode controller selects said output of said probe pulse module by a predetermined pre pulse delay before said synchronized probe trigger pulse is provided, and continues to select said output of said probe pulse module by a predetermined post pulse delay after said synchronized probe pulse trigger is provided.

11. A method of generating laser pulses for laser assisted device alteration testing, comprising:

providing a plurality of asynchronous conditioning trigger pulses at a selected rate;

providing a synchronized probe trigger pulse while the plurality of asynchronous conditioning trigger pulses are provided;

selecting the synchronized probe trigger pulse when provided and otherwise selecting the plurality of asynchronous conditioning trigger pulses and providing selected trigger pulses to a pulse trigger input of a pulse laser;

generating, by the pulse laser, multiplexed laser pulses in response to the selected trigger pulses including a plurality of asynchronous conditioning laser pulses before and after a synchronized probe laser pulse; and

modulating the multiplexed laser pulses to pass at least the synchronized probe laser pulse for laser assisted device alteration testing.

12. The method of claim 11, wherein said modulating comprises modulating the multiplexed laser pulses to pass only the synchronized probe laser pulse while not passing any of the asynchronous conditioning laser pulses.

13. The method of claim 11, wherein said modulating comprises modulating the multiplexed laser pulses to pass the synchronized probe laser pulse and at least one of the asynchronous conditioning laser pulses provided before the synchronized probe laser pulse.

14. The method of claim 11, wherein said modulating comprises modulating the multiplexed laser pulses to pass the synchronized probe laser pulse and at least one of the asynchronous conditioning laser pulses provided immediately before the synchronized probe laser pulse.

15. The method of claim 11, wherein said modulating comprises modulating the multiplexed laser pulses to pass the synchronized probe laser pulse and at least one of the asynchronous conditioning laser pulses provided after the synchronized probe laser pulse.

16. The method of claim 11, wherein said modulating comprises modulating the multiplexed laser pulses to block the asynchronous conditioning laser pulses provided before the synchronized probe laser pulse, to pass the synchronized probe laser pulse, to block at least one asynchronous conditioning laser pulse after the synchronized probe laser pulse, to pass a consecutive set of the asynchronous conditioning laser pulses provided after blocking the at least one asynchronous conditioning laser pulse, and to block remaining asynchronous conditioning laser pulses after the consecutive set of the asynchronous conditioning laser pulses.

17. The method of claim 16, wherein said modulating the multiplexed laser pulses to pass a consecutive set of the asynchronous conditioning laser pulses comprises modulating the multiplexed laser pulses to pass a sufficient number of consecutive asynchronous conditioning laser pulses to obtain single event upset information.

18. The method of claim 11, further comprising attenuating at least one of the multiplexed laser pulses that are passed by said modulation.

19. The method of claim 11, wherein said providing a synchronized probe trigger pulse comprises providing a synchronized probe trigger pulse a predetermined time period after a test loop start signal is received.

20. The method of claim 11, wherein said selecting the synchronized probe trigger pulse comprises inserting a pre delay period before the synchronized probe trigger pulse and inserting a post delay period after the synchronized probe trigger pulse.