Showerhead assembly

• US 10,358,722 B2
• Filed: 12/14/2015
• Issued: 07/23/2019
• Est. Priority Date: 12/14/2015
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Wiltse, John, Slevin, Damien
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US14/967,672
• Publication Number:
  US 20170167024A1
• Time in Patent Office: 1,317 Days
• Field of Search: 15634533, 15634534, 118715
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

A face plate of a showerhead assembly of a deposition apparatus in which semiconductor substrates are processed includes gas holes arranged in an asymmetric pattern with a hole density which is substantially uniform or varies across the face plate. The face plate can include a lower wall and an outer wall extending vertically upwardly from an outer periphery of the lower wall. The outer wall is sealed to an outer periphery of a back plate such that an inner plenum is formed between the face plate and the back plate. The gas hole pattern in the face plate avoids symmetry which can cause defects on processed substrates.

Claims

1. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate and the gas holes are arranged in a Vogel pattern.

2. The face plate of claim 1, wherein the gas holes are located at intersections of the curved lines wherein the curved lines extend outwardly in clockwise and counterclockwise directions around the center of the face plate, the clockwise lines intersecting the counterclockwise lines at single locations along the counterclockwise lines.

3. The face plate of claim 1, wherein the face plate includes a bottom wall containing the gas holes, a side wall extending upwardly from an outer periphery of the bottom wall, a top wall extending inwardly from an upper end of the side wall, and optional posts extending upwardly from an upper surface of the bottom wall, the posts being tapered with a smaller diameter at the upper surface of the bottom wall.

4. The face plate of claim 1, wherein a gas hole is located at the center of the face plate.

8. The face plate of claim 2, wherein each of the gas holes has a diameter of about 0.04 inch.

9. The face plate of claim 1, wherein the pattern of gas holes has at least 3000 gas holes.

10. The face plate of claim 1, wherein the gas hole pattern has about the same number of gas holes per unit area from the center of the face plate to an outer periphery of the gas hole pattern.

13. The face plate of claim 1, wherein the gas hole pattern has no lines of symmetry and the holes are evenly distributed.

14. A deposition apparatus for processing a substrate, the deposition apparatus comprising:

a vacuum chamber including a processing zone in which a substrate may be processed;

at least one gas source in fluid communication with the vacuum chamber, the at least one gas source operable to supply a process gas into the vacuum chamber during processing;

a showerhead assembly including the face plate of claim 1 and back plate, the back plate including at least one gas inlet in fluid communication with the at least one gas source, the gas holes in the face plate distributing the process gas into the vacuum chamber during processing; and

a substrate pedestal assembly configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.

15. The deposition apparatus of claim 14, wherein the showerhead assembly further comprises a stem wherein the back plate extends transversely outward from a lower end of the stem, the stem having at least one gas passage extending vertically therethrough in fluid communication with the at least one gas source.

16. The deposition apparatus of claim 14, wherein an inner plenum is located between a lower surface of the back plate, an upper surface of the face plate, and a lower inner surface of an outer wall of the face plate.

17. A method of depositing material on an upper surface of a substrate in the deposition apparatus of claim 14, the method comprising:

supporting a substrate on the upper surface of the substrate pedestal assembly disposed in the vacuum chamber of the deposition apparatus;

supplying at least one gas from at least one gas source through the gas holes in the face plate;

energizing the at least one gas into plasma; and

uniformly depositing material on an upper surface of the substrate.

18. A method of manufacturing the face plate of claim 1, comprising:

drilling the gas holes such that the angle between each hole and a radially adjacent gas hole is about 137.5°

.

19. The method of claim 18, wherein the face plate is a metal plate.

20. The method of claim 19, wherein the metal plate comprises an aluminum alloy plate and the gas holes are drilled with a numerically controlled drilling machine.

5. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate, the gas holes located at intersections of the curved lines wherein the curved lines extend outwardly in clockwise and counterclockwise directions around the center of the face plate, the clockwise lines intersecting the counterclockwise lines at single locations along the counterclockwise lines, wherein (a) distances between adjacent gas holes located along the clockwise curved lines are about equal to distances between adjacent gas holes located along the counterclockwise curved lines or (b) the total number of clockwise curved lines of gas holes and the total number of counterclockwise curved lines of gas holes are consecutive members of the Fibonacci sequence.

6. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate, the gas holes located at intersections of the curved lines wherein the curved lines extend outwardly in clockwise and counterclockwise directions around the center of the face plate, the clockwise lines intersecting the counterclockwise lines at single locations along the counterclockwise lines, wherein (a) a ratio of total number of the clockwise curved lines of gas holes to total number of counterclockwise curved lines of holes approaches the golden ratio (1.6180) or (b) a ratio of total number of the counterclockwise curved lines of gas holes to total number of clockwise curved lines of holes approaches the golden ratio (1.6180).

7. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate, the gas holes located at intersections of the curved lines wherein the curved lines extend outwardly in clockwise and counterclockwise directions around the center of the face plate, the clockwise lines intersecting the counterclockwise lines at single locations along the counterclockwise lines, wherein (a) at an outer periphery of the gas hole pattern there are less than 100 counterclockwise curved lines of gas holes and at least 140 clockwise curved lines of gas holes or (b) at an outer periphery of the gas hole pattern there are less than 100 clockwise curved lines of gas holes and at least 140 counterclockwise curved lines of gas holes.

11. A face plate of a showerhead useful in a deposition apparatus for processing semiconductor substrates, the face plate having an asymmetric gas hole pattern of gas holes, wherein the gas holes are spaced apart along curved lines which intersect at locations outwardly of a center of the face plate, the gas hole pattern having a non-radial and non-concentric distribution of gas holes extending through the face plate, the gas holes are located at intersections of the curved lines wherein the curved lines extend outwardly in clockwise and counterclockwise directions around the center of the face plate, the clockwise lines intersecting the counterclockwise lines at single locations along the counterclockwise lines, wherein each of the gas holes has a radial position defined by polar coordinates r_n and θ

_n according to the formulas;

θ

=c1*n and r_n=c2√

{square root over (θ

_n)}

wherein c1 and c2 are constants, and c1/2pi is an irrational number.

12. The face plate of claim 11, where c1 is the golden angle (2.39996 radians or 137.508°

).