Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
First Claim
Patent Images
1. An electro-optical device comprising:
- a substrate;
a torsion hinge disposed above the substrate;
a flat plate disposed above the torsion hinge;
a supporting portion in which a resin is filled protrudes from the flat plate toward the torsion hinge; and
a reflective layer which completely covers a surface of the flat plate and the resin, the reflective layer contacting the resin,wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μ
m or less.
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Abstract
An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.
22 Citations
10 Claims
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1. An electro-optical device comprising:
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a substrate; a torsion hinge disposed above the substrate; a flat plate disposed above the torsion hinge; a supporting portion in which a resin is filled protrudes from the flat plate toward the torsion hinge; and a reflective layer which completely covers a surface of the flat plate and the resin, the reflective layer contacting the resin, wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μ
m or less. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification
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Current AssigneeSeiko Epson Corporation (Seiko Group)
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Original AssigneeSeiko Epson Corporation (Seiko Group)
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InventorsIto, Satoshi
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Primary Examiner(s)Thomas, Brandi N
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Application NumberUS15/867,178Publication NumberTime in Patent Office552 DaysField of Search359237, 359242, 359265-267, 359270-273, 359290-292, 359295, 359298, 359315, 359321, 359322US Class CurrentCPC Class CodesG02B 26/008 in the form of devices for ...G02B 26/0833 the reflecting element bein...
