Method for manufacturing gallium nitride substrate using core-shell nanoparticle
First Claim
1. A method of fabricating a gallium nitride substrate, the method comprising:
- coating nanoparticles with a core-shell structure on a temporary substrate to form at least one nanoparticle layer;
allowing a pit gallium nitride (pit GaN) layer to grow on the temporary substrate;
allowing a mirror GaN layer (mirror GaN) to grow on the pit GaN layer; and
separating the temporary substrate,wherein each of the nanoparticles with a core-shell structure comprises a core and an ionic polymer shell coated on a surface of the core surface.
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Abstract
Disclosed is a method of fabricating a gallium nitride substrate using nanoparticles with a core-shell structure. A method of fabricating a gallium nitride substrate using nanoparticles with a core-shell structure according to an embodiment of the present disclosure includes a step of coating nanoparticles with a core-shell structure on a temporary substrate to form at least one nanoparticle layer; a step of allowing a pit gallium nitride (pit GaN) layer to grow on the temporary substrate; a step of allowing a mirror GaN layer (mirror GaN) to grow on the pit GaN layer; and a step of separating the temporary substrate, wherein each of the nanoparticles with a core-shell structure includes a core and an ionic polymer shell coated on a surface of the core surface.
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Citations
12 Claims
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1. A method of fabricating a gallium nitride substrate, the method comprising:
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coating nanoparticles with a core-shell structure on a temporary substrate to form at least one nanoparticle layer; allowing a pit gallium nitride (pit GaN) layer to grow on the temporary substrate; allowing a mirror GaN layer (mirror GaN) to grow on the pit GaN layer; and separating the temporary substrate, wherein each of the nanoparticles with a core-shell structure comprises a core and an ionic polymer shell coated on a surface of the core surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification