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Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process

  • US 10,391,605 B2
  • Filed: 10/06/2016
  • Issued: 08/27/2019
  • Est. Priority Date: 01/19/2016
  • Status: Active Grant
First Claim
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1. A polishing article, comprising:

  • a first polishing element formed of a plurality of sequentially formed layers, wherein the plurality of sequentially formed layers comprise;

    a first layer, comprising;

    a first pattern of porosity-forming agent containing regions that are disposed on a surface on which the first layer is formed; and

    a first structural material containing region, wherein the first structural material containing region is disposed on the surface and between adjacently positioned porosity-forming agent containing regions of the first pattern; and

    a second layer disposed on a surface of the first layer, the second layer comprising;

    a second pattern of porosity-forming agent containing regions that are disposed on the surface of the first layer; and

    a second structural material containing region, wherein the second structural material containing region is disposed on the surface of the first layer and between adjacently positioned porosity-forming agent containing regions of the second pattern, and wherein the first and the second structural material containing regions each comprise a material that is formed from a first resin precursor component, a second resin precursor component, and a first curing agent.

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