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Roller-type pressurization device, imprinter, and roller-type pressurization method

  • US 10,357,903 B2
  • Filed: 12/06/2013
  • Issued: 07/23/2019
  • Est. Priority Date: 12/06/2012
  • Status: Active Grant
First Claim
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1. A roller-type depressing device to depress an object with a main roller in a first pressure adjusting room, the device comprising:

  • a main roller;

    a pressure adjusting plate that supports the main roller;

    a roller moving unit that moves the main roller relative to the object in the first pressure adjusting room, wherein the roller moving unit is provided on the pressure adjusting plate;

    a pressure receiving stage receiving pressure of the main roller via the object;

    a pressure adjusting unit that holds the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, wherein the pressure adjusting unit comprises a first pressure adjusting room component, wherein the first pressure adjusting room defined by the first pressure adjusting room component, a first of the both faces of the pressure adjusting plate, and either the object or the pressure receiving stage, and wherein a second of the both faces of the pressure adjusting plate is exterior to each of the pressure adjusting unit and the first pressure adjusting room;

    a depressurizer that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, wherein the depressurizer depressurizes the first pressure adjusting room; and

    a pressure equalizer that equalizes, along a direction of a rotation axis of the main roller, pressure applied to the object by the main roller, wherein the pressure equalizer comprises one or more backup rollers.

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