Polishing pads produced by an additive manufacturing process

• US 10,384,330 B2
• Filed: 10/16/2015
• Issued: 08/20/2019
• Est. Priority Date: 10/17/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bajaj, Rajeev, Redfield, Daniel, Orilall, Mahendra C., Fu, Boyi, Khanna, Aniruddh, Fung, Jason G., Cornejo, Mario, Chockalingam, Ashwin, Yamamura, Mayu, Kakireddy, Veera Raghava Reddy, Kumar, Ashavani, Hariharan, Venkat, Menk, Gregory E., Redeker, Fred C., Patibandla, Nag B., Ng, Hou T., Davenport, Robert E., Sinha, Amritanshu
• Primary Examiner(s): Ali, Shuangyi Abu
• Application Number:
  US14/885,950
• Publication Number:
  US 20160107295A1
• Time in Patent Office: 1,404 Days
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B24D 3/28 Resins or natural or synthetic macromolecular compounds B24D3/22 takes precedence
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing

Abstract

Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.

Claims

1. A method of forming a polishing article, comprising:

dispensing a plurality of first droplets of a first liquid on a surface of a portion of a polishing body, wherein the surface comprises a first material formed by at least partially curing an amount of the first liquid;

exposing the plurality of first droplets to electromagnetic radiation to form a plurality of partially cured first droplets having contact angles of 50 degrees or more relative to the surface of the first material

dispensing a plurality of second droplets of a second liquid on the surface of the portion of the polishing body, wherein the plurality of second droplets are positioned adjacent to one or more of the first droplets; and

exposing the plurality of the second droplets to electromagnetic radiation to form a plurality of partially cured second droplets, wherein exposing the plurality of first droplets to electromagnetic radiation overlaps with exposing the plurality of second droplets to electromagnetic radiation.

2. The method of claim 1, wherein the contact angles of the one or more partially cured first droplets relative to the surface of the first material are greater than the equilibrium contact angle of a dispensed first droplet relative to the surface if the dispensed first droplet had not been exposed to the electromagnetic radiation.

3. The method of claim 1, wherein the first material comprises a polymeric material selected from the group consisting of:

polyamides, polycarbonates, polyesters, polyether ketones, polyethers, polyoxymethylenes, polyether sulfones, polyetherim ides, polyim ides, polyolefins, polysiloxanes, polysulfones, polyphenylenes, polyphenylene sulfides, polyurethanes, polystyrene, polyacrylonitriles, polyacrylates, polymethylmethacrylates, polyurethane acrylates, polyester acrylates, polyether acrylates, epoxy acrylates, polycarbonates, polyesters, melamines, polysulfones, polyvinyl materials, acrylonitrile butadiene styrene (ABS), halogenated polymers, block copolymers and copolymers thereof.

4. The method of claim 1, wherein the first liquid comprises a urethane acrylate, a surface cure photoinitiator, and a bulk cure photoinitiator.

5. The method of claim 4, wherein

the bulk cure photoinitiator comprises a material selected from a group consisting of benzoin ethers, benzyl ketals, acetyl phenones, alkyl phenones, and phosphine oxides, and

the surface cure photoinitiator comprises a material selected from a group consisting of benzophenone compounds and thioxanthone compounds.

6. The method of claim 4, wherein the first material comprises a polymeric material selected from the group consisting of:

polyamides, polycarbonates, polyesters, polyether ketones, polyethers, polyoxymethylenes, polyether sulfone, polyetherim ides, polyimides, polyolefins, polysiloxanes, polysulfones, polyphenylenes, polyphenylene sulfides, polyurethanes, polystyrene, polyacrylonitriles, polyacrylates, polymethylmethacrylates, polyurethane acrylates, polyester acrylates, polyether acrylates, epoxy acrylates, polycarbonates, polyesters, melamines, polysulfones, polyvinyl materials, acrylonitrile butadiene styrene (ABS), halogenated polymers, block copolymers and copolymers thereof.

11. The method of claim 1, wherein the plurality of first droplets and the plurality of second droplets are exposed to the electromagnetic radiation within between 0.1 second and 1 second of contacting the surface.

12. The method of claim 1, wherein the plurality of partially cured second droplets have contact angles relative to the surface of the first material of 50 degrees or more.

13. The method of claim 1, wherein a contact angle of each of the partially cured first droplets relative to a surface of a previously formed layer is greater than an equilibrium contact angle of each of the first droplets relative to the surface of the previously formed layer if they had not been exposed to the electromagnetic radiation.

