Heating apparatus for a MEMS sensor
First Claim
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1. A heating apparatus for a MEMS sensor, comprising:
- a metallic supply lead element for electric current;
a metallic return lead element for electric current; and
a defined number of metallic heating elements configured between the supply lead element and the return lead element, a constant electrical current density being configurable in the supply lead element, in the return lead element, and in the heating elements;
wherein the heating apparatus is for the MEMS sensor,wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, andwherein the supply lead element and the return lead element have a reverse symmetry.
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Abstract
A heating apparatus for a MEMS sensor, comprising a metallic supply lead element for electric current; a metallic return lead element for electric current; and a defined number of metallic heating elements configured between the supply lead element and the return lead element, a substantially constant electrical current density being configurable in the supply lead element, in the return lead element, and in the heating elements.
16 Citations
16 Claims
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1. A heating apparatus for a MEMS sensor, comprising:
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a metallic supply lead element for electric current; a metallic return lead element for electric current; and a defined number of metallic heating elements configured between the supply lead element and the return lead element, a constant electrical current density being configurable in the supply lead element, in the return lead element, and in the heating elements; wherein the heating apparatus is for the MEMS sensor, wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, and wherein the supply lead element and the return lead element have a reverse symmetry. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A MEMS sensor, comprising:
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a heating apparatus disposed on a diaphragm, the heating apparatus including a metallic supply lead element for electric current, a metallic return lead element for electric current, and a defined number of metallic heating elements configured between the supply lead element and the return lead element; wherein an electrical current density, which is approximately constant, is configurable in the supply lead element, in the return lead element, and in the heating elements, and wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, and wherein the supply lead element and the return lead element have a reverse symmetry. - View Dependent Claims (14)
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15. A method for manufacturing a heating apparatus for a MEMS sensor, the method comprising:
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furnishing a metallic supply lead element for electric current; furnishing a metallic return lead element for electric current; and disposing metallic heating elements between the supply lead element and the return lead element, the supply lead element, such that the return lead element, and the heating elements are configured so that an electrical current density, which is approximately constant, is configurable in all the elements; wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, and wherein the supply lead element and the return lead element have a reverse symmetry.
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16. A method of using a heating apparatus, the method comprising:
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providing a heating apparatus, the heating apparatus including a metallic supply lead element for electric current, a metallic return lead element for electric current, and a defined number of metallic heating elements configured between the supply lead element and the return lead element, a constant electrical current density, which is approximately constant, is configurable in the supply lead element, in the return lead element, and in the heating elements; and using the heating apparatus in a MEMS gas sensor; wherein the supply lead element, on one side of the heating elements, has a definedly decreasing width proceeding in a direction of a current flow over a heating region, and the return lead element, on an opposite side of the heating elements, has a definedly increasing width proceeding in the direction of the current flow over the heating region, and wherein the supply lead element and the return lead element have a reverse symmetry.
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Specification