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High density stocker with interlocking nubs

  • US 10,395,960 B2
  • Filed: 10/24/2017
  • Issued: 08/27/2019
  • Est. Priority Date: 10/24/2016
  • Status: Active Grant
First Claim
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1. A substrate stocker system comprising:

  • a high density storage chamber that comprises one or more high density containers or stacks of one or more substrates, each of the one or more substrates being supported on a respective carrier wherein the one or more high density containers or stacks are in a closed position;

    one or more low density containers, each of the one or more low density containers being configured to store one or more substrates;

    one or more opener stations, each of the one or more opener stations configured to send or receive one or more stacks or containers from the high density storage chamber and one or more substrates from the one or more low density containers, each of the one or more opener stations comprising one or more separator modules for changing one or more distances between corresponding one or more adjacent substrates in the one or more high density containers or stacks;

    a load port; and

    at least one robot configured to move;

    one or more containers or stacks between the high density storage chamber and the one or more opener stations; and

    one or more substrates between the one or more high density containers or stacks and the one or more low density containers;

    whereinthe one or more opener stations are located between the load port and the high density storage chamber;

    whereina separator module included within the one or more opener stations comprises;

    a conveyor belt; and

    a motor driven cogwheel;

    whereinthe conveyor belt comprises a plurality of interlocking nubs which interlock into corresponding notches in individual carriers; and

    the conveyor belt is driven such that the plurality of interlocking nubs interlock with the carrier and move or separate the one or more carriers and substrates by one or more predefined distances.

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