Embedded sacrificial layer to enhance biosensor stability and lifetime for nanopatterned electrodes
First Claim
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1. A structure comprising:
- an electrode having topography located on a surface of an electrode base structure, wherein said topography is defined by individual articulated features;
a biological functionalization layer located on one or more surfaces of at least said topography of said electrode; and
a sacrificial layer located on said biological functionalization layer and present only in the physical space located between said individual articulated features of said topography of said electrode such that the biological functionalization layer located on a topmost surface of said topography of said electrode is physically exposed.
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Abstract
An electrode structure is provided that includes an electrode base having topography located on a surface of the electrode base structure. A biological functionalization layer is located on one or more exposed surfaces of at least the topography of the electrode. A sacrificial layer is located on the biological functionalization layer and is present at least in the physical space located between the individual features of the topography of the electrode.
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18 Claims
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1. A structure comprising:
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an electrode having topography located on a surface of an electrode base structure, wherein said topography is defined by individual articulated features; a biological functionalization layer located on one or more surfaces of at least said topography of said electrode; and a sacrificial layer located on said biological functionalization layer and present only in the physical space located between said individual articulated features of said topography of said electrode such that the biological functionalization layer located on a topmost surface of said topography of said electrode is physically exposed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming a structure, said method comprising:
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providing an electrode having topography located on a surface of an electrode base structure, wherein said topography is defined by individual articulated features; attaching a biological functionalization material to one or more surfaces of at least said topography of said electrode; and forming a sacrificial layer on said biological functionalization layer and only within gaps located between said individual articulated features of said topography of said electrode such that the biological functionalization layer located on a topmost surface of said topography of said electrode is physically exposed. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification