Partially etched phase-transforming optical element

• US 10,386,553 B2
• Filed: 02/27/2017
• Issued: 08/20/2019
• Est. Priority Date: 04/15/2015
• Status: Active Grant

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Finisar Corporation (II-VI Incorporated)
• Inventors: Mossberg, Thomas W., Greiner, Christoph M., Iazikov, Dmitri
• Primary Examiner(s): Beatty, Collin X
• Application Number:
  US15/442,711
• Publication Number:
  US 20170168202A1
• Time in Patent Office: 904 Days
• Field of Search: 359573, 359577, 359586
• CPC Class Codes: G02B 5/1861 Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: G02B 5/1866 Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: G02B 5/1871 Transmissive phase gratings

Abstract

An optical element (transmissive or reflective) includes a transmissive layer comprising two different optical media arranged among discrete volumes arranged along the layer. The discrete volumes are arranged to approximate a desired phase function (typically modulo 2π) and are smaller than an operational wavelength in order to provide a range of phase delays needed to adequately approximate the desired phase function.

Claims

1. An optical element comprising a transmissive layer comprising first and second optical media, wherein:

(a) the first and second optical media are substantially transparent over an operational wavelength range including a design vacuum wavelength λ

₀ and are characterized by differing respective first and second wavelength-dependent bulk refractive indices n₁(λ

) and n₂(λ

), and the first optical medium comprises a substantially solid material;

(b) the first and second optical media are arranged within the layer as a contiguous multitude of discrete volumes, including a non-empty subset of volumes of the multitude having a largest transverse dimension less than about λ

₀, wherein each discrete volume comprises either the first optical medium or the second optical medium, but not both;

(c) the optical element is structurally arranged so as to receive an optical signal, within the operational wavelength range, incident on a first surface of the transmissive layer within the transmission region and to transmit or reflect at least a portion of the incident optical signal transformed substantially according to a specified effective phase transformation function φ

_eff(x,y) that varies as a function of two-dimensional position coordinates x and y along the first surface;

(d) the discrete volumes of the multitude are variously sized and distributed on the transmissive layer so as to impart on the transmitted or reflected portion of the incident optical signal the effective phase transformation φ

_eff(x,y);

(e) the multitude of discrete volumes includes (i) multiple discrete volumes of the first optical medium that each extend entirely through the transmissive layer, (ii) multiple discrete volumes of the second optical medium that each extend entirely through the transmissive layer, (iii) multiple discrete volumes of the first optical medium that each extend only partly through the transmissive layer, and (iv) multiple discrete volumes of the second optical medium that each extend only partly through the transmissive layer;

(f) the contiguous multitude of discrete volumes is arranged so that;

(i) any locally perpendicular straight-line path, extending from the first surface of the transmissive layer to a second surface of the transmissive layer, passes through only the first optical medium, through only the second optical medium, or through only one discrete volume of each of the first and second optical media;

(ii) the discrete volumes of the multitude are distributed on the transmissive layer according to local thicknesses d₁(x,y) and d₂(x,y) through the first and second optical media, respectively, along the locally perpendicular straight-line path through a given position (x,y); and

(iii) the transmissive layer includes areal regions for which d₁(x,y)≠

0 and d₂(x,y)=0, areal regions for which d₁(x,y)=0 and d₂(x,y)≠

0, and areal regions for which d₁(x,y)≠

0 and d₂(x,y)≠

0; and

(g) one or both transverse dimensions of each areal region that corresponds to a discrete volume of the second optical medium that extends only partly through the transmissive layer and for which d₁(x,y)≠

0 and d₂(x,y)≠

0 are less than one or both transverse dimensions of each areal region that corresponds to a discrete volume of the second optical medium that extends entirely through the transmissive layer and thereby includes at least a portion thereof for which d₁(x,y)=0 and d₂(x,y)≠

0.

2. The optical element of claim 1 wherein the optical element is structurally arranged so as to receive the incident optical signal at substantially normal incidence.

3. The optical element of claim 1 further wherein the optical element further comprises a substantially solid substrate arranged so as to support the transmissive layer.

4. The optical element of claim 3 wherein the substrate comprises material differing from the first and second optical media.

5. The optical element of claim 3 wherein the substrate is substantially transparent over the operational wavelength range.

6. The optical element of claim 1 wherein the second optical medium comprises an ambient medium that is (i) vacuum characterized by the bulk refractive index n₂(λ

)=1, or (ii) gaseous or liquid material characterized by the bulk refractive index n₂(λ

).

7. The optical element of claim 1 wherein the second optical medium comprises substantially solid material characterized by the bulk refractive index n₂(λ

).

8. The optical element of claim 1 wherein, among the subset of the discrete volumes of the first optical medium that extend only partly through the transmissive layer, local thickness of the first optical medium increases monotonically as a smallest transverse dimension of the corresponding discrete volume of the first optical medium decreases.

9. The optical element of claim 1 wherein the transmissive layer has a substantially uniform thickness d₁(x,y)+d₂(x,y)=D.

