Digital controller for a MEMS gyroscope

• US 10,365,104 B2
• Filed: 05/04/2017
• Issued: 07/30/2019
• Est. Priority Date: 05/11/2016
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Collin, Rauli, Wjuga, Konsta, Aaltonen, Lasse
• Primary Examiner(s): West, Paul M.
• Assistant Examiner(s): Shabman, Mark A
• Application Number:
  US15/586,404
• Publication Number:
  US 20170328712A1
• Time in Patent Office: 817 Days
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: H03D 2200/005 Analog to digital conversion
• CPC Class Codes: H03D 2200/0054 Digital filters
• CPC Class Codes: H03D 2200/0082 Quadrature arrangements
• CPC Class Codes: H03D 7/00 Transference of modulation from one carrier to another, e.g. frequency-changing H03D9/00, H03D11/00 take precedence; dielectric amplifiers, magnetic amplifiers, parametric amplifiers used as a frequency-changers H03F
• CPC Class Codes: H03G 3/20 Automatic control H03G3/005 takes precedence; combined with volume compression or expansion H03G7/00
• CPC Class Codes: H03H 17/0248 Filters characterised by a particular frequency response or filtering method
• CPC Class Codes: H03H 2218/04 In-phase and quadrature [I/Q] signals
• CPC Class Codes: H03M 3/436 characterised by the order of the loop filter, e.g. error feedback type
• CPC Class Codes: H03M 3/458 Analogue/digital converters using delta-sigma modulation as an intermediate step

Abstract

A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.

Claims

1. A digital control circuitry for a MEMS gyroscope, comprising:

a digital primary loop circuitry configured to process a digitized primary signal, the digital primary loop circuitry comprising

a first analog-to-digital converter configured to digitize an analog primary input signal into the digitized primary signal, and

a first infinite impulse filter configured to cause a −

90-degree phase shift of the digitized primary signal on a resonance frequency of a mechanical resonator of the MEMS gyroscope, the first digital infinite impulse response filter providing in its output a filtered digitized primary signal; and

a digital secondary loop circuitry configured to process a digitized secondary signal; and

a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the filtered digitized primary signal;

wherein the digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.

2. The digital controller circuitry according to claim 1, wherein

the first infinite impulse response filter is further configured to filter quantization noise in the digitized primary signal caused by the first analog-to-digital converter.

3. The digital controller circuitry according to claim 2, wherein the digital secondary loop further comprises a second digital low pass IIR filter configured to cause a −

90-degree phase shift of the digitized secondary signal on the resonance frequency of the mechanical resonator of the MEMS gyroscope.

4. The digital controller circuitry according to claim 3, wherein

the second digital low pass filter is further configured to filter quantization noise in the digitized secondary signal caused by the second analog-to digital converter.

5. The digital controller circuitry according to claim 2, wherein the digital phase shifting filter circuitry comprises at least two digital filters configured for phase shifting the digitized primary signal for generating the in-phase demodulation signal and the quadrature demodulation signals, and wherein the phase shifting digital filters are configured to be calibrated with calibrated filter coefficients, which coefficients may vary based on temperature.

6. The digital controller circuitry according to claim 5, wherein a quantization noise transfer function of the analog-to-digital converter is configured have a notch at the resonance frequency of the mechanical resonator of the MEMS gyroscope.

7. The digital controller circuitry according to claim 1, wherein:

the digital secondary loop circuitry comprises a second analog-to-digital converter configured to digitize an analog secondary input signal into the digitized secondary signal; and

the digital phase shifting filter circuitry produces at its outputs the two phase shifted demodulation signals comprising an in-phase demodulation signal and a quadrature demodulation signal; and

the digital secondary loop circuitry further comprises a coherent detector circuitry configured for receiving the in-phase demodulation signal and the quadrature demodulation signal and for performing a phase aligned demodulation of the digitized secondary signal using the in-phase and quadrature demodulation signals.

8. The digital controller circuitry according to claim 7, wherein the coherent detector circuitry comprises:

an in-phase branch comprising a first mixer circuitry configured to use the in-phase demodulation signal for down converting the digitized secondary signal into an in-phase magnitude signal; and

a quadrature branch comprising a second mixer circuitry configured to use the quadrature demodulation signal for down converting the digitized secondary signal in to a quadrature magnitude signal,

wherein the in-phase branch of the coherent detector circuitry further comprises a vector norm circuitry configured to calculate a vector norm for the in-phase magnitude signal, the vector norm comprising absolute value of length of in-phase magnitude value and quadrature magnitude value vectors combined.

9. The digital controller circuitry according to claim 8, wherein at least one of the in-phase branch and the quadrature branch further comprise a decimating filter configured to filter and to reduce the sampling rate of the respective magnitude signal.

10. The digital controller circuitry according to claim 1, wherein any of the first and second analog-to-digital converters comprise a sigma-delta analog-to-digital converter.

11. The digital controller circuitry according to claim 10, wherein the sigma-delta converter comprises a continuous-time sigma-delta analog-to-digital converter.

12. The digital controller circuitry according to claim 1, wherein the digital primary loop further comprises an automatic gain control circuitry configured to detect a total alternating amplitude level of the digitized primary signal and to control a digital multiplication element configured to multiply the amplitude of the digitized phase shifted primary signal for producing a digital primary AC signal.

13. The digital controller circuitry according to claim 1, wherein the digital primary loop further comprises an automatic gain control circuitry configured to detect a total alternating amplitude level of the digitized primary signal and to provide a DC signal to be summed with the phase shifted digitized primary signal for producing the digital primary AC signal.

14. The digital controller circuitry according to claim 1, wherein the digital primary loop further comprises a start-up circuitry configured to provide a start-up signal in the digital primary loop, the start-up signal comprising a digital pulse form causing the first digital infinite impulse response filter to output a signal comprising a frequency component at the resonance frequency of the mechanical resonator of the MEMS gyroscope.

15. The digital controller circuitry according to claim 14, wherein the digital primary loop further comprises an amplitude limiting circuitry configured to control amplitude of the filtered digitized primary signal at the output of the first digital infinite impulse response filter.

16. The digital controller circuitry according to claim 1, wherein the digital controller circuitry is further configured to provide the filtered digitized primary signal as an input to a phase locked loop circuitry, wherein the phase locked loop circuitry is configured to provide a master clock for the digital controller, and wherein the master clock is synchronized to the resonance frequency of the mechanical resonator of the MEMS gyroscope.

17. A MEMS gyroscope comprising:

a primary element,

a secondary element,

analog front end circuitry configured to process analog electrical signals received from the primary and secondary elements, and

the digital controller circuitry according to claim 1,

wherein the primary element and the secondary element are configured to be provided with a DC rotor bias voltage for capacitive detection of motion of the elements.