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Systems and methods for a four-mass vibrating MEMS structure

  • US 10,371,521 B2
  • Filed: 03/22/2017
  • Issued: 08/06/2019
  • Est. Priority Date: 05/26/2016
  • Status: Active Grant
First Claim
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1. A MEMS sensor, the MEMS sensor comprising:

  • four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from a center of the MEMS sensor through a center of the respective proof mass, each proof mass comprising;

    a plurality of horizontal drive combs; and

    a plurality of sense combs; and

    an upper substrate and a lower substrate, wherein the four proof masses are positioned between the upper substrate and the lower substrate;

    one or more drive electrodes positioned on the upper substrate and the lower substrate, wherein the one or more drive electrodes drive the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency;

    wherein the drive electrodes positioned on the upper substrate and the lower substrate drive the horizontal drive combs on the four proof masses;

    wherein a drive mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

    wherein a sense mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

    wherein each proof mass is driven out of phase with adjacent proof masses.

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