Physical quantity sensor
First Claim
Patent Images
1. A physical quantity sensor, comprising:
- an acceleration sensor provided with a sensing portion outputting a sensor signal corresponding to acceleration;
an angular velocity sensor provided with a sensing portion having an oscillating body that oscillates in a predetermined direction, the sensing portion outputting a sensor signal corresponding to an angular velocity from the sensing portion,at least one of the acceleration sensor and the angular velocity sensor being of a package structure, in which a cap portion is arranged in a sensor portion where the sensing portion is formed and the sensing portion is hermetically sealed in an airtight chamber defined between the sensor portion and the cap portion;
a case having a housing space set to a predetermined pressure and housing the acceleration sensor and the angular velocity sensor in the housing space;
a detection unit outputting a detection signal corresponding to an oscillation of the oscillating body in the angular velocity sensor;
a self-diagnostic unit self-diagnosing a detection environment of the angular velocity sensor on a basis of the detection signal outputted by the detection unit; and
a circuit board received in the housing space, wherein;
the acceleration sensor is stacked on the circuit board through an adhesive agent,the circuit board includes the detection unit and the self-diagnostic unit,the acceleration sensor is of the package structure and the airtight chamber is set to an atmospheric pressure,the housing space is set to a vacuum pressure, anda ratio of a volume of the airtight chamber with respect to a volume of the housing space is set to 1.0×
10−
7 or higher.
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Abstract
A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.
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Citations
15 Claims
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1. A physical quantity sensor, comprising:
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an acceleration sensor provided with a sensing portion outputting a sensor signal corresponding to acceleration; an angular velocity sensor provided with a sensing portion having an oscillating body that oscillates in a predetermined direction, the sensing portion outputting a sensor signal corresponding to an angular velocity from the sensing portion, at least one of the acceleration sensor and the angular velocity sensor being of a package structure, in which a cap portion is arranged in a sensor portion where the sensing portion is formed and the sensing portion is hermetically sealed in an airtight chamber defined between the sensor portion and the cap portion; a case having a housing space set to a predetermined pressure and housing the acceleration sensor and the angular velocity sensor in the housing space; a detection unit outputting a detection signal corresponding to an oscillation of the oscillating body in the angular velocity sensor; a self-diagnostic unit self-diagnosing a detection environment of the angular velocity sensor on a basis of the detection signal outputted by the detection unit; and a circuit board received in the housing space, wherein; the acceleration sensor is stacked on the circuit board through an adhesive agent, the circuit board includes the detection unit and the self-diagnostic unit, the acceleration sensor is of the package structure and the airtight chamber is set to an atmospheric pressure, the housing space is set to a vacuum pressure, and a ratio of a volume of the airtight chamber with respect to a volume of the housing space is set to 1.0×
10−
7 or higher.
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2. A physical quantity sensor, comprising:
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an acceleration sensor provided with a sensing portion outputting a sensor signal corresponding to acceleration; an angular velocity sensor provided with a sensing portion having an oscillating body that oscillates in a predetermined direction, the sensing portion outputting a sensor signal corresponding to an angular velocity from the sensing portion, at least one of the acceleration sensor and the angular velocity sensor being of a package structure, in which a cap portion is arranged in a sensor portion where the sensing portion is formed and the sensing portion is hermetically sealed in an airtight chamber defined between the sensor portion and the cap portion; a case having a housing space set to a predetermined pressure and housing the acceleration sensor and the angular velocity sensor in the housing space; a differential amplifier configured to output a detection signal corresponding to an oscillation of the oscillating body in the angular velocity sensor; a self-diagnostic unit self-diagnosing a detection environment of the angular velocity sensor on a basis of the detection signal outputted by the differential amplifier; and a circuit board received in the housing space, wherein; the acceleration sensor is stacked on the circuit board through an adhesive agent, the circuit board contains the differential amplifier and the self-diagnostic unit, the angular velocity sensor is of the package structure and the airtight chamber is set to a vacuum pressure, and the housing space is set to an atmospheric pressure. - View Dependent Claims (4, 6, 7, 8, 9, 10)
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3. A physical quantity sensor, comprising:
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an acceleration sensor provided with a sensing portion outputting a sensor signal corresponding to acceleration; an angular velocity sensor provided with a sensing portion having an oscillating body that oscillates in a predetermined direction, the sensing portion outputting a sensor signal corresponding to an angular velocity from the sensing portion, at least one of the acceleration sensor and the angular velocity sensor being of a package structure, in which a cap portion is arranged in a sensor portion where the sensing portion is formed and the sensing portion is hermetically sealed in an airtight chamber defined between the sensor portion and the cap portion; a case having a housing space set to a predetermined pressure and housing the acceleration sensor and the angular velocity sensor in the housing space; a differential amplifier configured to output a detection signal corresponding to an oscillation of the oscillating body in the angular velocity sensor; a self-diagnostic unit configured to self-diagnose a detection environment of the angular velocity sensor on a basis of the detection signal outputted by the differential amplifier; and a circuit board received in the housing space, wherein; the acceleration sensor is stacked on the circuit board through an adhesive agent, the circuit board contains the differential amplifier and the self diagnostic unit, the angular velocity sensor is of the package structure and the airtight chamber of the angular velocity sensor is set to a vacuum pressure, and the acceleration sensor is of the package structure and the airtight chamber of the acceleration sensor is set to an atmospheric pressure. - View Dependent Claims (5, 11, 12, 13, 14, 15)
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Specification