Roller-type pressurization device, imprinter, and roller-type pressurization method
First Claim
1. A roller-type depressing device to depress an object with a main roller in a first pressure adjusting room, the device comprising:
- a main roller;
a pressure adjusting plate that supports the main roller;
a roller moving unit that moves the main roller relative to the object in the first pressure adjusting room, wherein the roller moving unit is provided on the pressure adjusting plate;
a pressure receiving stage receiving pressure of the main roller via the object;
a pressure adjusting unit that holds the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, wherein the pressure adjusting unit comprises a first pressure adjusting room component, wherein the first pressure adjusting room defined by the first pressure adjusting room component, a first of the both faces of the pressure adjusting plate, and either the object or the pressure receiving stage, and wherein a second of the both faces of the pressure adjusting plate is exterior to each of the pressure adjusting unit and the first pressure adjusting room;
a depressurizer that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, wherein the depressurizer depressurizes the first pressure adjusting room; and
a pressure equalizer that equalizes, along a direction of a rotation axis of the main roller, pressure applied to the object by the main roller, wherein the pressure equalizer comprises one or more backup rollers.
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Accused Products
Abstract
A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.
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Citations
10 Claims
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1. A roller-type depressing device to depress an object with a main roller in a first pressure adjusting room, the device comprising:
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a main roller; a pressure adjusting plate that supports the main roller; a roller moving unit that moves the main roller relative to the object in the first pressure adjusting room, wherein the roller moving unit is provided on the pressure adjusting plate; a pressure receiving stage receiving pressure of the main roller via the object; a pressure adjusting unit that holds the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, wherein the pressure adjusting unit comprises a first pressure adjusting room component, wherein the first pressure adjusting room defined by the first pressure adjusting room component, a first of the both faces of the pressure adjusting plate, and either the object or the pressure receiving stage, and wherein a second of the both faces of the pressure adjusting plate is exterior to each of the pressure adjusting unit and the first pressure adjusting room; a depressurizer that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, wherein the depressurizer depressurizes the first pressure adjusting room; and a pressure equalizer that equalizes, along a direction of a rotation axis of the main roller, pressure applied to the object by the main roller, wherein the pressure equalizer comprises one or more backup rollers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification