Optimal weighted averaging pre-processing schemes for laser absorption spectroscopy
First Claim
1. A method of measuring absorption using a spectroscopic instrument, the method comprising:
- initiating absorption measurements with the spectroscopic instrument and receiving a series of raw intensity measurement data points from at least one detector of the spectroscopic instrument;
determining if detector noise or fluctuation noise dominates in the series of raw intensity measurement data points;
calculating, by a digital signal processor and based on the determination, a set of weighting coefficients for the raw intensity measurement data points, wherein greater weight is given to larger intensity raw measurement data points over smaller raw intensity measurement data points when detector noise dominates, and wherein greater weight is given to smaller intensity raw measurement data points over larger intensity raw measurement data points when fluctuation noise dominates; and
performing, by the digital signal processor, a weighted averaging upon the raw intensity measurement data points using the calculated set of weighting coefficients to output from the spectroscopic instrument a set of pre-processed measurement data that is characterized by reduced noise contributions.
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Abstract
A method of processing raw measurement data from a tunable diode laser absorption spectroscopy (TDLAS) tool or other spectroscopic instrument is provided that determines what types of noise (electronic or process flow) are present in the measurement. Based on that determination, the noise is reduced by performing a weighted averaging using weights selected according to the dominant type of noise present, or a general case is applied to determine weights where neither noise type is dominant. The method also involves performing continuous spectroscopy measurements with the tool, with the data and weighted averaging being constantly updated. Weighting coefficients may also be adjusted based on similarity or difference between time-adjacent traces.
6 Citations
17 Claims
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1. A method of measuring absorption using a spectroscopic instrument, the method comprising:
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initiating absorption measurements with the spectroscopic instrument and receiving a series of raw intensity measurement data points from at least one detector of the spectroscopic instrument; determining if detector noise or fluctuation noise dominates in the series of raw intensity measurement data points; calculating, by a digital signal processor and based on the determination, a set of weighting coefficients for the raw intensity measurement data points, wherein greater weight is given to larger intensity raw measurement data points over smaller raw intensity measurement data points when detector noise dominates, and wherein greater weight is given to smaller intensity raw measurement data points over larger intensity raw measurement data points when fluctuation noise dominates; and performing, by the digital signal processor, a weighted averaging upon the raw intensity measurement data points using the calculated set of weighting coefficients to output from the spectroscopic instrument a set of pre-processed measurement data that is characterized by reduced noise contributions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of processing tunable diode laser absorption spectroscopy (TDLAS) signals to improve measurement precision, the method comprising:
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performing, using a TDLAS instrument, a series of laser scans through a sample gas and measuring a transmission amplitude for each laser scan output as a series of raw intensity measurement data points; modeling, by a digital signal processor, noise in the raw intensity measurement data points to select weighting coefficients for each laser scan, wherein the selected weighting coefficients are given as - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification