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Semiconductor device and semiconductor device production system

  • US 10,361,222 B2
  • Filed: 02/15/2018
  • Issued: 07/23/2019
  • Est. Priority Date: 01/17/2002
  • Status: Expired due to Term
First Claim
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1. A display device comprising:

  • a surface comprising a first projection and a first depression;

    a polycrystalline semiconductor film over the surface;

    a gate insulating film over the polycrystalline semiconductor film;

    a gate electrode over the gate insulating film;

    an insulating film over the gate electrode; and

    an electrode electrically connected to the polycrystalline semiconductor film,wherein a surface of the polycrystalline semiconductor film comprises a second projection and a second depression, andwherein the gate electrode and the first projection of the surface overlap each other.

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