Pressure-type flow rate control device

• US 10,372,145 B2
• Filed: 11/25/2014
• Issued: 08/06/2019
• Est. Priority Date: 12/05/2013
• Status: Active Grant

• Current Assignee: Fujikin Incorporated
• Original Assignee: Fujikin Incorporated
• Inventors: Hirose, Takashi, Yoshida, Toshihide, Matsumoto, Atsushi, Hirata, Kaoru, Ikeda, Nobukazu, Nishino, Kouji, Dohi, Ryousuke, Sugita, Katsuyuki
• Primary Examiner(s): Le, Minh Q
• Application Number:
  US15/034,002
• Publication Number:
  US 20160349763A1
• Time in Patent Office: 1,715 Days
• Field of Search: 1374875, 137486, 137488
• CPC Class Codes: F16K 31/007 Piezoelectric stacks
• CPC Class Codes: F16K 7/14 arranged to be deformed against a flat seat
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.

Claims

1. A pressure-type flow rate control device comprising:

a body provided with a fluid passage communicating a fluid inlet and a fluid outlet,

a control valve for pressure control fixed to the body to open and close the fluid passage,

an orifice arranged in the course of the fluid passage on the downstream side of the control valve for pressure control, and

a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve for pressure control and the orifice, wherein,

the fluid passage comprises a first passage portion communicating the control valve for pressure control and a pressure detection chamber on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice, whereby the fluid passage is configured to go through the pressure detection chamber, wherein

the pressure sensor is arranged below the control valve, and the first passage portion vertically extends from a central portion of a valve element of the control valve to an end portion of the pressure detection chamber, and wherein

the second passage portion comprises a vertical part connected to an opposite end portion of the pressure detection chamber and a horizontal part extending from the vertical part, the orifice being positioned near an end portion of the horizontal part.

2. The pressure-type flow rate control device according to claim 1, wherein the control valve for pressure control comprises a metallic diaphragm valve element, and the first passage portion is configured to vertically extend from a central portion of the metallic diaphragm valve element of the control valve for pressure control.

3. The pressure-type flow rate control device according to claim 1, wherein the pressure sensor is inserted into a recessed portion formed on a bottom face of the body via a ring gasket, the pressure detection chamber being surrounded by an inner bottom face of the recessed portion, the ring gasket, and the pressure detection surface of the pressure sensor, and wherein the ring gasket has sealing faces on both sides formed to lean to the side of the inner circumferential surface side.

4. The pressure-type flow rate control device according to claim 3, wherein the distance between the inner bottom face of the recessed portion and the pressure detection surface is 0.13 to 0.30 mm.

5. The pressure-type flow rate control device according to claim 3, wherein the ring gasket comprises sealing faces on both sides, an inner circumferential surface, an outer circumferential surface, inner tapered faces between the inner circumferential surface and sealing faces on both sides, and outer tapered faces between the outer circumferential surface and sealing faces on both sides, and the inner tapered faces are smaller than the outer tapered faces.

6. The pressure-type flow rate control device according to claim 1, wherein diameters of the first passage portion and the second passage portion are smaller than that of an inlet side passage portion communicating the fluid inlet and a circumferential portion of the control valve.

7. The pressure-type flow rate control device according to claim 6, wherein the inlet side passage portion is formed in the body and is obliquely connected to the circumferential portion of the control valve.

8. The pressure-type flow rate control device according to claim 1, wherein a diameter of the first passage portion is smaller than that of the vertical part of the second passage portion and wherein the first passage portion is shorter than the vertical part of the second passage portion.

9. The pressure-type flow rate control device according to claim 1, wherein a diameter of an outlet side passage portion communicating the orifice and the fluid outlet is larger than that of the horizontal part of the second passage portion.

10. The pressure-type flow rate control device according to claim 1, wherein the end portion of the pressure detection chamber is located directly below the central portion of the valve element and the opposite end portion of the pressure detection chamber is located outside the valve element.