10. The optical element of claim 1 wherein the contiguous multitude of discrete volumes is arranged so that (2π

/λ

₀)·

(n₁(λ

₀)·

d₁(x,y)+n₂(λ

₀)·

d₂(x,y)), averaged over a sampling area having a largest transverse dimension about equal to λ

₀ along the first surface, is either (i) substantially equal to φ

_eff(x,y) for a transmitting optical element or (ii) substantially equal to ½

·

φ

_eff(x,y) for a reflecting optical element.

11. The optical element of claim 1 wherein the transmissive layer has a substantially uniform thickness d₁(x,y)+d₂(x,y)=D that is substantially equal to Nλ

₀/(2|n₁(λ

₀)−

n₂(λ

₀)|), where N is a non-zero integer.

12. The optical element of claim 11 wherein N=1 or N=2.

13. The optical element of claim 1 further comprising a solid substrate or overlayer positioned against the first surface of the transmissive layer, wherein the substrate or overlayer against the first surface is substantially transparent over the operational wavelength range.

14. The optical element of claim 13 wherein the transmissive layer comprises a surface relief structure on a surface of the substrate or overlayer against the first surface with the second optical medium substantially filling recessed regions of the surface relief structure.

15. The optical element of claim 14 wherein the substrate or overlayer against the first surface comprises material differing from the first and second optical media, and the surface relief structure is formed in a surface layer of the first optical medium on the substrate.

16. The optical element of claim 14 wherein the substrate or overlayer against the first surface comprises the same material as the first optical medium, and the surface relief structure is formed on a surface of the substrate.

17. The optical element of claim 13 wherein the substrate or overlayer against the first surface comprises material differing from the first and second optical media.

18. The optical element of claim 1 wherein:

(c′

) the optical element is structurally arranged so as to receive the incident optical signal on the first surface within the transmission region and to transmit at least a portion of the incident optical signal transformed substantially according to the effective phase transformation function φ

_eff(x,y); and

(d′

) the discrete volumes of the multitude are variously sized and distributed on the transmissive layer so as to impart on the transmitted portion of the incident optical signal the effective phase transformation φ

_eff(x,y).

19. The optical element of claim 18 further comprising a solid substrate or overlayer positioned against the second surface of the transmissive layer, wherein the substrate or overlayer against the second surface is substantially transparent over the operational wavelength range.

20. The optical element of claim 19 wherein the transmissive layer comprises a surface relief structure on a surface of the substrate or overlayer against the second surface with the second optical medium substantially filling recessed regions of the surface relief structure.

21. The optical element of claim 20 wherein the substrate or overlayer against the second surface comprises material differing from the first and second optical media, and the surface relief structure is formed in a surface layer of the first optical medium on the substrate or overlayer.

22. The optical element of claim 20 wherein the substrate or overlayer against the second surface comprises the same material as the first optical medium, and the surface relief structure is formed on a surface of the substrate or overlayer.

23. The optical element of claim 19 wherein the substrate or overlayer against the second surface comprises material differing from the first and second optical media.

24. The optical element of claim 1 further comprising a reflector facing the second surface of the transmissive layer, wherein:

(c′

) the optical element is structurally arranged so as to receive the incident optical signal on the first surface within the transmission region and to reflect at least a portion of the incident optical signal transformed substantially according to the effective phase transformation function φ

_eff(x,y); and

(d′

) the discrete volumes of the multitude are variously sized and distributed on the transmissive layer so as to impart on the reflected portion of the incident optical signal the effective phase transformation φ

_eff(x,y).

25. The optical element of claim 24 wherein the reflector is positioned against the second surface of the transmissive layer.

26. The optical element of claim 24 further comprising a substrate positioned against the reflector with the reflector positioned between the substrate and the second surface of the transmissive layer.

27. The optical element of claim 24 wherein the optical element further comprises a substantially solid overlayer that is substantially transparent over the operational wavelength range, and the transmissive layer is positioned between the reflector and the overlayer.

28. The optical element of claim 27 wherein the overlayer comprises material different from the first and second optical media.

29. The optical element of claim 1 wherein φ

_eff(x,y) varies with both x and y.

30. The optical element of claim 1 wherein the position-dependent effective phase transformation function φ

_eff(x,y) is a modulo 2π

function.

31. The optical element of claim 1 wherein the effective phase transformation function φ

_eff(x,y) approximates a function of the form φ

(x,y)=Ax²+By², or φ

(x,y)=Ax²+By² modulo 2π

, where A and B are non-zero, positive or negative real numbers.

32. The optical element of claim 1 wherein the effective phase transformation function φ

_eff(x,y) approximates a function of the form φ

(θ

)=Mθ

, or φ

(θ

)=Mθ

modulo 2η

, for 0≤

θ

<

2π

, where θ

is related to x and y by cos θ

=x/(x²+y²)^1/2 and sin θ

=y/(x²+y²)^1/2 and M is a non-zero integer.

33. The optical element of claim 1 wherein the effective phase transformation function φ

_eff(x,y) approximates a sum, or a modulo 2π

sum, of distinct, specified, position-dependent phase transformation functions φ

₁(x,y) and φ

₂(x,y).

