Imprint apparatus and method for producing article
First Claim
1. An imprint apparatus which forms a pattern of an imprint material in a region on a substrate by using a mold, comprising:
- a first optical member configured to guide first and second lights to the region;
a first light source configured to emit the first light by means of the first optical member to the region to observe the region;
a second light source configured to emit the second light having a first wavelength by means of the first optical member to the region to deform the region;
a third light source configured to emit a third light having a second wavelength to cure the imprint material on the deformed region;
a light shielding member configured to selectively shield the first light and the second light; and
a driving unit which drives the light shielding member,wherein the second and third light sources are different, and the first wavelength is longer than the second wavelength.
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Accused Products
Abstract
An imprint apparatus which forms a pattern of an imprint material in a region to be processed on a substrate by using a mold includes an observing unit configured to include a light source which emits first light and a receiving unit which receives the first light which is emitted from the light source, is reflected by the region to be processed, and passes through the mold; a deforming unit configured to thermally deform the region to be processed by illumination with second light; and a combining member which combines the first light of the light source and the second light from the deforming unit and guides the first light and the second light to the region to be processed.
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Citations
17 Claims
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1. An imprint apparatus which forms a pattern of an imprint material in a region on a substrate by using a mold, comprising:
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a first optical member configured to guide first and second lights to the region; a first light source configured to emit the first light by means of the first optical member to the region to observe the region; a second light source configured to emit the second light having a first wavelength by means of the first optical member to the region to deform the region; a third light source configured to emit a third light having a second wavelength to cure the imprint material on the deformed region; a light shielding member configured to selectively shield the first light and the second light; and a driving unit which drives the light shielding member, wherein the second and third light sources are different, and the first wavelength is longer than the second wavelength. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification