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Showerhead assembly

  • US 10,358,722 B2
  • Filed: 12/14/2015
  • Issued: 07/23/2019
  • Est. Priority Date: 12/14/2015
  • Status: Active Grant
First Claim
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1. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate and the gas holes are arranged in a Vogel pattern.

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