MEMS accelerometer with proof masses moving in an anti-phase direction

• US 10,371,715 B2
• Filed: 03/09/2015
• Issued: 08/06/2019
• Est. Priority Date: 12/23/2013
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Baldasarre, Leonardo, Thompson, Matthew Julian
• Primary Examiner(s): Williams, Jamel E
• Application Number:
  US14/642,529
• Publication Number:
  US 20150192603A1
• Time in Patent Office: 1,611 Days
• Field of Search: 7350412
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0837 the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
• CPC Class Codes: G01P 2015/086 using a torsional suspension spring

Abstract

A sensor is disclosed. The sensor includes a substrate and a mechanical structure. The mechanical structure includes at least two proof masses including a first proof mass and a second proof mass. The mechanical structure also includes a flexible coupling between the at least two proof masses and the substrate. The at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane. The at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane.

Claims

1. A sensor comprising:

a substrate; and

a mechanical structure, wherein the mechanical structure includes;

at least two proof masses including a first proof mass and a second proof mass;

a flexible coupling between the at least two proof masses and the substrate; and

a transducer for measuring motion in a direction normal and parallel to a plane of the substrate of the mechanical structure relative to the substrate,

wherein the at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane, and wherein the transducer is a capacitive sensor.

2. The sensor of claim 1, wherein the first proof mass and the second proof mass have unbalancing torque.

3. The sensor of claim 1, wherein the flexible coupling further comprises:

at least one anchor; and

a rotational and torsional system, wherein the rotational and torsional system further includes an anchoring spring connecting the at least one anchor, a first rotational lever and a second rotational lever, wherein a first rotational and torsional spring connects the first proof mass to the first rotational lever with a first lever length, and wherein a second rotational and torsional spring connects the second proof mass to the second rotational lever with a second lever length.

4. The sensor of claim 3, wherein the first lever length and the second lever length are different.

5. The sensor of claim 4, wherein the flexible coupling further includes:

a second anchoring rotational and torsional spring connecting the at least one anchor and a second rotational and torsional lever;

a third rotational and torsional spring connects the first proof mass to the second rotational lever with a third lever length; and

a fourth rotational and torsional spring connects the second proof mass to the second rotational lever with a fourth lever length,

wherein the first rotational lever and the second rotational lever rotate antiphase in a direction normal to the substrate in response to acceleration of the sensor normal to the substrate, and

wherein the first rotational lever and the second rotational lever rotate antiphase in a plane parallel to the substrate in response to acceleration of the sensor parallel to the substrate.

6. The sensor of claim 5, wherein the third lever length and the fourth lever length are different.

7. The sensor of claim 1, further comprising a magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever, and wherein the mechanical structure rotates in another plane parallel to the plane in response to the magnetic field in a direction parallel to the plane.

8. The sensor of claim 1, further comprising a magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever, and wherein the mechanical structure rotates in a directional normal to the plane in response to the magnetic field in a direction normal to the plane.

9. The sensor of claim 1, further comprising a magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever.

10. The sensor of claim 1, wherein the mechanical structure rotates in a directional normal to the plane in response to a magnetic field in a direction normal to the plane.

11. A sensor comprising:

a substrate; and

a mechanical structure, wherein the mechanical structure includes;

at least two proof masses including a first proof mass and a second proof mass,

a flexible coupling between the at least two proof masses and the substrate; and

a transducer for measuring motion in a direction normal and parallel to a plane of the substrate of the mechanical structure relative to the substrate,

wherein the at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane,

wherein the at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane, and

wherein the transducer is a capacitive sensor.

12. The sensor of claim 11, wherein the first proof mass and the second proof mass have unbalancing torque.

13. The sensor of claim 11, wherein the flexible coupling further comprises:

at least one anchor; and

a rotational, translational and torsional system, wherein the rotational, translational and torsional system further including an anchoring spring connecting the at least one anchor, a first rotational lever and a second rotational lever, wherein a first rotational, translational and torsional spring connects the first proof mass to the first rotational torsional lever with a first lever length, and wherein a second rotational, translational and torsional spring connects the second proof mass to the second rotational lever with a second lever length.

14. The sensor of claim 13, wherein the first lever length and the second lever length are different.

15. The sensor of claim 14, wherein the flexible coupling further includes:

a second anchoring rotational, translational and torsional spring connecting the at least one anchor and a second rotational, translational and torsional lever;

a third rotational, translational and torsional spring connects the first proof mass to the second rotational, translational and torsional lever with a third lever length; and

a fourth rotational, translational and torsional spring connects the second proof mass to the second rotational, translational and torsional lever with a fourth lever length.

16. The sensor of claim 15, wherein the third lever length and the fourth lever length are different.

17. The sensor of claim 15, further comprising magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever.

18. The sensor of claim 11, further comprising a magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever, and wherein the mechanical structure rotates in another plane parallel to the plane in response to the magnetic field in a direction parallel to the plane.

19. The sensor of claim 11, further comprising a magnetic material, wherein the magnetic material is on any of the at least two proof masses, the first rotational lever, and the second rotational lever, and wherein the mechanical structure rotates in a directional normal to the plane in response to the magnetic field in a direction normal to the plane.

20. The sensor of claim 11, wherein the transducer is on any of the two proof masses, or the mechanical structure, or lever arms associated with the two proof masses.

21. The sensor of claim 11, wherein the transducer is a capacitive sensor.