Multi-axis accelerometer with reduced stress sensitivity

• US 10,393,770 B2
• Filed: 04/13/2017
• Issued: 08/27/2019
• Est. Priority Date: 04/28/2016
• Status: Active Grant

• Current Assignee: Semiconductor Components Industries LLC (ON Semiconductor Corporation)
• Original Assignee: Semiconductor Components Industries LLC (ON Semiconductor Corporation)
• Inventors: Acar, Cenk, Simon, Brenton, Maity, Sandipan
• Primary Examiner(s): Kwok, Helen C
• Application Number:
  US15/487,294
• Publication Number:
  US 20170315147A1
• Time in Patent Office: 866 Days
• CPC Class Codes: B81B 2203/0181 See-saws
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

Claims

1. An accelerometer component comprising:

a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first plurality of electrodes;

a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second Z proof mass comprising a second plurality of electrodes;

an X-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; and

a Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;

wherein the first plurality of electrodes and the second plurality of electrodes are symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

2. The component of claim 1, wherein the X-axis accelerometer subcomponent is not directly mechanically coupled with the first Z proof mass.

3. The component of claim 1, wherein the Y-axis accelerometer subcomponent is not directly mechanically coupled with the second Z proof mass.

4. The component of claim 1, wherein each electrode of the first plurality of electrodes is larger in size than each electrode of the second plurality of electrodes.

5. The component of claim 1, wherein the first plurality of electrodes of the first Z proof mass comprises two electrodes.

6. The component of claim 1, wherein the second plurality of electrodes of the second Z proof mass comprises four electrodes.

7. The component of claim 1, wherein the first Z proof mass and the second Z proof mass rotate in opposite directions with respect to each other when accelerating.

8. The component of claim 1, wherein the X-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of an X proof mass anchor.

9. The component of claim 1, wherein the Y-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of a Y proof mass anchor.

10. An accelerometer component comprising:

a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first pair of electrodes;

a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second proof mass comprising a second pair of electrodes and a third pair of electrodes,

one of an X-axis accelerometer subcomponent or a Y-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; and

one of an X-axis accelerometer subcomponent or a Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;

wherein the X-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of an X proof mass anchor;

wherein the Y-axis accelerometer subcomponent comprises two electrode anchors located symmetrically with respect to each other on either side of a Y proof mass anchor; and

wherein each pair of electrodes is positioned so that each electrode pair is located symmetrically about one of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, or a fourth axis diagonal to the first axis and second axis.

11. The component of claim 10, wherein the first pair of electrodes is between the second pair of electrodes and the third pair of electrodes.

12. The component of claim 10, wherein the X-axis accelerometer subcomponent is not directly mechanically coupled with the first Z proof mass.

13. The component of claim 10, wherein the Y-axis accelerometer subcomponent is not directly mechanically coupled with the second Z proof mass.

14. An accelerometer component comprising:

a first Z proof mass rotatable about a first axis and coupled to an anchor, the first proof mass comprising a first pair of electrodes;

a second Z proof mass independently rotatable about the first axis from the first Z proof mass and coupled to the anchor, the second proof mass comprising a second pair of electrodes and a third pair of electrodes; and

an X-axis accelerometer component located within a perimeter of the first Z proof mass;

wherein the first Z proof mass and the second Z proof mass are each rotatable about the anchor; and

wherein each pair of electrodes is positioned so the X-axis accelerometer component is symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.

15. The component of claim 14, further comprising a Y-axis accelerometer component located within a perimeter of the second Z proof mass.

16. The component of claim 15, wherein the first pair of electrodes is between the second pair of electrodes and the third pair of electrodes.