Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

• US 10,381,251 B2
• Filed: 06/08/2012
• Issued: 08/13/2019
• Est. Priority Date: 06/19/2002
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Doherty, Brian J., Mariano, Thomas R., Sullivan, Robert P.
• Primary Examiner(s): Myers, Glenn F
• Application Number:
  US13/492,341
• Publication Number:
  US 20120288348A1
• Time in Patent Office: 2,622 Days
• Field of Search: 41433102, 41433103, 41433114, 414318, 414935, 414561, 414591, 414659, 414660, 4147511, 414785, 414266, 414268, 414269, 414277, 414279, 414282, 414589, 41422201, 414940, 414682, 414680, 414560, 414217, 4142171, 41422207, 414280, 41422203, 41422501, 294 8154, 294 8162, 212168, 212332, 212 84, 1984682, 1984701, 19875011, 1988033
• CPC Class Codes: B65G 1/0457 with suspended load carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

Claims

1. An overhead transport vehicle comprising:

a body;

an overhead hoist; and

a translating stage coupled to the overhead hoist and the body, the translating stage configured to extend from a retracted position inside the body along a horizontal axis to a first unretracted position to a first of two sides outside the body, to extend from the retracted position inside the body along the horizontal axis to a second unretracted position to the second of the two sides outside the body, the second side being different from the first side, and to move a gripper, wherein extension of the translating stage is configured to move the gripper from a first position within the body to a second position along the horizontal axis that is exterior to the body and adjacent to a side of the overhead transport vehicle;

wherein the gripper is configured to grip a FOUP;

wherein the overhead hoist is configured to enable vertical movement of the gripper.

2. The overhead transport vehicle of claim 1, wherein the gripper is further configured to place a FOUP on a load port.

3. The overhead transport vehicle of claim 2, wherein the gripper is further configured to retract to a starting position after placing the FOUP on the load port.

4. The overhead transport vehicle of claim 1, wherein the gripper is further configured to place the FOUP on a storage location.

5. The overhead transport vehicle of claim 4, wherein the gripper is further configured to retract to a starting position after placing the FOUP on the storage location.

6. The overhead transport vehicle of claim 1, wherein a load port is disposed on an integrated circuit chip manufacturing floor.

7. The overhead transport vehicle of claim 1, wherein the overhead transport vehicle is configured to extend a first distance below an integrated circuit chip manufacturing ceiling and a second distance above an integrated circuit chip manufacturing floor, with a load port being substantially disposed at the second distance from the integrated circuit chip manufacturing floor and at the first distance from the integrated circuit chip manufacturing floor ceiling.

8. The overhead transport vehicle of claim 1, wherein when the FOUP is transported to a load port, the gripper is configured to vertically move without horizontally moving the overhead hoist.

9. The overhead transport vehicle of claim 1, wherein when the FOUP is transported to the storage location, the overhead hoist is configured to be horizontally moved to the position above a storage location by the translating stage and the gripper is configured to vertically move.

10. The overhead transport vehicle of claim 1, wherein the gripper is configured to be vertically moved by the overhead hoist.

11. An overhead transport vehicle comprising:

a body;

an overhead hoist; and

a translating stage coupled to the overhead hoist and the body, the translating stage configured to extend from a retracted position inside the body along a horizontal axis to a first unretracted position to a first of two sides outside the body, to extend from the retracted position inside the body along the horizontal axis to a second unretracted position to the second of the two sides, the second side being different from the first side, and move a gripper, wherein extension of the translating stage is configured to move the gripper from a first position within the body to a second position along the horizontal axis that is exterior to the body and adjacent to a side of the overhead transport vehicle;

wherein the overhead hoist is configured to enable vertical movement of the gripper;

wherein the gripper is configured such that the horizontal movement of the translating stage causes horizontal movement of the gripper and vertical movement of the translating stage causes vertical movement of the gripper;

wherein the gripper is configured to pick up a FOUP from either of two sides of the overhead transport vehicle when the translating stage is fully extended beyond the body of the overhead transport vehicle.

12. The overhead transport vehicle of claim 11, wherein the gripper is further configured to place the FOUP on a load port.

13. The overhead transport vehicle of claim 12, wherein the gripper is further configured to retract to a starting position after placing the FOUP on the load port.

14. The overhead transport vehicle of claim 11, wherein the gripper is further configured to place the FOUP on a conveyor.

15. The overhead transport vehicle of claim 14, wherein the gripper is further configured to retract to a starting position after placing the FOUP on the conveyor.

16. The overhead transport vehicle of claim 11, wherein a load port is disposed on an integrated circuit chip manufacturing floor.