Controlling the uniformity of PECVD deposition
First Claim
1. A method of plasma modifying a vessel having a lumen defined at least in part by a surface to be treated, the method comprising:
- providing plasma in or near the surface by providing an outer electrode outside the vessel and an inner electrode at least partially inside the lumen of the vessel and energizing the electrodes using radio frequency energy under conditions effective for plasma modification of the surface of the vessel; and
at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the vessel;
in which the plasma modification of the surface comprises plasma enhanced chemical vapor deposition (PECVD) and the plasma does not include a substantial amount of hollow cathode plasma.
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Accused Products
Abstract
A method and apparatus for plasma modifying a workpiece such as a syringe barrel, cartridge barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the interior surface of the generally cylindrical wall. A vessel made according to the process or using the apparatus described above. A pharmaceutical package comprising the syringe barrel or vial containing a pharmaceutical preparation, secured with a closure.
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Citations
20 Claims
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1. A method of plasma modifying a vessel having a lumen defined at least in part by a surface to be treated, the method comprising:
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providing plasma in or near the surface by providing an outer electrode outside the vessel and an inner electrode at least partially inside the lumen of the vessel and energizing the electrodes using radio frequency energy under conditions effective for plasma modification of the surface of the vessel; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the vessel; in which the plasma modification of the surface comprises plasma enhanced chemical vapor deposition (PECVD) and the plasma does not include a substantial amount of hollow cathode plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 16, 17, 18, 19, 20)
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14. A method of plasma modifying a vessel having a surface to be treated, the surface to be treated defining at least a portion of a lumen, the method comprising:
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providing plasma in or near the surface under conditions effective for plasma modification of the surface of the vessel;
in which the conditions effective for plasma modification comprise supplying a material to the lumen, the material comprising;a precursor comprising Parylene N or poly(paraxylylene);
Parylene C or poly(2-chloroparaxylylene);
Parylene D or poly(2,5-dichloropara-xylylene);
Parylene HT or poly(tetrafluoropara-xylylene);
or their dimers;
or a combination of two or more of these;optionally an oxidizing gas; and optionally a diluent gas; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the vessel; in which the plasma modification of the surface comprises plasma enhanced chemical vapor deposition (PECVD) and the plasma does not include a substantial amount of hollow cathode plasma.
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15. A method of plasma modifying a vessel having a surface to be treated, the surface to be treated defining at least a portion of a lumen, the method comprising:
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providing plasma in or near the surface under conditions effective for plasma modification of the surface of the vessel;
in which the conditions effective for plasma modification comprise supplying a material to the lumen, the material comprisinga precursor comprising; dimeric tetrafluoroparaxylylene, difluorocarbene, monomeric tetrafluoroethylene, oligomeric tetrafluoroethylene having the formula F2C=CF(CF2)xF in which x is from 1 to 100, optionally 2 to 50, optionally 2-20, optionally 2-10, sodium chlorodifluoroacetate, chlorodifluoromethane, bromodifluoromethane, hexafluoropropylene oxide, 1 H,1 H,2H,2H-perfluorodecyl acrylate (FDA), a bromofluoroalkane in which the alkane moiety has from 1 to 6 carbon atoms, an iodofluoroalkane in which the alkane moiety has from 1 to 6 carbon atoms, or a combination of any two or more of these; optionally an oxidizing gas; and optionally a diluent gas; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the vessel; in which the plasma modification of the surface comprises plasma enhanced chemical vapor deposition (PECVD) and the plasma does not include a substantial amount of hollow cathode plasma.
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Specification