Control plate for a high conductance valve
First Claim
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1. A control plate for a high-conductance valve comprising:
- a control plate body formed as a basically circular disk having a flat side and an opposed side opposite the flat side, the control plate configured to be moved within a valve by an actuator, the flat side having a continuous uninterrupted flat portion to shut-off fluid flow in the valve;
a centered mounting hole defined as a counterbore in the control plate body, the centered mounting hole terminating in a control plate through hole defined in the control plate body, the control plate through hole having a diameter that is less than a diameter of the centered mounting hole;
a central insert received in the mounting hole; and
at least one insert hole defined in the central insert, each insert hole in conjunction with the control plate through hole forming a fluid path for fluid to pass from the flat side through to the opposed side.
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Accused Products
Abstract
A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. Enhanced leak tightness in the valve shut-off condition may additionally be provided by selectively incorporating into the control plate materials softer than the material comprising the orifice ridge. The control plate is especially useful in high conductance, fast acting, and proportional control applications such as gas delivery in semiconductor manufacturing.
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Citations
33 Claims
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1. A control plate for a high-conductance valve comprising:
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a control plate body formed as a basically circular disk having a flat side and an opposed side opposite the flat side, the control plate configured to be moved within a valve by an actuator, the flat side having a continuous uninterrupted flat portion to shut-off fluid flow in the valve; a centered mounting hole defined as a counterbore in the control plate body, the centered mounting hole terminating in a control plate through hole defined in the control plate body, the control plate through hole having a diameter that is less than a diameter of the centered mounting hole; a central insert received in the mounting hole; and at least one insert hole defined in the central insert, each insert hole in conjunction with the control plate through hole forming a fluid path for fluid to pass from the flat side through to the opposed side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A valve assembly comprising:
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a valve body having a valve chamber, at least one first fluid conduit aperture in fluid communication with the valve chamber, at least one second fluid conduit aperture in fluid communication with the valve chamber, and at least one pair of adjacent orifice ridge segments, the at least one pair of adjacent orifice ridge segments extending from the valve body into the valve chamber and defining an intermediate valve chamber portion between the at least one pair of adjacent orifice ridge segments; and a control plate including a control plate body having a first side and a second side opposed to the first side, the control plate body being movable between a closed position in which a surface region of the first side sealingly contacts the at least one pair of adjacent orifice ridge segments and an open position in which an open gap is present between the surface region and the at least one pair of adjacent orifice ridge segments, the control plate further including a centered mounting hole defined as a counterbore in the control plate body, the centered mounting hole terminating in a control plate through hole defined in the control plate body, the control plate through hole having a diameter that is less than a diameter of the centered mounting hole; a central insert received in the mounting hole; and at least one insert hole defined in the central insert, each insert hole in conjunction with the control plate through hole forming a fluid path for fluid to pass from the first side through to the second side. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification