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Multi-axis accelerometer with reduced stress sensitivity

  • US 10,393,770 B2
  • Filed: 04/13/2017
  • Issued: 08/27/2019
  • Est. Priority Date: 04/28/2016
  • Status: Active Grant
First Claim
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1. An accelerometer component comprising:

  • a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first plurality of electrodes;

    a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second Z proof mass comprising a second plurality of electrodes;

    an X-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; and

    a Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;

    wherein the first plurality of electrodes and the second plurality of electrodes are symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

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