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Heating apparatus for a MEMS sensor

  • US 10,370,239 B2
  • Filed: 11/08/2016
  • Issued: 08/06/2019
  • Est. Priority Date: 11/10/2015
  • Status: Active Grant
First Claim
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1. A heating apparatus for a MEMS sensor, comprising:

  • a metallic supply lead element for electric current;

    a metallic return lead element for electric current; and

    a defined number of metallic heating elements configured between the supply lead element and the return lead element, a constant electrical current density being configurable in the supply lead element, in the return lead element, and in the heating elements;

    wherein the heating apparatus is for the MEMS sensor,wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, andwherein the supply lead element and the return lead element have a reverse symmetry.

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