34. The optical element of claim 33 wherein (i) φ

₁(x,y)=Ax²+By², or φ

₁(x,y)=Ax²+By² modulo 2π

, where A and B are non-zero, positive or negative real numbers, and (ii) φ

₂(x,y)=Mθ

, or φ

₂(θ

)=Mθ

modulo 2π

, for 0≤

θ

<

2π

, where θ

is related to x and y by cos θ

=x/(x²+y²)^1/2 and sin θ

=y/(x²+y²)^1/2 and M is a non-zero integer.

35. The optical element of claim 1 wherein each discrete volume of the multitude has a smallest transverse dimension no smaller than about λ

₀/K, where 2≤

K≤

20.

36. The optical element of claim 35 wherein (i) the transmissive layer has a substantially uniform thickness D, (ii) at any given position (x,y), either d₁(x,y)=D and d₂(x,y)=0, d₁(x,y)=0 and d₂(x,y)=D, or d₁(x,y)+d₂(x,y)=D with d₁(x,y)≠

0 and d₂(x,y)≠

0, where d₁(x,y) and d₂(x,y) are local thicknesses through the first and second optical media, respectively, along a locally perpendicular straight-line path through the transmissive layer at a given position (x,y), and (iii) (2π

/λ

₀)·

(n₁(λ

₀)·

d₁(x,y)+n₂(λ

₀)·

d₂(x,y)), averaged over a sampling area having transverse dimensions about equal to λ

₀ by λ

₀ along the first surface of the transmissive layer, can assume one of at least K²+1 discrete values.

37. The optical element of claim 1 wherein the discrete volumes are spatially distributed across the transmission region of the transmissive layer in an uncorrelated, irregular, random, or pseudo-random arrangement.

38. The optical element of claim 1 wherein (i) the transmissive layer has a substantially uniform thickness D, and (ii) the discrete volumes of the multitude are arranged according to a regular two-dimensional grid pattern along the first surface of the transmissive layer characterized by a grid spacing of Λ

₀ between about λ

₀/20 and about λ

₀.

39. The optical element of claim 38 wherein the multitude of discrete volumes is arranged so that, within each unit cell of the grid pattern, the discrete volumes or portions thereof encompassed by that unit cell are arranged according to one of a set of K predetermined unit arrangements, so that (2π

/λ

₀)·

(n₁(λ

₀)·

d₁(x,y)+n₂(λ

₀)·

d₂(x,y)), averaged over each unit cell of the grid pattern, can assume one of K discrete values, wherein (i) d₁(x,y) and d₂(x,y) are local thicknesses through the first and second optical media, respectively, along a locally perpendicular straight-line path through the transmissive layer at a given position (x,y), (ii) d₁(x,y)+d₂(x,y)=D, and (iii) the transmissive layer includes areal regions for which d₁(x,y)=D and d₂(x,y)=0, areal regions for which d₁(x,y)=0 and d₂(x,y)=D, and areal regions for which d₁(x,y)+d₂(x,y)=D with d₁(x,y)≠

0 and d₂(x,y)≠

0.

40. The optical element of claim 38 wherein the multitude of discrete volumes is arranged so that (i) the discrete volumes or portions thereof encompassed by each unit cell of the grid pattern are arranged as a single simply connected volume of the first optical medium surrounded by the second optical medium and one or both of the first and second surfaces or (ii) the discrete volumes or portions thereof encompassed by each unit cell of the grid pattern are arranged as a single simply connected volume of the second optical medium surrounded by the first optical medium and one or both of the first and second surfaces, so that (2π

/λ

₀)·

(n₁(λ

₀)·

d₁(x,y)+n₂(λ

₀)·

d₂(x,y)), averaged over each unit cell of the grid pattern, can assume a substantially continuous range of values according to a size of each unit cell occupied by the corresponding simply connected volume, wherein (1) d₁(x,y) and d₂(x,y) are local thicknesses through the first and second optical media, respectively, along a locally perpendicular straight-line path through the transmissive layer at a given position (x,y), (2) d₁(x,y)+d₂(x,y)=D, and (3) the transmissive layer includes one or more areal regions for which d₁(x,y)=D and d₂(x,y)=0, one or more areal regions for which d₁(x,y)=0 and d₂(x,y)=D, and one or more areal regions for which d₁(x,y)+d₂(x,y)=D with d₁(x,y)≠

0 and d₂(x,y)≠

0.

41. A method for using the optical element of claim 1, the method comprising (i) directing an optical signal onto the first surface of the transmissive layer of the optical element and (ii) transmitting through or reflecting from the optical element at least a portion of the incident optical signal transformed substantially according to the effective phase transformation function φ

_eff(x,y).

42. A method for making the optical element of claim 1, the method comprising spatially selectively processing a layer comprising the first optical medium to replace, in selected volumes of the layer, the first optical medium with the second optical medium, thereby forming the transmissive layer of the optical element.

43. The method of claim 42 further comprising calibrating an arrangement of the variously sized and distributed discrete volumes of the multitude according to the effective phase transformation φ

_eff(x,y).