Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus
First Claim
1. A beam irradiation apparatus, comprising:
- an irradiation system from which a processing beam is irradiated to an object to process the object with the processing beam;
a movable body that is movable relative to the irradiation system within a two-dimensional plane including a first direction and a second direction intersecting the first direction;
a mark detection system arranged separate from the irradiation system, from which a measurement beam is irradiated to the object placed on the movable body to detect marks of the object, the mark detection system having an optical member and an irradiation position of the measurement beam being changed in the first direction using the optical member; and
a controller,wherein;
the controller controls movement of the movable body,the mark detection system detects a first mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,the mark detection system detects a second mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,the controller controls a position of the movable body in the second direction during a time period between the detection of the first mark and the detection of the second mark, andthe controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and the processing beam, based on results of the detection of the first mark and the detection of the second mark.
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Abstract
In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
17 Citations
22 Claims
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1. A beam irradiation apparatus, comprising:
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an irradiation system from which a processing beam is irradiated to an object to process the object with the processing beam; a movable body that is movable relative to the irradiation system within a two-dimensional plane including a first direction and a second direction intersecting the first direction; a mark detection system arranged separate from the irradiation system, from which a measurement beam is irradiated to the object placed on the movable body to detect marks of the object, the mark detection system having an optical member and an irradiation position of the measurement beam being changed in the first direction using the optical member; and a controller, wherein; the controller controls movement of the movable body, the mark detection system detects a first mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, the mark detection system detects a second mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, the controller controls a position of the movable body in the second direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and the processing beam, based on results of the detection of the first mark and the detection of the second mark. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A beam irradiation method, comprising:
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irradiating an object with a processing beam from an irradiation system to process the object with the processing beam; moving a movable body on which the object provided with a plurality of marks is placed, relative to the irradiation system within a two-dimensional plane including a first direction and a second direction intersecting the first direction, detecting marks of the object by irradiating the object placed on the movable body with a measurement beam from a mark detection system arranged separate from the irradiation system, the mark detection system having an optical member, and an irradiation position of the measurement beam being changed in the first direction using the optical member; and controlling the movable body with a controller; wherein; the mark detection system detects a first mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, the mark detection system detects a second mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, the controller controls a position of the movable body in the second direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and the processing beam, based on results of the detection of the first mark and the detection of the second mark.
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Specification