Systems and methods for a four-mass vibrating MEMS structure

• US 10,371,521 B2
• Filed: 03/22/2017
• Issued: 08/06/2019
• Est. Priority Date: 05/26/2016
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Johnson, Burgess R.
• Primary Examiner(s): Kwok, Helen C
• Application Number:
  US15/466,784
• Publication Number:
  US 20180231384A1
• Time in Patent Office: 867 Days
• CPC Class Codes: G01C 19/5656 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

Systems and methods for a four-mass vibrating mems structure are provided. In certain implementations, a MEMS sensor includes four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from the center of the MEMS sensor through the center of the respective proof mass, each proof mass comprising a plurality of drive combs; and a plurality of sense combs. In further embodiments, the MEMS sensor includes at least one substrate having one or more drive electrodes for driving the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency.

Claims

1. A MEMS sensor, the MEMS sensor comprising:

four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from a center of the MEMS sensor through a center of the respective proof mass, each proof mass comprising;

a plurality of horizontal drive combs; and

a plurality of sense combs; and

an upper substrate and a lower substrate, wherein the four proof masses are positioned between the upper substrate and the lower substrate;

one or more drive electrodes positioned on the upper substrate and the lower substrate, wherein the one or more drive electrodes drive the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency;

wherein the drive electrodes positioned on the upper substrate and the lower substrate drive the horizontal drive combs on the four proof masses;

wherein a drive mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein a sense mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein each proof mass is driven out of phase with adjacent proof masses.

2. The MEMS sensor of claim 1, wherein the sense combs include a plurality of comb fingers, the sense combs oriented such that a gap between adjacent comb fingers does not vary when the proof masses oscillate along the radial lines.

3. The MEMS sensor of claim 1, wherein the MEMS sensor vibrates with zero angular momentum and zero linear momentum.

4. The MEMS sensor of claim 1, wherein each proof mass is coupled to adjacent proof masses through proof mass flexures, wherein each proof mass is coupled to each of the substrates through substrate flexures.

5. The MEMS sensor of claim 1, wherein each proof mass is driven out of phase with adjacent proof masses.

6. The MEMS sensor of claim 1, wherein the MEMS sensor is a Coriolis vibratory gyroscope.

7. A method for operating a MEMS sensor, wherein the MEMS sensor comprises:

four proof masses, each proof mass comprising;

a plurality of horizontal drive combs; and

a plurality of sense combs; and

an upper substrate and a lower substrate, wherein the four proof masses are positioned between the upper substrate and the lower substrate; and

one or more drive electrodes positioned on the upper substrate and the lower sub state;

the method comprising;

driving the four proof masses, wherein each proof mass is driven by the plurality of horizontal drive combs, such that the four proof masses oscillate at a drive frequency along radial lines extending from a center of the MEMS sensor through a center of the respective proof mass; and

sensing vibration of the four proof masses in a sense mode, wherein a resonant frequency of the sense mode is different from the drive frequency;

wherein the drive electrodes positioned on the upper substrate and the lower substrate drive the horizontal drive combs on the four proof masses;

wherein a drive mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein a sense mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein each proof mass is driven out of phase with adjacent proof masses.

8. The method of claim 7, wherein sensing vibration of the four proof masses is performed by a plurality of sense electrodes attached to at least one of the substrates, where the sense electrodes sense a motion of sense combs formed on the four proof masses.

9. The method of claim 8, wherein the sense combs include a plurality of comb fingers, the sense combs oriented such that a gap between adjacent comb fingers does not vary when the proof masses oscillate along the radial lines.

10. The method of claim 7, wherein the MEMS sensor vibrates with zero angular momentum and zero linear momentum.

11. The method of claim 7, wherein each proof mass is coupled to adjacent proof masses through proof mass flexures, wherein each proof mass is coupled to each of the substrates through substrate flexures.

12. The method of claim 7, wherein each proof mass is driven out of phase with adjacent proof masses.

13. The method of claim 7, wherein the MEMS sensor is a Coriolis vibratory gyroscope.

14. A MEMS sensor, the MEMS sensor comprising:

four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from a center of the MEMS sensor through a center of the respective proof mass, each proof mass comprising;

a plurality of horizontal drive combs; and

a plurality of sense combs;

an upper substrate and a lower substrate, wherein the four proof masses are positioned between the upper substrate and the lower substrate;

one or more drive electrodes positioned on the upper substrate and the lower substrate, wherein the one or more drive electrodes drive the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency; and

a plurality of flexures that couple each proof mass to adjacent proof masses and couple the four proof masses to the upper and lower substrates;

wherein the drive electrodes positioned on the upper substrate and the lower substrate drive the horizontal drive combs on the four proof masses;

wherein a drive mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein a sense mode motion of the proof masses has zero total linear momentum and zero total angular momentum;

wherein each proof mass is driven out of phase with adjacent proof masses.

15. The MEMS sensor of claim 14, wherein the sense combs include a plurality of comb fingers, the sense combs oriented such that a gap between adjacent comb fingers does not vary when the proof masses oscillate along the radial lines.

16. The MEMS sensor of claim 14, wherein the MEMS sensor vibrates with zero angular momentum and zero linear momentum.