14. The method of claim 13, wherein the plurality of partially cured second droplets have a contact angle relative to the surface of the previously formed layer of 50 degrees or more.

15. The method of claim 1, wherein the first material comprises a polymeric material selected from the group consisting of:

polyamides, polycarbonates, polyesters, polyether ketones, polyethers, polyoxymethylenes, polyether sulfones, polyetherimides, polyimides, polyolefins, polysiloxanes, polysulfones, polyphenylenes, polyphenylene sulfides, polyurethanes, polystyrene, polyacrylonitriles, polyacrylates, polymethylmethacrylates, polyurethane acrylates, polyester acrylates, polyether acrylates, epoxy acrylates, polycarbonates, polyesters, melamines, polysulfones, polyvinyl materials, acrylonitrile butadiene styrene (ABS), halogenated polymers, block copolymers and copolymers thereof.

16. The method of claim 1, wherein the first liquid and the second liquid each comprise a urethane acrylate, a surface cure photoinitiator and a bulk cure photoinitiator, wherein

the bulk cure photoinitiator comprises a material selected from a group consisting of benzoin ethers, benzyl ketals, acetyl phenones, alkyl phenones, and phosphine oxides, and

the surface cure photoinitiator comprises a material selected from a group consisting of benzophenone compounds and thioxanthone compounds.

17. The method of claim 1, wherein one or more of the second droplets partially overlap one or more of the first droplets.

19. The method of claim 1, wherein the plurality of first droplets are exposed to the electromagnetic radiation within between 0.1 seconds and 1 second of contacting the surface.

21. The method of claim 1, further comprising forming a plurality of polishing elements by sequential repetitions of:

dispensing a plurality of first droplets of the first liquid over a surface of the plurality of partially cured first droplets; and

exposing the plurality of first droplets to electromagnetic radiation to form a plurality of partially cured first droplets having contact angles of 50 degrees or more relative to the surface of the previously formed plurality of partially cured first droplets, wherein at least portions of the plurality of polishing elements extend beyond a surface of the polishing body.

22. The method of claim 1, wherein the plurality of partially cured first droplets have contact angles of 55 degrees or more relative to the surface of the first material.

7. A method of forming a polishing pad, comprising:

forming a layer over a surface of a previously formed layer, wherein forming the layer comprises;

depositing a plurality of first droplets of a first composition in a first pattern over one or more regions of the surface of the previously formed layer;

depositing a plurality of second droplets of a second composition in a second pattern over the one or more regions of the surface of the previously formed layer;

exposing the plurality of first droplets to electromagnetic radiation generated from a source to form a plurality of partially cured first droplets having contact angles of 50 degrees or more relative to the surface of the previously formed layer; and

exposing the plurality of second droplets to electromagnetic radiation generated from the source to form a plurality of partially cured second droplets having contact angles of 50 degrees or more relative to the surface of the previously formed layer.

8. The method of claim 7, wherein the first composition and the second composition each comprise a urethane acrylate, a surface cure photoinitiator and a bulk cure photoinitiator, wherein

the bulk cure photoinitiator comprises a material selected from a group consisting of benzoin ethers, benzyl ketals, acetyl phenones, alkyl phenones, and phosphine oxides, and

the surface cure photoinitiator comprises a material selected from a group consisting of benzophenone compounds and thioxanthone compounds.

9. The method of claim 7, wherein a material composition ratio of the first droplets to the second droplets in the layer formed over the surface is greater than a material composition ratio of the first droplets to the second droplets in the previously formed layer.

10. The method of claim 7, wherein the first pattern of the first droplets is used to form part of a first polishing element and the second pattern of the second droplets is used to form part of a second polishing element, wherein the first polishing element comprises a first polymer composition and the second polishing element comprises a second polymer composition, and the first polymer composition has a storage modulus that is less than the second polymer composition.

18. The method of claim 7, wherein at least some of the deposited second droplets overlap at least a portion of some of the deposited first droplets on the one or more regions of the surface.

20. The method of claim 7, wherein

the first droplets are used to form a first polishing element,

the second droplets are used to form a plurality of second polishing elements,

at least portions of the plurality of second polishing elements extend beyond a surface of the first polishing element, and

the method further comprises forming the plurality of second polishing elements by sequential repetitions of:

depositing a plurality of the first droplets in the first pattern; and

exposing the plurality of first droplets to electromagnetic radiation to form a plurality of partially cured first droplets having contact angles of 50 degrees or more relative to a surface of a previously formed layer.